- Article
A Wafer Pre-Alignment Algorithm Based on Weighted Fourier Series Fitting of Circles and Least Squares Fitting of Circles
- Jingsong Chen,
- Zhou Lan,
- Cheng Xue,
- Jun Lan,
- Zhenghao Liu and
- Yong Yang
The wafer pre-aligner is a crucial component in the lithography process to correct the wafer center and notch orientation. To improve the precision and the efficiency of pre-alignment, a new method to calibrate the center and the orientation of a waf...