Formation of Micro- and Nanostructures on the Nanotitanium Surface by Chemical Etching and Deposition of Titania Films by Atomic Layer Deposition (ALD)

Nazarov, Denis V.; Zemtsova, Elena G.; Valiev, Ruslan Z.; Smirnov, Vladimir M.

doi:10.3390/ma8125460

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Formation of Micro- and Nanostructures on the Nanotitanium Surface by Chemical Etching and Deposition of Titania Films by Atomic Layer Deposition (ALD)

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Institute of Chemistry, Saint Petersburg State University, Universitetskii pr. 26, Saint Petersburg 198504, Russia

Author to whom correspondence should be addressed.

Academic Editor: Peter J. King

Materials 2015, 8(12), 8366-8377; https://doi.org/10.3390/ma8125460

Received: 9 October 2015 / Revised: 19 November 2015 / Accepted: 24 November 2015 / Published: 2 December 2015

(This article belongs to the Special Issue Atomic Layer Deposition of Functional Materials)

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Abstract

In this study, an integrated approach was used for the preparation of a nanotitanium-based bioactive material. The integrated approach included three methods: severe plastic deformation (SPD), chemical etching and atomic layer deposition (ALD). For the first time, it was experimentally shown that the nature of the etching medium (acidic or basic Piranha solutions) and the etching time have a significant qualitative impact on the nanotitanium surface structure both at the nano- and microscale. The etched samples were coated with crystalline biocompatible TiO₂ films with a thickness of 20 nm by Atomic Layer Deposition (ALD). Comparative study of the adhesive and spreading properties of human osteoblasts MG-63 has demonstrated that presence of nano- and microscale structures and crystalline titanium oxide on the surface of nanotitanium improve bioactive properties of the material. View Full-Text

Keywords: atomic layer deposition (ALD); chemical etching; nanostructured titanium; titanium implants; titania coatings

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Nazarov, D.V.; Zemtsova, E.G.; Valiev, R.Z.; Smirnov, V.M. Formation of Micro- and Nanostructures on the Nanotitanium Surface by Chemical Etching and Deposition of Titania Films by Atomic Layer Deposition (ALD). Materials 2015, 8, 8366-8377. https://doi.org/10.3390/ma8125460

AMA Style

Nazarov DV, Zemtsova EG, Valiev RZ, Smirnov VM. Formation of Micro- and Nanostructures on the Nanotitanium Surface by Chemical Etching and Deposition of Titania Films by Atomic Layer Deposition (ALD). Materials. 2015; 8(12):8366-8377. https://doi.org/10.3390/ma8125460

Chicago/Turabian Style

Nazarov, Denis V., Elena G. Zemtsova, Ruslan Z. Valiev, and Vladimir M. Smirnov. 2015. "Formation of Micro- and Nanostructures on the Nanotitanium Surface by Chemical Etching and Deposition of Titania Films by Atomic Layer Deposition (ALD)" Materials 8, no. 12: 8366-8377. https://doi.org/10.3390/ma8125460

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Formation of Micro- and Nanostructures on the Nanotitanium Surface by Chemical Etching and Deposition of Titania Films by Atomic Layer Deposition (ALD)

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