- Article
Surface Morphology of 6-Inch SiC Single Crystals in Solution Growth on Si-Face, C-Face and ( ) Plane
- Gangqiang Liang,
- Jiayi Kuang,
- Yilin Su and
- Yuan Liu
For solution growth of 6-inch 4H-SiC bulk crystals, the surface step morphology of the crystals grown on Si-face, C-face and (101¯2¯) plane was systematically characterized by laser confocal microscopy. The 2D-nucleation and step-bunching w...