Skip to Content

Most Recent

  • Article
  • Open Access

High-Efficiency and Low-Defect Removal Mechanism of Silicon Carbide Using Center-Inlet Computer-Controlled Polishing

  • Pengli Lei,
  • Baojian Ji,
  • Jing Hou,
  • Mincai Liu,
  • Wenhui Deng,
  • Fei Fan,
  • Jian Wang and
  • Bo Zhong
Micromachines2026, 17(3), 298;https://doi.org/10.3390/mi17030298 
(registering DOI)

27 February 2026

Reaction-bonded silicon carbide (RB-SiC) is the preferred material for space optical systems because of its low density and high specific stiffness. However, its hardness and multi-component properties lead to low efficiency and pit defects during th...

  • Article
  • Open Access

Shear Instability Control of Hybrid Small-Scale Plates Embedded in a Polymer Matrix via Shape Memory Alloy Nanofibers

  • Mohammad Reza Farajpour,
  • Mohammad Danesh,
  • Mohammad Hossein Shokrani and
  • Ali Farajpour
Micromachines2026, 17(3), 295;https://doi.org/10.3390/mi17030295 
(registering DOI)

27 February 2026

A refined mathematical framework is developed to investigate the ability of shape memory alloy (SMA) nanofibers to control the shear instability of a hybrid small-scale plate made of three layers containing nanofibers. The middle layer is reinforced...

  • Article
  • Open Access

Electrical Properties and Performance Enhancement of AlGaN/GaN/Si HEMTs

  • Hana Mosbahi,
  • Mohammed Khalil Mohammed Ali and
  • Malek Gassoumi
Micromachines2026, 17(3), 297;https://doi.org/10.3390/mi17030297 
(registering DOI)

27 February 2026

This study presents a detailed electrical analysis of AlGaN/GaN/Si HEMTs grown by molecular beam epitaxy, using direct and pulse current, small-signal microwave, and deep-level transient spectroscopy (DLTS) techniques to investigate transport charact...

  • Article
  • Open Access
Micromachines2026, 17(3), 296;https://doi.org/10.3390/mi17030296 
(registering DOI)

27 February 2026

This work presents a highly compact triple-band multi-input-multi-output (MIMO) implantable antenna for wireless capsule endoscopy (WCE) and leadless cardiac pacemakers. The proposed antenna operates at industrial, scientific, and medical (ISM) bands...

  • Article
  • Open Access

A Silicon Resonant Pressure Microsensor Based on Frequency-Ratio Measurement for High-Temperature Applications

  • Zhaoyuan Tan,
  • Pengxiang Ye,
  • Xiaohan Liu,
  • Bo Xie,
  • Yulan Lu,
  • Deyong Chen and
  • Junbo Wang

27 February 2026

This paper presents a high-temperature silicon resonant pressure microsensor capable of stable operation up to 175 °C and 175 MPa, addressing the critical need for reliable pressure monitoring in deep well drilling and petroleum exploration. To o...

  • Article
  • Open Access

27 February 2026

This study systematically investigates the flow characteristics, mixing efficiency, and concentration gradient generation (CGG) capabilities of three types of vertical-stepped main-channel microfluidic concentration gradient generators—the upwa...

  • Article
  • Open Access

26 February 2026

Accurate measurement of robotic pose is indispensable for large-scale precision manufacturing and robotic calibration, particularly because traditional robotic kinematic models often fall short owing to environmental disturbances and structural uncer...

  • Article
  • Open Access

Denoising Method for NV-Center Fluorescence Signals Based on MPA-VMD Combined with Wavelet Thresholding

  • Yanxin He,
  • Xin Li,
  • Zhonghao Li,
  • Hao Guo,
  • Huan Fei Wen,
  • Jun Tang and
  • Jun Liu

26 February 2026

To address complex noise in nitrogen-vacancy center fluorescence signal acquisition, a hybrid denoising framework combining marine predators algorithm-optimized variational mode decomposition (VMD) and wavelet thresholding is proposed. MPA adaptively...

  • Article
  • Open Access

Post-Release Metallization in MEMS Silicon-to-Silicon Contact Switches for On-Resistance Improvement

  • Abdurrashid Hassan Shuaibu,
  • Almur A. S. Rabih,
  • Yves Blaquière and
  • Frederic Nabki

26 February 2026

This work reports a post-release sputter-metallization process for microelectromechanical systems (MEMS) switches with silicon-to-silicon (Si-to-Si) contacts fabricated by deep reactive ion etching. Platinum (Pt) was selectively deposited on the cont...

  • Article
  • Open Access

A Physics-Informed Hybrid Neural Network for High-Precision Temperature Prediction in Semiconductor Process Equipment

  • Jiefeng Peng,
  • Liang Hu,
  • Rui Su,
  • Yingnan Shen,
  • Jing Wang,
  • Xin Fu and
  • Xiaodong Ruan

25 February 2026

High-precision thermal regulation in semiconductor process equipment is critical for product quality, yet it is challenged by actuator transport delays, limited actuator bandwidth due to hardware dynamics, and broadband inlet disturbances in temperat...

  • Article
  • Open Access
35 Views
21 Pages

Investigation of Flow Boiling Heat Transfer Performance of Grooved Metal Foam (Ni, Cu) Evaporators

  • Junteng Cao,
  • Huajie Li,
  • Xianbo Nian,
  • Chaoyi Zhang,
  • Yuankun Zhang and
  • Chunsheng Guo

25 February 2026

To meet the miniaturized cooling demands of high-heat-flux electronic devices, metal foams—featuring high specific surface area and multiscale porous structures—are considered promising candidates for enhancing flow boiling evaporation. H...

  • Article
  • Open Access
33 Views
17 Pages

25 February 2026

Self-sustained oscillatory systems enable autonomous motion through continuous interaction with ambient energy sources, positioning them as promising candidates for soft robotic actuation, energy conversion, and biomedical applications. However, thei...

  • Feature Paper
  • Article
  • Open Access
41 Views
14 Pages

Research on Low Numerical Aperture 808 nm Fiber-Coupled Semiconductor Laser

  • Fei Lin,
  • Qi Wu,
  • Wei Luo,
  • Yishui Lin,
  • Zhaoxuan Zheng,
  • Mingkun Yuan,
  • Qizhi Zhang,
  • Maodong Hu,
  • Dongxin Xu and
  • Yi Qu
  • + 1 author

25 February 2026

This article investigates fiber coupling techniques for low numerical aperture 808 nm semiconductor lasers. A coupling optical system combining fast-axis/slow-axis collimators (FAC/SAC) with a focusing lens was designed, achieving efficient coupling...

  • Article
  • Open Access
45 Views
13 Pages

25 February 2026

A novel multimode resonator is designed in this paper. Incorporating two open-circuited stubs of distinct impedances loaded onto a uniform half-wavelength transmission line, the resonator enables the realization of a dual-band filter—with cente...

  • Review
  • Open Access
67 Views
45 Pages

Advances in 3D Bioprinting: Materials, Processes, and Emerging Applications

  • Subin Antony Jose,
  • Antonia Evtimow and
  • Pradeep L. Menezes

25 February 2026

Three-dimensional (3D) bioprinting has rapidly emerged as a transformative technology at the interface of biomedical engineering and regenerative medicine. By enabling the spatially controlled deposition of living cells, biomaterials, and bioactive m...

  • Article
  • Open Access
51 Views
13 Pages

25 February 2026

This paper proposes a high-efficiency adaptive-on-time buck DC-DC converter (HEAOT–Buck) capable of supporting a 100% duty cycle. The converter operates over an input voltage range of 3–18 V and provides an adjustable output voltage from...

  • Article
  • Open Access
53 Views
20 Pages

25 February 2026

This study investigates a low-frequency piezoelectric–electromagnetic–triboelectric hybrid vibration energy harvester designed to address the narrow operating bandwidth of conventional vibration energy harvesters. The integrated design co...

  • Article
  • Open Access
112 Views
21 Pages

Hyaluronan-Based Glioblastoma Tumor Constructs Maintain Patient Tumor Drug Responses and Genomic Parity

  • Hemamylammal Sivakumar,
  • Steven D. Forsythe,
  • Adrian W. Laxton,
  • Stephen B. Tatter,
  • Lance D. Miller,
  • Roy E. Strowd and
  • Aleksander Skardal

24 February 2026

Glioblastoma (GBM) is an extremely aggressive and incurable primary tumor of the brain. GBM is characterized by interpatient and intratumoral heterogeneity, making this cancer particularly resistant to therapy and likely to recur. Mapping the complex...

  • Article
  • Open Access
85 Views
19 Pages

Design and Fabrication of a Dual-Axis MEMS Electrostatic Micromirror Based on a Planar Comb Drive

  • Mumu Li,
  • Wenlong Jiao,
  • Kun Huang,
  • Botao Wang,
  • Zhihua Dai,
  • Yang Gao,
  • Huiliang Cao and
  • Huikai Xie

24 February 2026

This paper designs and fabricates an electrostatic-driven dual-axis MEMS micromirror capable of out-of-plane torsional motion about both the X and Y axes. Both torsional axes employ planar comb structures for their drive mechanisms, effectively reduc...

  • Article
  • Open Access
114 Views
16 Pages

24 February 2026

In response to the significant challenges posed by the rapid progress of multi-spectral detection technologies to traditional stealth techniques, this paper presents a flexible transparent metasurface structure that is compatible with radar and infra...

  • Article
  • Open Access
147 Views
25 Pages

Influence of Inlet Splitter Structure on Flow and Heat Transfer Performance in Microchannel Heat Exchangers

  • Wenchao Tian,
  • Yuanyuan Xi,
  • Shuaike Li,
  • Feiyang Li,
  • Yifan Wang,
  • Haojie Dang and
  • Si Chen

23 February 2026

Microchannel liquid cooling technology, characterized by high heat-transfer efficiency, represents an effective solution for thermal management in high heat-flux density electronic devices. Existing research has mainly focused on optimizing the struc...

  • Article
  • Open Access
141 Views
14 Pages

2D and 3D Interdigital Capacitors and Bias Tees Technologies on MnM Interposer for mmWave Applications

  • Gabriel Griep,
  • Robert G. Bovadilla,
  • Leonardo G. Gomes,
  • Luís Q. Cartagena,
  • Gustavo P. Rehder and
  • Ariana L. C. Serrano

23 February 2026

This paper presents two capacitors fabricated using the metallic nanowire membrane (MnM) interposer technology operating at mmWaves. Standard 2D interdigital capacitors (IDCs) are designed to operate up to 70 GHz, which presents a straightforward and...

  • Article
  • Open Access
107 Views
19 Pages

23 February 2026

In response to the increasingly severe heat dissipation challenges in electronic devices, three types of manifold microchannel heat sinks (MMC) incorporating rhombic pin-fins were proposed. Under the constraint that the maximum temperature of the hea...

  • Article
  • Open Access
144 Views
20 Pages

22 February 2026

Magnetic nanoparticles, with their excellent biocompatibility and biodegradability, serve as ideal materials for constructing targeted drug delivery systems. Iron oxide (Fe3O4) nanoparticles, controllably prepared via methods such as solvothermal syn...

  • Article
  • Open Access
146 Views
10 Pages

A Low-Noise MEMS Accelerometer Based on a Symmetrical Sandwich Capacitor Structure

  • Zihan Wang,
  • Chaowei Si,
  • Jihua Zhang,
  • Zhen Fang,
  • Jinxu Liu,
  • Shuqi Li and
  • Wanli Zhang

22 February 2026

This study presents a high-performance MEMS accelerometer employing a symmetrical differential ‘sandwich’ capacitive structure. An orthogonal rectangular compensation method was integrated with wet anisotropic etching to achieve high stru...

  • Article
  • Open Access
121 Views
16 Pages

Single-Imaging Parasite-Quantification Microfluidic Device for Detection and Analysis of Schistosoma Eggs in Urine

  • Heaven D. Chitemo,
  • Vyacheslav R. Misko,
  • Matthieu Briet,
  • Jeffer Bhuko,
  • Filip Legein,
  • Humphrey D. Mazigo and
  • Wim De Malsche

22 February 2026

The accurate diagnosis of schistosomiasis for effective disease surveillance, treatment, and follow-up is crucial to attain the World Health Organization’s 2030 goal to eliminate schistosomiasis as a public health problem. The current diagnosti...

  • Article
  • Open Access
186 Views
7 Pages

20 February 2026

We examine the transition from the Fowler–Nordheim (FN) field emission regime to the space-charge-limited (SCLC) regime in the case of a pointed nanometric emitter with radius of curvature R ≥ 5 nm, for which the traditional FN equations do...

  • Article
  • Open Access
214 Views
16 Pages

Terahertz Wave Absorber Relying on Strontium Titanate and Dirac Semimetal for Dual Adjustability

  • Zeng Qu,
  • Mengyuan Zhao,
  • Yuanhao Huang,
  • Yibin Gong,
  • Shishengdian Lu,
  • Xuanqi Zhang,
  • Jiayun Wang,
  • Yuanhui Wang,
  • Yinuo Cheng and
  • Binzhen Zhang

20 February 2026

Limited by the material response characteristics and structural design, the development of dynamically tunable terahertz absorbers with multi-functional properties remains a major challenge. In this study, a dual-tunable terahertz absorber based on t...

  • Article
  • Open Access
233 Views
18 Pages

Design, Modeling, and Fabrication of a High-Q AlN Annular Gyroscope with Sub-10°/h Bias Instability

  • Zhenxiang Qi,
  • Jie Gu,
  • Bingchen Zhu,
  • Zhaoyang Zhai,
  • Xiaorui Bie,
  • Wuhao Yang and
  • Xudong Zou

20 February 2026

This work presents a high-performance piezoelectric MEMS yaw gyroscope fabricated on a single-crystal silicon platform, which achieves a quality factor of 75 k—the highest reported to date among silicon-based piezoelectric gyroscopes. The devic...

  • Review
  • Open Access
180 Views
31 Pages

20 February 2026

Smart healthcare is rapidly emerging as a transformative paradigm, enabling simultaneous health monitoring, therapeutic intervention, and early prediction of disease onset. In this context, electrochemical monitoring systems have attracted growing in...

  • Article
  • Open Access
189 Views
13 Pages

Enhancement of TIRF Imaging of 3D-Cultured Spheroids via Hydrostatic Compression Using a Balloon Actuator

  • Maho Kaminaga,
  • Kaisei Nakano,
  • Yuichi Marui,
  • Sota Yamada,
  • Masaki Matsuzaki and
  • Hinata Kametaka

20 February 2026

Three-dimensional (3D) cultured cells can mimic the in vivo tumor microenvironment more accurately than conventional monolayer cultures. Therefore, they are essential in cancer research and drug discovery. However, high-sensitivity fluorescence imagi...

  • Article
  • Open Access
177 Views
22 Pages

19 February 2026

To improve the operational reliability of semiconductor laser diode array beam combining systems under vibration conditions, this study introduces an integrated optimization approach combining central composite design (CCD) with multi-objective parti...

  • Review
  • Open Access
232 Views
31 Pages

19 February 2026

Fiber Bragg gratings (FBGs) have evolved from passive sensing elements into actively programmable photonic components, enabling dynamic wavelength control across diverse applications. This review provides a comprehensive and systematic overview of ac...

  • Article
  • Open Access
196 Views
19 Pages

Design and Study of a PVDF Piezoelectric Film Force Sensor Based on Interface Force Field Reconstruction and Surface Domain Segmentation

  • Kaiqiang Yan,
  • Wenge Wu,
  • Xinyi Wu,
  • Yunping Cheng,
  • Lijuan Liu,
  • Yongjuan Zhao,
  • Yicheng Zhang,
  • Pengcheng Liu and
  • Zhi Wang

19 February 2026

The accurate measurement of dynamic forces is pivotal for advancing manufacturing process monitoring and enhancing equipment intelligence. To address the challenges of contact interface force field nonlinearity in existing PVDF piezoelectric film for...

  • Review
  • Open Access
488 Views
38 Pages

18 February 2026

Lithographic patterning continues to evolve under the dual pressure of ever-finer features and manufacturable, cost-effective integration. Beyond headline resolution, industrial adoption is increasingly determined by a small set of coupled metrics: t...

  • Article
  • Open Access
279 Views
14 Pages

Development and Characterization of Dissolving Microneedles for the Buccal Delivery of Cannabidiol (CBD)

  • Eleni Paganopoulou,
  • Emmanouil Tzimtzimis,
  • Dimitrios Tzetzis,
  • Emmanuel Panteris,
  • Chrysanthi Bekiari,
  • Nikolaos Bouropoulos,
  • Christos Cholevas,
  • Zeeshan Ahmad,
  • Paraskevi Kyriaki Monou and
  • Dimitrios G. Fatouros

17 February 2026

This study aimed to develop dissolving microneedles (MNs) for the buccal delivery of cannabidiol (CBD). CBD is a non-psychotomimetic phytocannabinoid with anti-inflammatory and anxiolytic properties. The MN arrays were produced using micromolding, wh...

  • Review
  • Open Access
339 Views
35 Pages

Soft Biomimetic Underwater Vehicles: A Review of Actuation Mechanisms, Structure Designs and Underwater Applications

  • Xuejing Liu,
  • Jing Li,
  • Yu Xing,
  • Zhouqiang Zhang,
  • Yong Cao,
  • Yonghui Cao and
  • Bo Li

16 February 2026

The growing demand for marine resource development and in-depth exploration of the marine environment has positioned soft biomimetic underwater vehicles (SBUVs) as a research hotspot in the fields of underwater equipment and soft robotics. SBUVs are...

  • Article
  • Open Access
316 Views
35 Pages

Heterogeneous Acoustofluidic Distributions Induced by Different Radiation Surface Arrangements in Various Pseudo-Sierpiński-Carpet-Shaped Chambers

  • Qiang Tang,
  • Boyang Li,
  • Chen Li,
  • Junjie Wang,
  • Huiyu Huang,
  • Yulong Hu,
  • Kan Zhu,
  • Hao Chen,
  • Xu Wang and
  • Songfei Su

16 February 2026

In this research, an innovative scheme to generate heterogeneous acoustofluidic distributions in various pseudo-Sierpiński-carpet-shaped chambers with different filling fractions and cross-sectional configurations has been proposed and calculate...

  • Article
  • Open Access
247 Views
11 Pages

16 February 2026

In this paper, a novel dual-band broadband antenna based on structure reuse is proposed. The proposed antenna integrates a slot antenna with a microstrip antenna to achieve dual-band performance. The slot antenna innovatively serves as both a radiati...

  • Article
  • Open Access
185 Views
18 Pages

Trajectory-Based Identification of Rotary-Axis Position-Independent Geometric Errors Considering Excitation Projection Effects

  • Songtao He,
  • Seth Osei,
  • Wei Wang,
  • Jiaying Wang,
  • Kaiyuan You,
  • Qicheng Ding and
  • Jiahao Yu

16 February 2026

Improving the identification accuracy of geometric errors in five-axis machine tools is a critical requirement in advanced manufacturing. Although rotary axes enhance machining flexibility and productivity, they introduce additional geometric errors,...

  • Article
  • Open Access
193 Views
18 Pages

16 February 2026

Piezoelectric energy harvesting technology has received great research interest in recent years. To harvest energy from rotational motion, this work proposes a cantilevered piezoelectric energy harvester based on an adjustable rigid parallel connecti...

  • Article
  • Open Access
243 Views
20 Pages

Beam Drift Mitigation and Wide-Range Measurement in a Miniaturized Ultrasonic Gas Flowmeter

  • Shanfeng Hou,
  • Xueying Xiu,
  • Chengguang Liu,
  • Haochen Lyu and
  • Songsong Zhang

16 February 2026

To mitigate acoustic beam drift, which degrades the signal-to-noise ratio (SNR) and limits the measurement range in ultrasonic gas flowmeters (USFMs), we present a miniaturized transit-time USFM that integrates a single piezoelectric micromachined ul...

  • Article
  • Open Access
164 Views
28 Pages

Electro-Thermal Co-Design and Verification of TGV Transmission Structures for High-Power High-Frequency Applications

  • Luming Chen,
  • Zhilin Wei,
  • Shenglin Ma,
  • Yan Chen,
  • Yihan Xie,
  • Chunlei Li,
  • Shuwei He and
  • Hai Yuan

16 February 2026

Through Glass Via (TGV) technology has emerged as a promising solution for advanced packaging. While glass offers lower dielectric loss than silicon, its lower thermal conductivity raises concerns about electro-thermal coupling effects in high-power,...

  • Review
  • Open Access
239 Views
21 Pages

16 February 2026

The chemical vapor deposition (CVD) method is a key technology for producing silicon carbide (SiC) epitaxial wafers used in high-performance power devices. Defects in the epitaxial wafers, such as triangular, threading dislocations (TDs); basal plane...

  • Article
  • Open Access
153 Views
20 Pages

16 February 2026

Enzyme-free flexible glucose sensors hold great promise in the field of wearable health monitoring. However, their performance is limited by the balance between the catalytic interface activity and stability. This paper reports a strategy for interfa...

  • Article
  • Open Access
181 Views
16 Pages

Ultrathin Microlens Arrays for Dynamic Beam Shaping Based on 3D Lithography

  • Ruiqi Cheng,
  • Yue Zhang,
  • Shuo Chen,
  • Yu Shu,
  • Hao Cao and
  • Chengqun Gui

16 February 2026

Conventional microlens arrays (MLAs) are often constrained by their static focal properties, which limit post-fabrication adaptability in dynamic optical systems. To address this, we demonstrate a tunable beam shaper capable of real-time spot-size mo...

  • Article
  • Open Access
192 Views
10 Pages

Computational Approach to Fast Analysis of Electrochemical Impedance Spectroscopy

  • Cristiano Lo Pò,
  • Stefano Boscarino and
  • Francesco Ruffino

15 February 2026

Electrochemical Impedance Spectroscopy (EIS) is a widely used technique for characterizing the electrode–electrolyte interface. EIS analysis can be very complex and tedious. In this work, a fitting algorithm written in C is implemented on Origi...

Get Alerted

Add your email address to receive forthcoming issues of this journal.

XFacebookLinkedIn
Micromachines - ISSN 2072-666X