Next Article in Journal
Anti-Cancer Acitivity of Etodolac and Its Derivatives on Prostate and Colorectal Cancer Cell Lines
Previous Article in Journal
Enhancing the Sensitivity of SMS Fiber Sensors by the Use of High Refractive Index Coatings
Proceeding Paper

Thermoelectric Microsensor Based on Ultrathin Si Films †

Grup de Nanomaterials i Microsistemes, Departament de Física, Universitat Autònoma de Barcelona, Bellaterra, 08193 Barcelona, Spain
Instituto de Microelectrónica de Barcelona—Centre Nacional de Microelectrònica, Campus UAB, Bellaterra, 08193 Barcelona, Spain
Author to whom correspondence should be addressed.
Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.
Present address: IMEC, Kapeldreef 75, 3001 Leuven, Belgium
Proceedings 2018, 2(13), 1517;
Published: 7 December 2018
(This article belongs to the Proceedings of EUROSENSORS 2018)
We show the use as a thermal photosensor of a thermoelectric (TE) microsensor based on ultrathin suspended Si films. The reduced thickness of the structural films enhances the extremely large thermal insulation of the sensing area (~43 µW/K), since phonons scatter in the surfaces, and guarantees a reduced thermal mass (in the µJ/K range). The sensitivity of the device is evaluated by heating with an argon laser (λ = 457 nm) in the range 0–10 mW, reaching sensitivities of around 6 × 108 V/(W·m2) in high vacuum conditions and 5 × 107 V/(W·m2) in environments of air at atmospheric pressure. Open circuit voltage measurements with and without light illumination with a 406 nm diode laser operating at 4 mW were conducted at temperature differences up to 50 K between the central hot region and the Si frame. The slight decrease of the Seebeck coefficient is related to the increase of carriers by photogeneration. View Full-Text
Keywords: photosensor; thermoelectric effect and microsensor photosensor; thermoelectric effect and microsensor
Show Figures

Figure 1

MDPI and ACS Style

Dalkiranis, G.G.; Ferrando-Villalba, P.; Lopeandía-Fernández, A.; Abad-Muñoz, L.; Rodriguez-Viejo, J. Thermoelectric Microsensor Based on Ultrathin Si Films. Proceedings 2018, 2, 1517.

AMA Style

Dalkiranis GG, Ferrando-Villalba P, Lopeandía-Fernández A, Abad-Muñoz L, Rodriguez-Viejo J. Thermoelectric Microsensor Based on Ultrathin Si Films. Proceedings. 2018; 2(13):1517.

Chicago/Turabian Style

Dalkiranis, Gustavo Gonçalves, Pablo Ferrando-Villalba, Aitor Lopeandía-Fernández, Llibertat Abad-Muñoz, and Javier Rodriguez-Viejo. 2018. "Thermoelectric Microsensor Based on Ultrathin Si Films" Proceedings 2, no. 13: 1517.

Find Other Styles
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Access Map by Country/Region

Back to TopTop