A Wafer Pre-Alignment Algorithm Based on Weighted Fourier Series Fitting of Circles and Least Squares Fitting of Circles
Abstract
1. Introduction
2. Circle Fitting Method
2.1. Fitting the Center of the Wafer by WFC
2.2. Fitting the Arc of the Wafer by LSC
2.3. Pre-Alignment Algorithm
3. Simulation Analysis
3.1. WFC Simulation Analysis
3.2. Pre-Alignment Simulation and Result
4. Conclusions
Author Contributions
Funding
Data Availability Statement
Conflicts of Interest
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Chen, J.; Lan, Z.; Xue, C.; Lan, J.; Liu, Z.; Yang, Y. A Wafer Pre-Alignment Algorithm Based on Weighted Fourier Series Fitting of Circles and Least Squares Fitting of Circles. Micromachines 2023, 14, 956. https://doi.org/10.3390/mi14050956
Chen J, Lan Z, Xue C, Lan J, Liu Z, Yang Y. A Wafer Pre-Alignment Algorithm Based on Weighted Fourier Series Fitting of Circles and Least Squares Fitting of Circles. Micromachines. 2023; 14(5):956. https://doi.org/10.3390/mi14050956
Chicago/Turabian StyleChen, Jingsong, Zhou Lan, Cheng Xue, Jun Lan, Zhenghao Liu, and Yong Yang. 2023. "A Wafer Pre-Alignment Algorithm Based on Weighted Fourier Series Fitting of Circles and Least Squares Fitting of Circles" Micromachines 14, no. 5: 956. https://doi.org/10.3390/mi14050956
APA StyleChen, J., Lan, Z., Xue, C., Lan, J., Liu, Z., & Yang, Y. (2023). A Wafer Pre-Alignment Algorithm Based on Weighted Fourier Series Fitting of Circles and Least Squares Fitting of Circles. Micromachines, 14(5), 956. https://doi.org/10.3390/mi14050956