- Proceeding Paper
Stochastic Mechanical Characterization of Polysilicon MEMS: A Deep Learning Approach
- José Pablo Quesada Molina,
- Luca Rosafalco and
- Stefano Mariani
Deep Learning strategies recently emerged as powerful tools for the characterization of heterogeneous materials. In this work, we discuss an approach for the characterization of the mechanical response of polysilicon films that typically constitute t...