- Review
A Review on Analytical Modeling for Collapse Mode Capacitive Micromachined Ultrasonic Transducer of the Collapse Voltage and the Static Membrane Deflections
- JiuJiang Wang,
- Xin Liu,
- YuanYu Yu,
- Yao Li,
- ChingHsiang Cheng,
- Shuang Zhang,
- PengUn Mak,
- MangI Vai and
- SioHang Pun
Analytical modeling of capacitive micromachined ultrasonic transducer (CMUT) is one of the commonly used modeling methods and has the advantages of intuitive understanding of the physics of CMUTs and convergent when modeling of collapse mode CMUT. Th...