The use of microsensors for in-field monitoring of environmental parameters is gaining interest due to their advantages over conventional sensors. Among them microsensors based on semiconductor technology offer additional advantages such as small siz...
This study presents the fabrication and characterization of a humidity microsensor that consists of interdigitated electrodes and a sensitive film. The area of the humidity microsensor is about 2 mm2. The sensitive film is polyaniline doping polyviny...
This review provides a comprehensive overview of the recent advancements in nanosensors and microsensors for body fluid monitoring. The principles behind sensor technologies, their applications in healthcare, and the types of body fluids that they an...
Environmental factors, such as pressure and temperature, are known to contribute to the formation of ulcers that seriously affect bedridden individuals. Researchers have proposed several technologies to achieve the long-term monitoring of those param...
Two three-dimensional (3D) stochastic microsensors based on immobilization of protoporphyrin IX (PIX) in single-walled carbon nanotubes (SWCNT) and multi-walled carbon nanotubes (MWCNT) decorated with copper (Cu) and gold (Au) nanoparticles were desi...
Capacitive sensing schemes are widely used for various microsensors; however, such microsensors suffer from severe parasitic capacitance problems. This paper presents a fully integrated low-noise readout circuit with automatic offset cancellation loo...
Orthodontic treatment with removable appliances is still common in children and adolescents. However, their effectiveness depends primarily on the patients’ compliance. Currently, it is possible to check the daily wear time (DWT) of the removab...
A humidity microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.18 μm CMOS (complementary metal oxide semiconductor) process was presented. The integrated sensor chip consists of a humidity sensor and a readout ci...
Cava is a quality sparkling wine produced in Spain. As a product with a designation of origin, Cava wine has to meet certain quality requirements throughout its production process; therefore, the analysis of several parameters is of great interest. I...
This paper presents a low-noise reconfigurable sensor readout circuit with a multimodal sensing chain for voltage/current/resistive/capacitive microsensors such that it can interface with a voltage, current, resistive, or capacitive microsensor, and...
In this study we present the real-time monitoring of three key brain neurochemical species in conscious rats using implantable amperometric electrodes interfaced to a biotelemetric device. The new system, derived from a previous design, was coupled w...
This study focuses on the pre-treatment cleaning technology for the polyimide (PI) substrate of flexible nine-in-one microsensors. The environmentally friendly cleaning agent B, developed by Sea Energe, was innovatively used to replace traditional or...
In this work, the method of selective laser reductive sintering was used to fabricate the sensor-active copper and nickel microstructures on the surface of glass-ceramics suitable for non-enzymatic detection of glucose. The calculated sensitivities f...
The standards that establish water’s quality criteria for human consumption include organoleptic analysis. These analyses are performed by taste panels that are not available to all water supply companies with the required frequency. In this wo...
A first step towards the fabrication and electrochemical evaluation of thin-filmmicrosensors based on organic PVC membranes for the determination of Hg(II), Cd(II),Pb(II) and Cu(II) ions in solutions has been realised. The membrane-coating mixture us...
We present a microsphere-based microsensor that can measure the vibrations of the miniature motor shaft (MMS) in a small space. The microsensor is composed of a stretched fiber and a microsphere with a diameter of 5 μm. When a light source is inci...
The reactions of vanadium redox flow batteries (VRFBs) are quite complex and the internal environment is strongly acidic. The internal voltage, current, temperature and flow distribution play a very important role in the performance of a VRFB. The VR...
According to the latest literature, it is difficult to measure the multiple important physical parameters inside a proton battery stack accurately and simultaneously. The present bottleneck is external or single measurements, and the multiple importa...
Electrostatic voltage is a vital parameter in industrial production lines, for reducing electrostatic discharge harms and improving yields. Due to such drawbacks as package shielding and low resolution, previously reported electric field microsensors...
This paper presents the analysis and characterization of a resonant pressure microsensor, which employs a temperature compensation method based on differential outputs and a temperature sensor. Leveraging a silicon-on-insulator (SOI) wafer, this micr...
This paper proposes a high sensitivity electric field microsensor (EFM) based on torsional resonance. The proposed microsensor adopts torsional shutter, which is composed of shielding electrodes and torsional beams. The movable shielding electrodes a...
This paper presents a resonant pressure microsensor with a wide range of pressure measurements. The developed microsensor is mainly composed of a silicon-on-insulator (SOI) wafer to form pressure-sensing elements, and a silicon-on-glass (SOG) cap to...
A proton battery is a hybrid battery produced by combining a hydrogen fuel cell and a battery system in an attempt to obtain the advantages of both systems. As the battery life of a single proton battery is not good, the proton battery stack is devel...
This paper proposes an electric field microsensor (EFM) with mutual shielding electrodes. Based on the charge-induction principle, the EFM consists of fixed electrodes and piezoelectric-driving vertically-movable electrodes. All the fixed electrodes...
In recent years, the development of green energy sources, such as fuel cell, biomass energy, solar energy, and tidal energy, has become a popular research subject. This study aims at a flexible four-in-one microsensor, which can be embedded in the pr...
Stimuli-responsive hydrogels are materials with great potential for development of active functionalities in fluidics and micro-fluidics. Based on the current state of research on pH sensors, hydrogel sensors are described qualitatively and quantitat...
This paper presents a resonant pressure microsensor with the measurement range of 1 MPa suitable for the soaring demands of industrial gas pressure calibration equipment. The proposed microsensor consists of an SOI layer as a sensing element and a gl...
A novel impedimetric microsensor based on a double-layered imprinted polymer film has been constructed for the sensitive detection of the herbicide, glyphosate (GLY), in water. It is based on electropolymerized polypyrrole films, doped with cobaltabi...
A novel sensing device for simultaneous dissolved oxygen (DO) and pH monitoring specially designed for biofilm profiling is presented in this work. This device enabled the recording of instantaneous DO and pH dynamic profiles within biofilms, improvi...
As one of the pivotal signal molecules, hydrogen peroxide (H2O2) has been demonstrated to play important roles in many physiological processes of plants. Continuous monitoring of H2O2 in vivo could help understand its regulation mechanism more clearl...
This study investigates the fabrication and characterization of an acetone microsensor with a ring oscillator circuit using the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process. The acetone microsensor contains a sensitive ma...
This study investigates the design and fabrication of magnetic microsensors using the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process. The magnetic sensor is composed of springs and interdigitated electrodes, and it is actu...
According to the comparison between a proton battery and a proton exchange membrane fuel cell (PEMFC), the PEMFC requires oxygen and hydrogen for generating electricity, so a hydrogen tank is required, leading to larger volume of PEMFC. The proton ba...
The latest document indicates that the hydrogen/vanadium redox flow battery has better energy density and efficiency than the vanadium redox flow battery, as well as being low-cost and light-weight. In addition, the hydrogen, electrical conductivity,...
Amperometric detection of nitric oxide with ISO-NOPMC NO microsensors(WPI) is systemically studied in the six media including seawater. The linear range of themicrosensor for NO was from 10-6 to 10-9 mol/l and the detection limit was4.2×10-10 mol/L(S...
This paper proposes a novel wafer-level vacuum packaged electric field microsensor (EFM) featuring a high quality factor, low driving voltage, low noise, and low power consumption. The silicon-on-insulator (SOI) conductive handle layer was innovative...
P-type semiconducting copper oxide (CuO) thin films deposited by radio-frequency (RF) sputtering were integrated onto microsensors using classical photolithography technologies. The integration of the 50-nm-thick layer could be successfully carried o...
A flexible MEMS microsensor integrating temperature, thermal-flow, and capacitive-pressure sensing was developed for embedded monitoring in liquid-cooling systems. The sensing elements were fabricated on a 50-μm polyimide substrate and protected b...
The vanadium redox flow battery (VRFB) can be used as a supporting technology for energy storage corresponding to wind and solar power generation. An aqueous vanadium compound solution can be used repeatedly. As the monomer is large, the flow uniform...
In the chemical reaction that proceeds in a high-temperature proton exchange membrane fuel cell stack (HT-PEMFC stack), the internal local temperature, voltage, pressure, flow and current nonuniformity may cause poor membrane material durability and...
This paper presents a resonant pressure microsensor relying on electrostatic excitation and piezoresistive detection where two double-ended tuning forks were used as resonators, enabling differential outputs. Pressure under measurement caused the def...
The voltage, current, temperature, humidity, pressure, flow, and hydrogen in the high-pressure proton exchange membrane water electrolyzer (PEMWE) can influence its performance and life. For example, if the temperature is too low to reach the working...
In this study, the integrated three-in-one (temperature, humidity, and wind speed) microsensor was made through the technology of the Micro-electro-mechanical Systems (MEMS) to measure three important physical quantities of the internal environment o...
Indole-3-acetic acid (IAA) and salicylic acid (SA), as critical plant hormones, are involved in multiple physiological regulatory processes of plants. Simultaneous and continuous in vivo detection of IAA and SA will help clarify the mechanisms of the...
Electrochemical microsensors are ideal to measure substances with low concentration in complex environments. The primary excitatory neurotransmitter l-glutamate is present in many foods as a distinctive flavour (enhancer) with a wide concentration ra...
Gas microsensors based on tungsten oxide (WO3-x) nanowires (NWs) silanized with APTES (3-aminopropyltriethoxysilane) are developed in this work. These surface modified microsensors are highly sensitive to ethanol at room temperature (RT) via photoact...
We show the use as a thermal photosensor of a thermoelectric (TE) microsensor based on ultrathin suspended Si films. The reduced thickness of the structural films enhances the extremely large thermal insulation of the sensing area (~43 µW/K), s...
Building on our previous 310-h test of a larger MEMS sensor, this study develops and validates a miniaturized, lift-off-fabricated, and FPC-integrated three-in-one microsensor. In addition to extending the operation to 744 h, we introduce a wireless...
Multiple important physical parameters in the vanadium redox flow battery are difficult to measure accurately, and the multiple important physical parameters (e.g., temperature, flow, voltage, current, pressure, and electrolyte concentration) are cor...
The steady-state zero output of static electric field measuring systems often fluctuates, which is caused mainly by the finite leakage resistance of the water film on the surface of the electric field microsensor package. The water adsorption has bee...
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