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Micromachines 2014, 5(4), 1219-1253;

Fabrication of Micro/Nano Structures on Metals by Femtosecond Laser Micromachining

Department of Chemical Engineering, McGill University, 3610 University Street, Montreal, QC H3A 0C5, Canada
Author to whom correspondence should be addressed.
Received: 22 October 2014 / Revised: 13 November 2014 / Accepted: 13 November 2014 / Published: 20 November 2014
(This article belongs to the Special Issue Micro/Nano Fabrication)
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Femtosecond laser micromachining has emerged in recent years as a new technique for micro/nano structure fabrication because of its applicability to virtually all kinds of materials in an easy one-step process that is scalable. In the past, much research on femtosecond laser micromachining was carried out to understand the complex ablation mechanism, whereas recent works are mostly concerned with the fabrication of surface structures because of their numerous possible applications. The state-of-the-art knowledge on the fabrication of these structures on metals with direct femtosecond laser micromachining is reviewed in this article. The effect of various parameters, such as fluence, number of pulses, laser beam polarization, wavelength, incident angle, scan velocity, number of scans, and environment, on the formation of different structures is discussed in detail wherever possible. Furthermore, a guideline for surface structures optimization is provided. The authors’ experimental work on laser-inscribed regular pattern fabrication is presented to give a complete picture of micromachining processes. Finally, possible applications of laser-machined surface structures in different fields are briefly reviewed. View Full-Text
Keywords: micro/nano structures; femtosecond laser micromachining; surface texturing; metals micro/nano structures; femtosecond laser micromachining; surface texturing; metals

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Ahmmed, K.M.T.; Grambow, C.; Kietzig, A.-M. Fabrication of Micro/Nano Structures on Metals by Femtosecond Laser Micromachining. Micromachines 2014, 5, 1219-1253.

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