- Review
Artificial Intelligence Applications for MEMS-Based Sensors and Manufacturing Process Optimization
- Itilekha Podder,
- Tamas Fischl and
- Udo Bub
Micro-electromechanical systems (MEMS) technology-based sensors have found diverse fields of application due to the advancement in semiconductor manufacturing technology, which produces sensitive, low-cost, and powerful sensors. Due to the fabricatio...