Thermoelectric Microsensor Based on Ultrathin Si Films †
1
Grup de Nanomaterials i Microsistemes, Departament de Física, Universitat Autònoma de Barcelona, Bellaterra, 08193 Barcelona, Spain
2
Instituto de Microelectrónica de Barcelona—Centre Nacional de Microelectrònica, Campus UAB, Bellaterra, 08193 Barcelona, Spain
*
Author to whom correspondence should be addressed.
†
Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.
‡
Present address: IMEC, Kapeldreef 75, 3001 Leuven, Belgium
Proceedings 2018, 2(13), 1517; https://doi.org/10.3390/proceedings2131517
Published: 7 December 2018
(This article belongs to the Proceedings of EUROSENSORS 2018)
We show the use as a thermal photosensor of a thermoelectric (TE) microsensor based on ultrathin suspended Si films. The reduced thickness of the structural films enhances the extremely large thermal insulation of the sensing area (~43 µW/K), since phonons scatter in the surfaces, and guarantees a reduced thermal mass (in the µJ/K range). The sensitivity of the device is evaluated by heating with an argon laser (λ = 457 nm) in the range 0–10 mW, reaching sensitivities of around 6 × 108 V/(W·m2) in high vacuum conditions and 5 × 107 V/(W·m2) in environments of air at atmospheric pressure. Open circuit voltage measurements with and without light illumination with a 406 nm diode laser operating at 4 mW were conducted at temperature differences up to 50 K between the central hot region and the Si frame. The slight decrease of the Seebeck coefficient is related to the increase of carriers by photogeneration.
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Keywords:
photosensor; thermoelectric effect and microsensor
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MDPI and ACS Style
Dalkiranis, G.G.; Ferrando-Villalba, P.; Lopeandía-Fernández, A.; Abad-Muñoz, L.; Rodriguez-Viejo, J. Thermoelectric Microsensor Based on Ultrathin Si Films. Proceedings 2018, 2, 1517. https://doi.org/10.3390/proceedings2131517
AMA Style
Dalkiranis GG, Ferrando-Villalba P, Lopeandía-Fernández A, Abad-Muñoz L, Rodriguez-Viejo J. Thermoelectric Microsensor Based on Ultrathin Si Films. Proceedings. 2018; 2(13):1517. https://doi.org/10.3390/proceedings2131517
Chicago/Turabian StyleDalkiranis, Gustavo Gonçalves, Pablo Ferrando-Villalba, Aitor Lopeandía-Fernández, Llibertat Abad-Muñoz, and Javier Rodriguez-Viejo. 2018. "Thermoelectric Microsensor Based on Ultrathin Si Films" Proceedings 2, no. 13: 1517. https://doi.org/10.3390/proceedings2131517
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