Next Article in Journal
A Survey on Model Based Approaches for 2D and 3D Visual Human Pose Recovery
Next Article in Special Issue
Piezoelectric Energy Harvesting Solutions
Previous Article in Journal
Towards Using NMR to Screen for Spoiled Tomatoes Stored in 1,000 L, Aseptically Sealed, Metal-Lined Totes
Previous Article in Special Issue
Ultrasonic Multiple-Access Ranging System Using Spread Spectrum and MEMS Technology for Indoor Localization
Article Menu

Export Article

Open AccessArticle
Sensors 2014, 14(3), 4177-4188;

Titanium Dioxide Nanoparticle Humidity Microsensors Integrated with Circuitry on-a-Chip

Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan
Department of Electro-Optical Engineering, Yuan Ze University, Taoyuan 320, Taiwan
Author to whom correspondence should be addressed.
Received: 28 December 2013 / Revised: 13 February 2014 / Accepted: 26 February 2014 / Published: 3 March 2014
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering 2013)
Full-Text   |   PDF [811 KB, uploaded 21 June 2014]


A humidity microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.18 μm CMOS (complementary metal oxide semiconductor) process was presented. The integrated sensor chip consists of a humidity sensor and a readout circuit. The humidity sensor is composed of a sensitive film and interdigitated electrodes. The sensitive film is titanium dioxide prepared by the sol-gel method. The titanium dioxide is coated on the interdigitated electrodes. The humidity sensor requires a post-process to remove the sacrificial layer and to coat the titanium dioxide. The resistance of the sensor changes as the sensitive film absorbs or desorbs vapor. The readout circuit is employed to convert the resistance variation of the sensor into the output voltage. The experimental results show that the integrated humidity sensor has a sensitivity of 4.5 mV/RH% (relative humidity) at room temperature. View Full-Text
Keywords: integrtaed humidity microsensor; titanium dioxide; readout circuit integrtaed humidity microsensor; titanium dioxide; readout circuit
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

Share & Cite This Article

MDPI and ACS Style

Hu, Y.-C.; Dai, C.-L.; Hsu, C.-C. Titanium Dioxide Nanoparticle Humidity Microsensors Integrated with Circuitry on-a-Chip. Sensors 2014, 14, 4177-4188.

Show more citation formats Show less citations formats

Related Articles

Article Metrics

Article Access Statistics



[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top