- Article
Reduction of Liquid Bridge Force for 3D Microstructure Measurements
- Hiroshi Murakami,
- Akio Katsuki,
- Takao Sajima and
- Mitsuyoshi Fukuda
Recent years have witnessed an increased demand for a method for precise measurement of the microstructures of mechanical microparts, microelectromechanical systems, micromolds, optical devices, microholes, etc. This paper presents a measurement syst...