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1,053 Results Found

  • Article
  • Open Access
1 Citations
4,248 Views
14 Pages

Deposition of HfO2 by Remote Plasma ALD for High-Aspect-Ratio Trench Capacitors in DRAM

  • Jiwon Kim,
  • Inkook Hwang,
  • Byungwook Kim,
  • Wookyung Lee,
  • Juha Song,
  • Yeonwoong Jung and
  • Changbun Yoon

Dynamic random-access memory (DRAM) is a vital component in modern computing systems. Enhancing memory performance requires maximizing capacitor capacitance within DRAM cells, which is achieved using high-k dielectric materials deposited as thin, uni...

  • Article
  • Open Access
13 Citations
6,806 Views
9 Pages

Stabilization of ZrO2 Powders via ALD of CeO2 and ZrO2

  • Chao Lin,
  • Xinyu Mao,
  • Tzia Ming Onn,
  • Joonbaek Jang and
  • Raymond J. Gorte

ZrO2 powders were modified by atomic layer deposition (ALD) with CeO2 and ZrO2, using Ce(TMHD)4 and Zr(TMHD)4 as the precursors, in order to determine the effect of ALD films on the structure, surface area, and catalytic properties of the ZrO2. Growt...

  • Article
  • Open Access
3 Citations
4,277 Views
20 Pages

Wafer-Scale ALD Synthesis of MoO3 Sulfurized to MoS2

  • Sachin Shendokar,
  • Moha Feroz Hossen and
  • Shyam Aravamudhan

24 July 2024

Silicon has dimensional limitations in following Moore’s law; thus, new 2D materials complementing Silicon are being researched. Molybdenum disulfide (MoS2) is a prospective material anticipated to bridge the gap to complement Silicon and enhan...

  • Article
  • Open Access
3 Citations
2,809 Views
10 Pages

High-Precision Regulation of Nano-Grating Linewidth Based on ALD

  • Yaxin Zhang,
  • Chenying Wang,
  • Weixuan Jing,
  • Song Wang,
  • Yujing Zhang,
  • Liangliang Zhang,
  • Yijun Zhang,
  • Nan Zhu,
  • Yunxiang Wang and
  • Yifan Zhao
  • + 2 authors

24 June 2022

A nano-grating standard with accurate linewidth can not only calibrate the magnification of nano-measurement instruments, but can also enable comparison of linewidths. Unfortunately, it is still a challenging task to control the linewidth of nano-gra...

  • Review
  • Open Access
49 Citations
16,225 Views
28 Pages

Is Poly(methyl methacrylate) (PMMA) a Suitable Substrate for ALD?: A Review

  • Marta Adriana Forte,
  • Ricardo Manuel Silva,
  • Carlos José Tavares and
  • Rui Ferreira e Silva

20 April 2021

Poly (methyl methacrylate) (PMMA) is a thermoplastic synthetic polymer, which displays superior characteristics such as transparency, good tensile strength, and processability. Its performance can be improved by surface engineering via the use of fun...

  • Article
  • Open Access
2 Citations
2,057 Views
13 Pages

A Novel Approach to Obtaining Metal Oxide HAR Nanostructures by Electrospinning and ALD

  • Blagoy S. Blagoev,
  • Borislava Georgieva,
  • Kirilka Starbova,
  • Nikolay Starbov,
  • Ivalina Avramova,
  • Krastyo Buchkov,
  • Peter Tzvetkov,
  • Rumen Stoykov,
  • Penka Terziyska and
  • Damyan Delibaltov
  • + 2 authors

3 December 2023

In this work, a novel approach is suggested to grow bilayer fibers by combining electrospinning and atomic layer deposition (ALD). Polyvinyl alcohol (PVA) fibers are obtained by electrospinning and subsequently covered with thin Al2O3 deposited at a...

  • Article
  • Open Access
8 Citations
3,634 Views
14 Pages

Investigations of Structural and Electrical Properties of ALD Films Formed with the Ozone Precursor

  • Aleksandra Seweryn,
  • Krystyna Lawniczak-Jablonska,
  • Piotr Kuzmiuk,
  • Sylwia Gieraltowska,
  • Marek Godlewski and
  • Robert Mroczynski

18 September 2021

The continuous development of ALD thin films demands ongoing improvements and changes toward fabricating materials with tailored properties that are suitable for different practical applications. Ozone has been recently established as a precursor, wi...

  • Article
  • Open Access
1 Citations
2,318 Views
23 Pages

HCC in MASLD and ALD: Biochemical Pathways, Epidemiology, Diagnosis, and Treatment

  • Sheel Patel,
  • Fares Kasem,
  • Dylan Flaherty and
  • Ashutosh Barve

25 June 2025

Hepatocellular carcinoma (HCC) is a leading cause of cancer-related mortality globally, with metabolic-dysfunction-associated steatohepatitis (MASH) and alcohol-related liver disease (ALD) emerging as major etiologies. This review explores the epidem...

  • Article
  • Open Access
3 Citations
4,740 Views
20 Pages

Investigating the Nucleation of AlOx and HfOx ALD on Polyimide: Influence of Plasma Activation

  • Laura Astoreca,
  • David Schaubroeck,
  • Parinaz Saadat Esbah Tabaei,
  • Rouba Ghobeira,
  • Maaike Op de Beeck,
  • Rino Morent,
  • Herbert De Smet and
  • Nathalie De Geyter

3 November 2021

There is an increasing interest in atomic layer deposition (ALD) on polymers for the development of membranes, electronics, (3D) nanostructures and specially for the development of hermetic packaging of the new generation of flexible implantable micr...

  • Review
  • Open Access
30 Citations
8,620 Views
17 Pages

Does Hypoxia Cause Carcinogenic Iron Accumulation in Alcoholic Liver Disease (ALD)?

  • Inês Silva,
  • Vanessa Rausch,
  • Helmut-Karl Seitz and
  • Sebastian Mueller

25 October 2017

Alcoholic liver disease (ALD) is a leading health risk worldwide. Hepatic iron overload is frequently observed in ALD patients and it is an important and independent factor for disease progression, survival, and the development of primary liver cance...

  • Article
  • Open Access
15 Citations
4,153 Views
15 Pages

19 December 2020

Frequency dispersion in the accumulation region seen in multifrequency capacitance–voltage characterization, which is believed to be caused mainly by border traps, is a concerning issue in present-day devices. Because these traps are a fundamen...

  • Article
  • Open Access
6 Citations
3,480 Views
10 Pages

Successes and Issues in the Growth of Moad and MoSe2 on Ag(111) by the E-ALD Method

  • Martina Vizza,
  • Andrea Giaccherini,
  • Walter Giurlani,
  • Maurizio Passaponti,
  • Nicola Cioffi,
  • Rosaria Anna Picca,
  • Antonio De Luca,
  • Lorenzo Fabbri,
  • Alessandro Lavacchi and
  • Filippo Gambinossi
  • + 3 authors

24 January 2019

This paper explores the conditions for the electrodeposition of Moad (molybdenum adlayer) on Ag(111) from alkaline aqueous solution. Moreover, the first stages of the growth of MoSe2 are also presented, performing the deposition of Sead on the deposi...

  • Article
  • Open Access
24 Citations
11,992 Views
25 Pages

19 August 2013

A laboratory-scale atomic layer deposition (ALD) reactor system model is derived for alumina deposition using trimethylaluminum and water as precursors. Model components describing the precursor thermophysical properties, reactor-scale gas-phase dyna...

  • Review
  • Open Access
2,454 Views
13 Pages

Shear Wave Dispersion Elastography in ALD and MASLD: Comparative Pathophysiology and Clinical Potential—A Narrative Review

  • Tommaso Dionisi,
  • Linda Galasso,
  • Luigiandrea Antuofermo,
  • Francesco Antonio Mancarella,
  • Giorgio Esposto,
  • Irene Mignini,
  • Maria Elena Ainora,
  • Antonio Gasbarrini,
  • Giovanni Addolorato and
  • Maria Assunta Zocco

20 December 2024

Alcohol-related liver disease (ALD) is a major cause of global morbidity and mortality, progressing from steatosis to cirrhosis and hepatocellular carcinoma. While liver biopsy remains the gold standard for identifying liver disease, non-invasive met...

  • Article
  • Open Access
34 Citations
6,165 Views
17 Pages

Application Properties of ZnO and AZO Thin Films Obtained by the ALD Method

  • Barbara Swatowska,
  • Wiesław Powroźnik,
  • Halina Czternastek,
  • Gabriela Lewińska,
  • Tomasz Stapiński,
  • Rafał Pietruszka,
  • Bartłomiej S. Witkowski and
  • Marek Godlewski

1 October 2021

The thin layers of ZnO and ZnO: Al (Al doped zinc oxide—AZO) were deposited by the atomic deposition layer (ALD) method on silicon and glass substrates. The structures were deposited using diethylzinc (DEZ) and deionized water as zinc and oxygen prec...

  • Review
  • Open Access
6 Citations
4,256 Views
43 Pages

Silver CVD and ALD Precursors: Synthesis, Properties, and Application in Deposition Processes

  • Evgeniia S. Vikulova,
  • Svetlana I. Dorovskikh,
  • Tamara V. Basova,
  • Aleksander A. Zheravin and
  • Natalya B. Morozova

3 December 2024

This review summarized the developments in the field of volatile silver complexes, which can serve as precursors in gas-transport reactions for the production of thin films and metal nanoparticles via chemical vapor deposition (CVD) and atomic layer...

  • Article
  • Open Access
1 Citations
2,300 Views
12 Pages

CMOS Compatible Hydrogen Sensor Using Platinum Gate and ALD–Aluminum Oxide

  • Adham Elshaer,
  • Serge Ecoffey,
  • Abdelatif Jaouad,
  • Stephane Monfray and
  • Dominique Drouin

10 May 2024

In this study, a p-Si/ALD-Al2O3/Ti/Pt MOS (metal oxide semiconductor) device has been fabricated and used as a hydrogen sensor. The use of such a stack enables a reliable, industry-compatible CMOS fabrication process. ALD-Al2O3 has been chosen as it...

  • Article
  • Open Access
1,931 Views
13 Pages

Fatigue Resistance Improvement in Cold-Drawn NiTi Wires Treated with ALD: A Preliminary Investigation

  • David Vokoun,
  • Ondřej Tyc,
  • Sneha Manjaree Samal,
  • Ivo Stachiv,
  • Yoshane Yu and
  • Chichung Kei

11 February 2025

NiTi shape memory alloys (SMAs) are widely studied for their potential applications, and atomic layer deposition (ALD) is an effective technique for coating them due to its precise control over coating thickness. This study investigates the impact of...

  • Article
  • Open Access
11 Citations
4,504 Views
9 Pages

23 July 2019

Hydrogen is one of the most important clean energy sources of the future. Because of its flammability, explosiveness, and flammability, it is important to develop a highly sensitive hydrogen sensor. Among many gas sensing materials, zinc oxide has ex...

  • Feature Paper
  • Article
  • Open Access
11 Citations
2,768 Views
10 Pages

Water-Free SbOx ALD Process for Coating Bi2Te3 Particles

  • Sebastian Lehmann,
  • Fanny Mitzscherling,
  • Shiyang He,
  • Jun Yang,
  • Martin Hantusch,
  • Kornelius Nielsch and
  • Amin Bahrami

18 March 2023

We developed a water-free atomic layer deposition (ALD) process to homogeneously deposit SbOx using SbCl5 and Sb-Ethoxide as precursors, and report it here for the first time. The coating is applied on Bi2Te3 particles synthesized via the solvotherma...

  • Article
  • Open Access
3 Citations
3,247 Views
8 Pages

Newborn Screening for X-Linked Adrenoleukodystrophy (X-ALD): Biochemical, Molecular, and Clinical Characteristics of Other Genetic Conditions

  • Carlos F. Mares Beltran,
  • Christina G. Tise,
  • Rebekah Barrick,
  • Annie D. Niehaus,
  • Rebecca Sponberg,
  • Richard Chang,
  • Gregory M. Enns and
  • Jose E. Abdenur

26 June 2024

The state of California (CA) added X-linked adrenoleukodystrophy (X-ALD) to newborn screening (NBS) in 2016 via the measurement of C26:0-lysophosphatidylcholine (C26:0-LPC) in a two-tier fashion, followed by sequencing of the ABCD1 gene. This has res...

  • Feature Paper
  • Article
  • Open Access
48 Citations
1,985 Views
17 Pages

11 October 2024

The surface of fumed silica nanoparticles was modified by pyridine carbaldehyde and barbituric acid to provide fumed-Si-Pr-Ald-Barb. The structure was identified and investigated through diverse techniques, such as FT-IR, EDX, Mapping, BET, XRD, SEM,...

  • Article
  • Open Access
7 Citations
4,534 Views
10 Pages

5 January 2022

The Li-S battery is exceptionally appealing as an alternative candidate beyond Li-ion battery technology due to its promising high specific energy capacity. However, several obstacles (e.g., polysulfides’ dissolution, shuttle effect, high volum...

  • Article
  • Open Access
19 Citations
6,180 Views
14 Pages

Investigating the Trimethylaluminium/Water ALD Process on Mesoporous Silica by In Situ Gravimetric Monitoring

  • Verena E. Strempel,
  • Kristian Knemeyer,
  • Raoul Naumann d’Alnoncourt,
  • Matthias Driess and
  • Frank Rosowski

A low amount of AlOx was successfully deposited on an unordered, mesoporous SiO2 powder using 1–3 ALD (Atomic Layer Deposition) cycles of trimethylaluminium and water. The process was realized in a self-built ALD setup featuring a microbalancea...

  • Article
  • Open Access
23 Citations
4,513 Views
11 Pages

ALD Deposited ZnO:Al Films on Mica for Flexible PDLC Devices

  • Dimitre Z. Dimitrov,
  • Zih Fan Chen,
  • Vera Marinova,
  • Dimitrina Petrova,
  • Chih Yao Ho,
  • Blagovest Napoleonov,
  • Blagoy Blagoev,
  • Velichka Strijkova,
  • Ken Yuh Hsu and
  • Shiuan Huei Lin
  • + 1 author

15 April 2021

In this work, highly conductive Al-doped ZnO (AZO) films are deposited on transparent and flexible muscovite mica substrates by using the atomic layer deposition (ALD) technique. AZO-mica structures possess high optical transmittance at visible and n...

  • Article
  • Open Access
9 Citations
3,976 Views
10 Pages

Modeling of Conduction Mechanisms in Ultrathin Films of Al2O3 Deposited by ALD

  • Silvestre Salas-Rodríguez,
  • Joel Molina-Reyes,
  • Jaime Martínez-Castillo,
  • Rosa M. Woo-Garcia,
  • Agustín L. Herrera-May and
  • Francisco López-Huerta

10 February 2023

We reported the analysis and modeling of some conduction mechanisms in ultrathin aluminum oxide (Al2O3) films of 6 nm thickness, which are deposited by atomic layer deposition (ALD). This modeling included current-voltage measurements to metal-insula...

  • Article
  • Open Access
17 Citations
3,852 Views
18 Pages

Structure and Properties of ZnO Coatings Obtained by Atomic Layer Deposition (ALD) Method on a Cr-Ni-Mo Steel Substrate Type

  • Marcin Staszuk,
  • Daniel Pakuła,
  • Łukasz Reimann,
  • Mariusz Król,
  • Marcin Basiaga,
  • Dominika Mysłek and
  • Antonín Kříž

23 September 2020

This paper aimed to investigate the structure and physicochemical and tribological properties of ZnO coatings deposited by ALD on 316L stainless steel for biomedical applications. To obtain ZnO films, diethylzinc (DEZ) and water were used as ALD prec...

  • Proceeding Paper
  • Open Access
2 Citations
2,673 Views
4 Pages

Ultra-Thin Integrated ALD Al2O3 Electron-Transparent Windows for TEM Nanoreactor Applications

  • Levar Goossen,
  • Jia Wei,
  • Gregory Pandraud,
  • Violeta Prodanovic and
  • Pasqualina M. Sarro

6 December 2018

This paper presents for the first time, the integration of ultra-thin (<10 nm) atomic layer deposition (ALD) aluminum oxide (Al2O3) membranes as electron transparent windows (ETWs) for transmission electron microscope (TEM) nanoreactor applicatio...

  • Article
  • Open Access
27 Citations
7,027 Views
12 Pages

2 December 2015

In this study, an integrated approach was used for the preparation of a nanotitanium-based bioactive material. The integrated approach included three methods: severe plastic deformation (SPD), chemical etching and atomic layer deposition (ALD). For t...

  • Article
  • Open Access
17 Citations
6,245 Views
13 Pages

Influence of ALD Coating Layers on the Optical Properties of Nanoporous Alumina-Based Structures

  • Ana L. Cuevas,
  • María del Valle Martínez de Yuso,
  • Víctor Vega,
  • Ana Silvia González,
  • Víctor M. Prida and
  • Juana Benavente

15 January 2019

Optical changes associated with the surface coating of different metal oxides and nanolayers by the ALD technique of a nanoporous alumina structure (NPAS) obtained by the two-step anodization method were analyzed. The NPASs were coated with: (i) a si...

  • Article
  • Open Access
13 Citations
5,742 Views
12 Pages

Influence of TiO2-Coating Layer on Nanoporous Alumina Membranes by ALD Technique

  • Lourdes Gelde,
  • Ana L. Cuevas,
  • María Del Valle Martínez de Yuso,
  • Juana Benavente,
  • Víctor Vega,
  • Ana Silvia González,
  • Víctor M. Prida and
  • Blanca Hernando

7 February 2018

Geometrical, chemical, optical and ionic transport changes associated with ALD of TiO2-coating on the porous structure of two nanoporous alumina membranes (NPAMs), which were obtained by the two-step aluminum anodization method but with different por...

  • Article
  • Open Access
11 Citations
2,739 Views
21 Pages

Structure and Properties of TiO2/nanoTiO2 Bimodal Coatings Obtained by a Hybrid PVD/ALD Method on 316L Steel Substrate

  • Marcin Staszuk,
  • Daniel Pakuła,
  • Łukasz Reimann,
  • Anna Kloc-Ptaszna,
  • Mirosława Pawlyta and
  • Antonín Kříž

4 August 2021

This paper presents the synergy of the effect of two surface engineering technologies—magnetron sputtering (MS-PVD) and atomic layer deposition (ALD) on the structure and properties of 316L steel. Recent studies indicate that PVD coatings, despite th...

  • Article
  • Open Access
3,744 Views
13 Pages

5 May 2022

HfS2 has recently emerged as a promising 2D semiconductor, but the lack of a reliable method to produce continuous films on a large scale has hindered its spreading. The atomic layer deposition of the material with the precursor tetrakis-dimethylamin...

  • Article
  • Open Access
9 Citations
4,403 Views
12 Pages

The Effect of Post Deposition Treatment on Properties of ALD Al-Doped ZnO Films

  • Dimitrina Petrova,
  • Blagovest Napoleonov,
  • Chau Nguyen Hong Minh,
  • Vera Marinova,
  • Yu-Pin Lan,
  • Ivalina Avramova,
  • Stefan Petrov,
  • Blagoy Blagoev,
  • Vladimira Videva and
  • Velichka Strijkova
  • + 3 authors

22 February 2023

In this paper, aluminum-doped zinc oxide (ZnO:Al or AZO) thin films are grown using atomic layer deposition (ALD) and the influence of postdeposition UV–ozone and thermal annealing treatments on the films’ properties are investigated. X-r...

  • Article
  • Open Access
9 Citations
3,448 Views
11 Pages

Influence of Conditioning Temperature on Defects in the Double Al2O3/ZnO Layer Deposited by the ALD Method

  • Katarzyna Gawlińska-Nęcek,
  • Mateusz Wlazło,
  • Robert Socha,
  • Ireneusz Stefaniuk,
  • Łukasz Major and
  • Piotr Panek

22 February 2021

In this work, we present the results of defects analysis concerning ZnO and Al2O3 layers deposited by atomic layer deposition (ALD) technique. The analysis was performed by the X-band electron paramagnetic resonance (EPR) spectroscopy, transmission e...

  • Article
  • Open Access
7 Citations
2,931 Views
15 Pages

Investigations of TiO2/NanoTiO2 Bimodal Coatings Obtained by a Hybrid PVD/ALD Method on Al-Si-Cu Alloy Substrate

  • Marcin Staszuk,
  • Łukasz Reimann,
  • Daniel Pakuła,
  • Mirosława Pawlyta,
  • Małgorzata Musztyfaga-Staszuk,
  • Paweł Czaja and
  • Petr Beneš

4 March 2022

This study aimed to investigate the influence of bimodal TiO2/nanoTiO2 coatings obtained in the PVD/ALD hybrid process on an Al-Si-Cu-type aluminium alloy on the physicochemical properties of the investigated materials. The reference materials were u...

  • Article
  • Open Access
3 Citations
2,924 Views
13 Pages

5 April 2022

A combined ALD/MLD (where ALD and MLD stand for atomic and molecular layer deposition, respectively) deposition strategy using TiCl4, H2O and HQ (hydroquinone) as precursors has been applied for the preparation of inorganic–organic thin films o...

  • Proceeding Paper
  • Open Access
1 Citations
2,103 Views
5 Pages

Low Impedance ALD HfO2 Partially-Filled-Gap Flexural and Bulk MEMS Resonators Piezoresistively Detected for Distributed Mass Sensing

  • Mariazel Maqueda Lopez,
  • Emanuele Andrea Casu,
  • Montserrat Fernandez-Bolanos and
  • Adrian Mihai Ionescu

This paper reports the design and characterization of partially-filled-gap capacitive MEMS resonators for distributed mass sensing applications. By filling the gap with HfO2, the coupling coefficient between electrode-resonator increases by ×6.67 tim...

  • Article
  • Open Access
12 Citations
4,980 Views
16 Pages

Structural and Optical Characterization of ZnS Ultrathin Films Prepared by Low-Temperature ALD from Diethylzinc and 1.5-Pentanedithiol after Various Annealing Treatments

  • Maksymilian Włodarski,
  • Urszula Chodorow,
  • Stanisław Jóźwiak,
  • Matti Putkonen,
  • Tomasz Durejko,
  • Timo Sajavaara and
  • Małgorzata Norek

30 September 2019

The structural and optical evolution of the ZnS thin films prepared by atomic layer deposition (ALD) from the diethylzinc (DEZ) and 1,5-pentanedithiol (PDT) as zinc and sulfur precursors was studied. A deposited ZnS layer (of about 60 nm) is amorphou...

  • Article
  • Open Access
1 Citations
824 Views
18 Pages

Alcohol Preference Impacts Multi-Organ Transcriptome in MetALD

  • Saumya Sikhwal,
  • Tyler C. Gripshover,
  • Rui S. Treves and
  • Josiah E. Hardesty

23 September 2025

Background/Objectives: Alcohol use disorder (AUD) is a major public health issue with rising global occurrence and metabolic consequences. Modeling the addictive behaviors associated with AUD remains inadequate and elusive. Even more so, models that...

  • Review
  • Open Access
6 Citations
2,960 Views
32 Pages

Application of Defect Engineering via ALD in Supercapacitors

  • Tiange Gao,
  • Xiaoyang Xiao,
  • Zhenliang Dong,
  • Xilong Lu,
  • Liwen Mao,
  • Jinzheng Wang,
  • Yiming Liu,
  • Qingmin Hu and
  • Jiaqiang Xu

10 December 2024

Supercapacitors are a kind of energy storage device that lie between traditional capacitors and batteries, characterized by high power density, long cycle life, and rapid charging and discharging capabilities. The energy storage mechanism of supercap...

  • Communication
  • Open Access
2,348 Views
8 Pages

9 November 2022

In Aspergillus nidulans L-rhamnose is catabolised to pyruvate and L-lactaldehyde, and the latter ultimately to L-lactate, via the non-phosphorylated pathway (LRA) encoded by the genes lraA-D, and aldA that encodes a broad substrate range aldehyde deh...

  • Review
  • Open Access
1 Citations
2,700 Views
16 Pages

1 October 2025

Alcohol-associated liver disease (ALD) includes a spectrum from steatosis and steatohepatitis to cirrhosis and hepatocellular carcinoma driven by oxidative stress, immune activation, and systemic inflammation. Ethanol metabolism through alcohol dehyd...

  • Feature Paper
  • Article
  • Open Access
918 Views
18 Pages

Protective ALD Thin Films for Morphologically Diverse Types of Limestone

  • Gillian P. Boyce,
  • Suveena Sreenilayam,
  • Eleonora Balliana,
  • Elisabetta Zendri and
  • Raymond J. Phaneuf

10 June 2025

We report on the results of investigations of atomic layer deposited (ALD) amorphous alumina (Al2O3) coatings for the protection of limestone with a wide range of porosity against acid-based dissolution. The protective effects of the ALD coatings wer...

  • Review
  • Open Access
50 Citations
22,515 Views
24 Pages

11 June 2019

The continuous down-scaling of complementary metal oxide semiconductor (CMOS) field effect transistors (FETs) had been suffering two fateful technical issues, one relative to the thinning of gate dielectric and the other to the aggressive shortening...

  • Article
  • Open Access
1 Citations
2,651 Views
19 Pages

Amorphous Alumina ALD Coatings for the Protection of Limestone Cultural Heritage Objects

  • Gillian P. Boyce,
  • Suveena Sreenilayam,
  • Eleonora Balliana,
  • Elisabetta Zendri and
  • Raymond J. Phaneuf

25 July 2024

From natural erosion to pollution-accelerated decay, stone cultural heritage deteriorates constantly through interactions with the environment. Common protective treatments such as acrylic polymers are generally prone to degradation and loss of perfo...

  • Article
  • Open Access
4 Citations
2,092 Views
9 Pages

Influence of NiO ALD Coatings on the Field Emission Characteristic of CNT Arrays

  • Maksim A. Chumak,
  • Leonid A. Filatov,
  • Ilya S. Ezhov,
  • Anatoly G. Kolosko,
  • Sergey V. Filippov,
  • Eugeni O. Popov and
  • Maxim Yu. Maximov

4 October 2022

The paper presents a study of a large-area field emitter based on a composite of vertically aligned carbon nanotubes covered with a continuous and conformal layer of nickel oxide by the atomic layer deposition method. The arrays of carbon nanotubes w...

  • Article
  • Open Access
2 Citations
3,345 Views
13 Pages

Monocyte Differentiation on Atomic Layer-Deposited (ALD) Hydroxyapatite Coating on Titanium Substrate

  • Elina Kylmäoja,
  • Faleh Abushahba,
  • Jani Holopainen,
  • Mikko Ritala and
  • Juha Tuukkanen

21 April 2023

Hydroxyapatite (HA; Ca10(PO4)6(OH)2) coating of bone implants has many beneficial properties as it improves osseointegration and eventually becomes degraded and replaced with new bone. We prepared HA coating on a titanium substrate with atomic layer...

  • Article
  • Open Access
6 Citations
3,669 Views
12 Pages

Influence of Thermal Annealing on Mechanical and Optical Property of SiO2 Film Produced by ALD

  • Xintao Zhi,
  • Xiaopeng Li,
  • Songmei Yuan,
  • Dasen Wang and
  • Kehong Wang

19 January 2024

The application range of fused silica optical components can be expanded and the cost of fused silica components can be reduced by depositing the same material film on fused silica substrate. However, due to the different manufacturing process, the p...

  • Article
  • Open Access
9 Citations
3,714 Views
17 Pages

Radiation Tolerance and Charge Trapping Enhancement of ALD HfO2/Al2O3 Nanolaminated Dielectrics

  • Dencho Spassov,
  • Albena Paskaleva,
  • Elżbieta Guziewicz,
  • Vojkan Davidović,
  • Srboljub Stanković,
  • Snežana Djorić-Veljković,
  • Tzvetan Ivanov,
  • Todor Stanchev and
  • Ninoslav Stojadinović

10 February 2021

High-k dielectric stacks are regarded as a promising information storage media in the Charge Trapping Non-Volatile Memories, which are the most viable alternative to the standard floating gate memory technology. The implementation of high-k materials...

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