Low Impedance ALD HfO2 Partially-Filled-Gap Flexural and Bulk MEMS Resonators Piezoresistively Detected for Distributed Mass Sensing †
Abstract
:1. Introduction
2. Design and Fabrication
3. Results
4. Conclusions
Acknowledgments
Conflicts of Interest
References
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Lopez, M.M.; Casu, E.A.; Fernandez-Bolanos, M.; Ionescu, A.M. Low Impedance ALD HfO2 Partially-Filled-Gap Flexural and Bulk MEMS Resonators Piezoresistively Detected for Distributed Mass Sensing. Proceedings 2017, 1, 391. https://doi.org/10.3390/proceedings1040391
Lopez MM, Casu EA, Fernandez-Bolanos M, Ionescu AM. Low Impedance ALD HfO2 Partially-Filled-Gap Flexural and Bulk MEMS Resonators Piezoresistively Detected for Distributed Mass Sensing. Proceedings. 2017; 1(4):391. https://doi.org/10.3390/proceedings1040391
Chicago/Turabian StyleLopez, Mariazel Maqueda, Emanuele Andrea Casu, Montserrat Fernandez-Bolanos, and Adrian Mihai Ionescu. 2017. "Low Impedance ALD HfO2 Partially-Filled-Gap Flexural and Bulk MEMS Resonators Piezoresistively Detected for Distributed Mass Sensing" Proceedings 1, no. 4: 391. https://doi.org/10.3390/proceedings1040391
APA StyleLopez, M. M., Casu, E. A., Fernandez-Bolanos, M., & Ionescu, A. M. (2017). Low Impedance ALD HfO2 Partially-Filled-Gap Flexural and Bulk MEMS Resonators Piezoresistively Detected for Distributed Mass Sensing. Proceedings, 1(4), 391. https://doi.org/10.3390/proceedings1040391