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Energies 2014, 7(6), 3653-3663;

Silicon Heterojunction Solar Cells Using AlOx and Plasma-Immersion Ion Implantation

Department of Electronic Engineering, National United University, No. 1, Lienda, Miaoli 36003, Taiwan
Department of Engineering and System Science, National Tsing Hua University, No. 101, Section 2, Kuang-Fu Road, Hsinchu, 30013, Taiwan
Department of Electronic Engineering, National Chin-Yi University of Technology, No. 57, Sec. 2, Zhongshan Rd., Taiping Dist., Taichung 41170, Taiwan
Author to whom correspondence should be addressed.
Received: 13 March 2014 / Revised: 20 May 2014 / Accepted: 5 June 2014 / Published: 13 June 2014
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Aluminum oxide (AlOx) and plasma immersion ion implantation (PIII) were studied in relation to passivated silicon heterojunction solar cells. When aluminum oxide (AlOx) was deposited on the surface of a wafer; the electric field near the surface of wafer was enhanced; and the mobility of the carrier was improved; thus reducing carrier traps associated with dangling bonds. Using PIII enabled implanting nitrogen into the device to reduce dangling bonds and achieve the desired passivation effect. Depositing AlOx on the surface of a solar cell increased the short-circuit current density (Jsc); open-circuit voltage (Voc); and conversion efficiency from 27.84 mA/cm2; 0.52 V; and 8.97% to 29.34 mA/cm2; 0.54 V; and 9.68%; respectively. After controlling the depth and concentration of nitrogen by modulating the PIII energy; the ideal PIII condition was determined to be 2 keV and 10 min. As a result; a 15.42% conversion efficiency was thus achieved; and the Jsc; Voc; and fill factor were 37.78 mA/cm2; 0.55 V; and 0.742; respectively. View Full-Text
Keywords: plasma-immersion ion implantation; silicon heterojunction; solar cell plasma-immersion ion implantation; silicon heterojunction; solar cell

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Lin, Y.-H.; Wu, Y.-C.; You, H.-C.; Chen, C.-H.; Chen, P.-H.; Tsai, Y.-H.; Yang, Y.-Y.; Chang-Liao, K.S. Silicon Heterojunction Solar Cells Using AlOx and Plasma-Immersion Ion Implantation. Energies 2014, 7, 3653-3663.

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