Investigating the Nucleation of AlOx and HfOx ALD on Polyimide: Influence of Plasma Activation
Abstract
:1. Introduction
2. Materials and Methods
2.1. Materials
2.2. Methods
2.2.1. Sample Preparation
2.2.2. Characterization
3. Results and Discussion
3.1. Introduction
3.2. ALD Nucleation Study of Al2O3 and HfO2 on Polyimide
3.3. Influence of Plasma Activation on the ALD Nucleation
4. Conclusions
Supplementary Materials
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
References
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Astoreca, L.; Schaubroeck, D.; Esbah Tabaei, P.S.; Ghobeira, R.; Op de Beeck, M.; Morent, R.; De Smet, H.; De Geyter, N. Investigating the Nucleation of AlOx and HfOx ALD on Polyimide: Influence of Plasma Activation. Coatings 2021, 11, 1352. https://doi.org/10.3390/coatings11111352
Astoreca L, Schaubroeck D, Esbah Tabaei PS, Ghobeira R, Op de Beeck M, Morent R, De Smet H, De Geyter N. Investigating the Nucleation of AlOx and HfOx ALD on Polyimide: Influence of Plasma Activation. Coatings. 2021; 11(11):1352. https://doi.org/10.3390/coatings11111352
Chicago/Turabian StyleAstoreca, Laura, David Schaubroeck, Parinaz Saadat Esbah Tabaei, Rouba Ghobeira, Maaike Op de Beeck, Rino Morent, Herbert De Smet, and Nathalie De Geyter. 2021. "Investigating the Nucleation of AlOx and HfOx ALD on Polyimide: Influence of Plasma Activation" Coatings 11, no. 11: 1352. https://doi.org/10.3390/coatings11111352