- Review
Advances in La-Based High-k Dielectrics for MOS Applications
- L. N. Liu,
- W. M. Tang and
- P. T. Lai
This paper reviews the studies on La-based high-k dielectrics for metal-oxide-semiconductor (MOS) applications in recent years. According to the analyses of the physical and chemical characteristics of La2O3, its hygroscopicity and defects (oxygen va...