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Open AccessReview

Development Trends and Perspectives of Future Sensors and MEMS/NEMS

by Jianxiong Zhu 1,2,3,4,†, Xinmiao Liu 1,2,3,†, Qiongfeng Shi 1,2,3,4, Tianyiyi He 1,2,3,4, Zhongda Sun 1,2,3, Xinge Guo 1,2,3, Weixin Liu 1,2,3, Othman Bin Sulaiman 1,2,3, Bowei Dong 1,2,3,4,5 and Chengkuo Lee 1,2,3,4,5,*
1
Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117583, Singapore
2
Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117608, Singapore
3
Hybrid-Integrated Flexible (Stretchable) Electronic Systems Program, National University of Singapore, Singapore 117608, Singapore
4
NUS Suzhou Research Institute (NUSRI), Suzhou Industrial Park, Suzhou 215123, China
5
NUS Graduate School for Integrative Science and Engineering (NGS), National University of Singapore, Singapore 119077, Singapore
*
Author to whom correspondence should be addressed.
These authors contributed equally.
Micromachines 2020, 11(1), 7; https://doi.org/10.3390/mi11010007
Received: 3 November 2019 / Revised: 11 December 2019 / Accepted: 12 December 2019 / Published: 18 December 2019
(This article belongs to the Special Issue 10th Anniversary of Micromachines)
With the fast development of the fifth-generation cellular network technology (5G), the future sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS) are presenting a more and more critical role to provide information in our daily life. This review paper introduces the development trends and perspectives of the future sensors and MEMS/NEMS. Starting from the issues of the MEMS fabrication, we introduced typical MEMS sensors for their applications in the Internet of Things (IoTs), such as MEMS physical sensor, MEMS acoustic sensor, and MEMS gas sensor. Toward the trends in intelligence and less power consumption, MEMS components including MEMS/NEMS switch, piezoelectric micromachined ultrasonic transducer (PMUT), and MEMS energy harvesting were investigated to assist the future sensors, such as event-based or almost zero-power. Furthermore, MEMS rigid substrate toward NEMS flexible-based for flexibility and interface was discussed as another important development trend for next-generation wearable or multi-functional sensors. Around the issues about the big data and human-machine realization for human beings’ manipulation, artificial intelligence (AI) and virtual reality (VR) technologies were finally realized using sensor nodes and its wave identification as future trends for various scenarios. View Full-Text
Keywords: MEMS sensor; zero-power sensor; flexible sensor; human-machine interface; machine learning; artificial intelligence MEMS sensor; zero-power sensor; flexible sensor; human-machine interface; machine learning; artificial intelligence
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Zhu, J.; Liu, X.; Shi, Q.; He, T.; Sun, Z.; Guo, X.; Liu, W.; Sulaiman, O.B.; Dong, B.; Lee, C. Development Trends and Perspectives of Future Sensors and MEMS/NEMS. Micromachines 2020, 11, 7.

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