- Review
Ion Implantation Doping in Silicon Carbide and Gallium Nitride Electronic Devices
- Fabrizio Roccaforte,
- Filippo Giannazzo and
- Giuseppe Greco
Wide band gap semiconductors such as silicon carbide (SiC) and gallium nitride (GaN) are excellent materials for the next generation of high-power and high-frequency electronic devices. In fact, their wide band gap (>3 eV) and high critical electr...