Influence of Conditioning Temperature on Defects in the Double Al2O3/ZnO Layer Deposited by the ALD Method
Gawlińska-Nęcek, K.; Wlazło, M.; Socha, R.; Stefaniuk, I.; Major, Ł.; Panek, P. Influence of Conditioning Temperature on Defects in the Double Al2O3/ZnO Layer Deposited by the ALD Method. Materials 2021, 14, 1038. https://doi.org/10.3390/ma14041038
Gawlińska-Nęcek K, Wlazło M, Socha R, Stefaniuk I, Major Ł, Panek P. Influence of Conditioning Temperature on Defects in the Double Al2O3/ZnO Layer Deposited by the ALD Method. Materials. 2021; 14(4):1038. https://doi.org/10.3390/ma14041038
Chicago/Turabian StyleGawlińska-Nęcek, Katarzyna; Wlazło, Mateusz; Socha, Robert; Stefaniuk, Ireneusz; Major, Łukasz; Panek, Piotr. 2021. "Influence of Conditioning Temperature on Defects in the Double Al2O3/ZnO Layer Deposited by the ALD Method" Materials 14, no. 4: 1038. https://doi.org/10.3390/ma14041038