- Article
Silicon Heterojunction Solar Cells with p-Type Silicon Carbon Window Layer
- Chia-Hsun Hsu,
- Xiao-Ying Zhang,
- Ming Jie Zhao,
- Hai-Jun Lin,
- Wen-Zhang Zhu and
- Shui-Yang Lien
Boron-doped hydrogenated amorphous silicon carbide (a-SiC:H) thin films are deposited using high frequency 27.12 MHz plasma enhanced chemical vapor deposition system as a window layer of silicon heterojunction (SHJ) solar cells. The CH4 gas flow rate...