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Micromachines
Volume 16
Issue 11
10.3390/mi16111219
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This is an early access version, the complete PDF, HTML, and XML versions will be available soon.
Article

Comparison of Environmentally Friendly Cleaning Agents and Organic Solvent Cleaning Processes in the Fabrication of Flexible Nine-in-One Microsensors and Their Application in Hydrogen/Vanadium Redox Flow Batteries

by
Chi-Yuan Lee
1,*,
Guo-Bin Jung
1,
Huan-Chu Chen
2,
Mau-Hsiung Chen
2,
Chia-Hung Chen
1,
Kuan-Ting Lai
1,
Cheng-Kai Liao
1,
Yung-Lin Chang
1 and
Hao-Peng Chang
1
1
Department of Mechanical Engineering, Yuan Ze Fuel Cell Center, Yuan Ze University, Taoyuan 32003, Taiwan
2
Sea Energe Environmental Industry, Co., Ltd., Taoyuan 32003, Taiwan
*
Author to whom correspondence should be addressed.
Micromachines 2025, 16(11), 1219; https://doi.org/10.3390/mi16111219 (registering DOI)
Submission received: 19 September 2025 / Revised: 20 October 2025 / Accepted: 24 October 2025 / Published: 26 October 2025
(This article belongs to the Special Issue Novel Devices, Emerging Applications and Advances in MEMS Fabrication Processes, 2nd Edition)
Versions Notes

Abstract

This study focuses on the pre-treatment cleaning technology for the polyimide (PI) substrate of flexible nine-in-one microsensors. The environmentally friendly cleaning agent B, developed by Sea Energe, was innovatively used to replace traditional organic solutions (acetone, methanol, and isopropyl alcohol) to verify its feasibility and application potential in Micro-Electro-Mechanical Systems (MEMS) processes. Cleaning agent B, developed by Sea Energe, was used for the first time to clean the PI substrate of flexible nine-in-one microsensors, and the flexible nine-in-one microsensor was used as a verification platform to compare the cleaning performance with traditional organic solutions (acetone, methanol, and isopropyl alcohol). The experimental results proved that cleaning agent B developed by Sea Energe effectively removed contamination from the PI substrate surface while avoiding the environmental impact and process compatibility issues associated with traditional organic solvents. To verify its reliability, the developed flexible nine-in-one microsensor was embedded in the hydrogen end flow channel of a hydrogen/vanadium redox flow battery (HVRFB) to perform real-time monitoring of multiple parameters, including hydrogen concentration, voltage, current, conductivity, temperature, humidity, flow, pressure, and pH. The experimental results proved that using cleaning agent B, developed by Sea Energe, to clean the PI substrate and the subsequent flexible nine-in-one microsensor resulted in comparable operational stability and measurement accuracy to traditional organic solution (acetone, methanol, and isopropyl alcohol) cleaning processes. This experimental result verifies that cleaning agent B, developed by Sea Energe, not only has an excellent cleaning effect, but also meets the requirements for highly reliable microsensor development, potentially offering an alternative solution for the future introduction of green processes into semiconductors, MEMSs, and various application fields.
Keywords: MEMS; flexible nine-in-one microsensor; HVRFB; cleaning agent; traditional organic solutions (acetone; methanol; and isopropyl alcohol); PI substrate; process compatibility; green process; multi-parameter monitoring MEMS; flexible nine-in-one microsensor; HVRFB; cleaning agent; traditional organic solutions (acetone; methanol; and isopropyl alcohol); PI substrate; process compatibility; green process; multi-parameter monitoring

Share and Cite

MDPI and ACS Style

Lee, C.-Y.; Jung, G.-B.; Chen, H.-C.; Chen, M.-H.; Chen, C.-H.; Lai, K.-T.; Liao, C.-K.; Chang, Y.-L.; Chang, H.-P. Comparison of Environmentally Friendly Cleaning Agents and Organic Solvent Cleaning Processes in the Fabrication of Flexible Nine-in-One Microsensors and Their Application in Hydrogen/Vanadium Redox Flow Batteries. Micromachines 2025, 16, 1219. https://doi.org/10.3390/mi16111219

AMA Style

Lee C-Y, Jung G-B, Chen H-C, Chen M-H, Chen C-H, Lai K-T, Liao C-K, Chang Y-L, Chang H-P. Comparison of Environmentally Friendly Cleaning Agents and Organic Solvent Cleaning Processes in the Fabrication of Flexible Nine-in-One Microsensors and Their Application in Hydrogen/Vanadium Redox Flow Batteries. Micromachines. 2025; 16(11):1219. https://doi.org/10.3390/mi16111219

Chicago/Turabian Style

Lee, Chi-Yuan, Guo-Bin Jung, Huan-Chu Chen, Mau-Hsiung Chen, Chia-Hung Chen, Kuan-Ting Lai, Cheng-Kai Liao, Yung-Lin Chang, and Hao-Peng Chang. 2025. "Comparison of Environmentally Friendly Cleaning Agents and Organic Solvent Cleaning Processes in the Fabrication of Flexible Nine-in-One Microsensors and Their Application in Hydrogen/Vanadium Redox Flow Batteries" Micromachines 16, no. 11: 1219. https://doi.org/10.3390/mi16111219

APA Style

Lee, C.-Y., Jung, G.-B., Chen, H.-C., Chen, M.-H., Chen, C.-H., Lai, K.-T., Liao, C.-K., Chang, Y.-L., & Chang, H.-P. (2025). Comparison of Environmentally Friendly Cleaning Agents and Organic Solvent Cleaning Processes in the Fabrication of Flexible Nine-in-One Microsensors and Their Application in Hydrogen/Vanadium Redox Flow Batteries. Micromachines, 16(11), 1219. https://doi.org/10.3390/mi16111219

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