- Article
In Situ Synchrotron XRD Characterization of Piezoelectric Al1−xScxN Thin Films for MEMS Applications
- Wenzheng Jiang,
- Lei Zhu,
- Lingli Chen,
- Yumeng Yang,
- Xi Yu,
- Xiaolong Li,
- Zhiqiang Mu and
- Wenjie Yu
Aluminum scandium nitride (Al1−xScxN) film has drawn considerable attention owing to its enhanced piezoelectric response for micro-electromechanical system (MEMS) applications. Understanding the fundamentals of piezoelectricity would require a...