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Micromachines
Special Issues
MEMS/NEMS Devices and Applications, 4th Edition
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MEMS/NEMS Devices and Applications, 4th Edition

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "E：Engineering and Technology".

Deadline for manuscript submissions: 30 September 2026 | Viewed by 4154

Special Issue Editors

Prof. Dr. Ching-Liang Dai

E-Mail Website
Guest Editor
Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan
Interests: CMOS-MEMS; microsensors; microactuators
Special Issues, Collections and Topics in MDPI journals
Dr. Zhi-Xuan Dai

E-Mail Website
Guest Editor Assistant
Department of Bio-Industrial Mechatronics Engineering, National Chung Hsing University, Taichung 402, Taiwan
Interests: MEMS; microsensors; biosensors

Special Issue Information

Dear Colleagues,

In recent years, nanoelectromechanical system (NEMS) and microelectromechanical system (MEMS) technologies have been employed to develop various microdevices and microstructures. Many sensors and actuators have been manufactured and commercialized using technologies such as pressure sensors, accelerometers, gyroscopes, tactile sensors, thermal sensors, flow sensors, optical sensors, image sensors, microphones, magnetic sensors, chemical sensors, gas sensors, biosensors, microchannels, ink jet heads, optical switches, RF switches, micromirrors, motors, relays, resonators, filters, and energy harvesters. NEMS/MEMS devices have been widely applied in various fields.

For this Special Issue, we invite outstanding research on NEMS/MEMS devices and applications. Submissions related to the novel designs, fabrication, development, and applications of various NEMS/MEMS devices, including physical sensors, chemical sensors, gas sensors, biosensors, actuators, energy harvesters, etc., based on NEMS/MEMS technologies are welcome. Review articles and original research articles are equally appreciated.

Dr. Ching-Liang Dai
Guest Editor

Dr. Zhi-Xuan Dai
Guest Editor Assistant

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 250 words) can be sent to the Editorial Office for assessment.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2100 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • physical sensors
  • force sensors
  • magnetic sensors
  • optical sensors
  • microphones
  • flow sensors
  • thermal sensors
  • chemical sensors
  • biosensors
  • gas sensors
  • actuators
  • resonators/filters
  • switches/relays
  • energy harvesters
  • lens/mirrors

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Related Special Issues

Published Papers (3 papers)

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Research

23 pages, 18571 KB  
Article
Data-Driven Modeling and Response Prediction of Cut-Out Type Piezoelectric Beams
by Mingli Bian, Wenan Jiang and Qinsheng Bi
Micromachines 2026, 17(4), 450; https://doi.org/10.3390/mi17040450 - 6 Apr 2026
Viewed by 1404
Abstract
In addressing the issue of insufficient theoretical model accuracy for Cut-out type piezoelectric beams with limiters under the influence of contact-impact nonlinearity, this study utilizes the backpropagation neural network algorithm to develop a data-driven modeling approach based on experimental data from partial distance [...] Read more.
In addressing the issue of insufficient theoretical model accuracy for Cut-out type piezoelectric beams with limiters under the influence of contact-impact nonlinearity, this study utilizes the backpropagation neural network algorithm to develop a data-driven modeling approach based on experimental data from partial distance parameters. This approach aims to achieve accurate predictions of the output voltage and displacement responses of the energy harvester. For different parameter combinations of the limiter gap distance d and installation distance a, amplitude–frequency response data were first systematically collected through experiments, along with time–voltage response data corresponding to different load resistances. Using these data, a training sample set was constructed, and a multi-layer BP neural network prediction model was established with frequency or time as the input and voltage and displacement responses as the outputs. Validation against experimental data demonstrated that the BP neural network can accurately extrapolate and predict the amplitude–frequency response curves of voltage and displacement under various distance parameter combinations, as well as accurately predict the transient voltage outputs under different load conditions. Full article
(This article belongs to the Special Issue MEMS/NEMS Devices and Applications, 4th Edition)
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16 pages, 4120 KB  
Article
High-Precision Salt Concentration Detection Using a CMUT Array with Temperature Compensation
by Hanchi Chai, Changde He, Mengke Luo, Guojun Zhang, Hongliang Wang, Renxin Wang, Yuhua Yang, Jiangong Cui, Wendong Zhang and Licheng Jia
Micromachines 2026, 17(4), 424; https://doi.org/10.3390/mi17040424 - 30 Mar 2026
Viewed by 1379
Abstract
This paper presents a miniaturized and highly accurate saltwater concentration monitoring system based on Capacitive Micromachined Ultrasonic Transducer (CMUT) array technology. The system incorporates a highly integrated CMUT array with a compact footprint of 5 mm × 5 mm, capable of both transmitting [...] Read more.
This paper presents a miniaturized and highly accurate saltwater concentration monitoring system based on Capacitive Micromachined Ultrasonic Transducer (CMUT) array technology. The system incorporates a highly integrated CMUT array with a compact footprint of 5 mm × 5 mm, capable of both transmitting and receiving ultrasonic signals, which significantly contributes to the system’s miniaturization and portability. To ensure accurate compensation for temperature-dependent variations in sound velocity, a TA610A temperature sensor is integrated for continuous real-time monitoring of the salt solution temperature. By acquiring ultrasonic echo signals, the system calculates the time-of-flight (TOF) of the acoustic waves. Based on the TOF and real-time temperature data, the sound velocity is determined, and the salt concentration is subsequently derived with temperature compensation applied to enhance measurement accuracy. Experimental results show a measurement precision of 0.1% and a maximum absolute error of 0.02%, confirming the system’s high accuracy and robustness. Combining stability, reliability, and a compact real-time sensing design, the proposed CMUT-based system holds significant promise for practical deployment in various industrial and environmental monitoring scenarios. Full article
(This article belongs to the Special Issue MEMS/NEMS Devices and Applications, 4th Edition)
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29 pages, 31379 KB  
Article
Dynamic Characteristics of Coupled Dual-Oscillator Piezoelectric Vibration Energy Harvester with External Magnet
by Zejing Huang, Huabiao Zhang, Yang Yang, Lijuan Zhang, Xinye Li and Yu Sheng
Micromachines 2026, 17(3), 356; https://doi.org/10.3390/mi17030356 - 14 Mar 2026
Viewed by 439
Abstract
Magnetic nonlinearity and multi-oscillator coupling are commonly employed to improve the performance of energy harvesters. This study integrates both mechanisms to propose a nested dual-oscillator coupled piezoelectric energy harvester with an external magnet, investigating both repulsive and attractive interactions between the two oscillators. [...] Read more.
Magnetic nonlinearity and multi-oscillator coupling are commonly employed to improve the performance of energy harvesters. This study integrates both mechanisms to propose a nested dual-oscillator coupled piezoelectric energy harvester with an external magnet, investigating both repulsive and attractive interactions between the two oscillators. The influence of parameters on static/dynamic characteristics and harvesting performance is analyzed. For the repulsive-type harvester, the response under weak excitation is characterized by small-amplitude in-phase motion within potential wells; under strong excitation, one oscillator exhibits a large-amplitude response while the other remains nearly quiescent, and non-periodic responses may occur. Large magnet spacings effectively enhance the bandwidth and output power. The attractive-type harvester primarily shows in-phase periodic motion, though non-periodic behavior may appear under strong excitation. Small moving-magnet spacing combined with large external-magnet spacing can significantly boost bandwidth and power output. In both configurations, performance declines as the external-magnet spacing exceeds an optimal range. The repulsive-type harvester features a wider potential well, performing well under weak excitation, whereas the attractive-type, with vibration modes aligned to the potential well profile, is more likely to generate large-amplitude responses under strong excitation. Experimental results show excellent agreement with simulation data, confirming the reliability of the proposed design. Full article
(This article belongs to the Special Issue MEMS/NEMS Devices and Applications, 4th Edition)
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