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Micromachines

Micromachines is a peer-reviewed, open access journal on the science and technology of small structures, devices and systems, published monthly online by MDPI.
The Chinese Society of Micro-Nano Technology (CSMNT) and AES Electrophoresis Society are affiliated with Micromachines and their members receive a discount on the article processing charges.
Indexed in PubMed | Quartile Ranking JCR - Q2 (Instruments and Instrumentation | Physics, Applied | Chemistry, Analytical)

All Articles (12,976)

Lithographic patterning continues to evolve under the dual pressure of ever-finer features and manufacturable, cost-effective integration. Beyond headline resolution, industrial adoption is increasingly determined by a small set of coupled metrics: throughput, overlay (registration), defectivity, and cost, as well as by how these trade-offs shift with materials, substrate form factors, and integration flows. Here, we review lithographic techniques across three eras: traditional methods (pre-1990s), non-conventional innovations (1990s), and contemporary advancements (post-2000s), with an explicit goal that goes beyond compilation. Specifically, we provide a decision framework for interpreting each method using the same manufacturing-relevant criteria. For each class of technique, we summarize the operating principle and representative process routes, then map the dominant bottlenecks to the metric that ultimately limits scale-up. This cross-cutting lens clarifies why many emerging methods are compelling at the physics level yet remain constrained at the system level, where process windows, in-line control, and compatibility with existing fabrication ecosystems govern viability. By connecting mechanism-level innovation to manufacturing-level constraints, this review offers practical guidance for researchers and engineers seeking to position nanolithography options for applications ranging from high-volume semiconductor production to agile prototyping and materials- or substrate-limited devices.

18 February 2026

Chronological evolution of lithographic techniques. Patterning methods are classified into traditional, non-conventional, and contemporary innovations. Adapting recent trends for AI technology or IoT devices, next-generation lithography will be highly demanded. Inset plots summarize key trade-offs. The serial-lithography map (resolution–throughput–cost) compares serial techniques, with cost encoded by the color scale (low → high). The parallel-lithography map (resolution–scalability–cost) compares parallel techniques, again with cost represented by color [11,31,32,60,65,66,67,68,69,70,71,72].

Development and Characterization of Dissolving Microneedles for the Buccal Delivery of Cannabidiol (CBD)

  • Eleni Paganopoulou,
  • Emmanouil Tzimtzimis and
  • Dimitrios G. Fatouros
  • + 7 authors

This study aimed to develop dissolving microneedles (MNs) for the buccal delivery of cannabidiol (CBD). CBD is a non-psychotomimetic phytocannabinoid with anti-inflammatory and anxiolytic properties. The MN arrays were produced using micromolding, which has the ability of scalability. However, this approach lacks the ability to customize needle geometry; thus, additive manufacturing was implemented in the study. Digital Light Processing (DLP) printing is a promising way to produce molds with customized MN architecture. In the present study, molds were fabricated from 3D-printed MN arrays to prepare dissolving MNs for buccal administration. Polymeric needles based on Eudragit L100-55 and Eudragit RSPO were produced from reverse molds and they were evaluated regarding their physiochemical and mechanical properties, followed by in vitro and ex vivo studies using porcine buccal mucosa. Visualization studies were conducted using confocal scanning laser microscopy, whereas the membrane integrity of the porcine mucosa upon application of the MNs was assessed by histological evaluation. Our results suggest that the needles can be effectively inserted into the buccal tissue and release the active pharmaceutical ingredient (API) in a controlled manner. This approach offers a patient-friendly alternative to oral CBD delivery, bypassing first-pass metabolism.

17 February 2026

(A) FTIR and (B) DSC graph of all the components and MNs. (C) Compression test, (D) insertion test, and (E) the mucosa after insertion showing the perforation sites.

The growing demand for marine resource development and in-depth exploration of the marine environment has positioned soft biomimetic underwater vehicles (SBUVs) as a research hotspot in the fields of underwater equipment and soft robotics. SBUVs are characterized by bodies made of flexible and extensible materials, integrating the dual advantages of softness and biomimetics. They can achieve muscle-like continuous deformation to efficiently absorb collision energy, while mimicking the propulsion mechanisms of marine organisms—such as fish and jellyfish—through undulating body movements or cavity contraction and relaxation. Such biomimetic propulsion is highly compatible with the flexible actuation of soft materials, enabling excellent environmental adaptability while maintaining favorable propulsion efficiency. Compared with traditional rigid underwater vehicles, SBUVs offer higher degrees of freedom, superior environmental adaptability, enhanced impact resistance and greater motion flexibility. This review systematically summarizes typical actuation methods for SBUVs—including fluid-powered actuation, shape memory alloy actuation, and electroactive polymer actuation—elaborating on their working principles, key technological advances, and representative application cases on SBUVs. These actuation mechanisms each offer distinct advantages. Fluid-powered systems are valued for high power density and precise motion control through direct fluidic force transmission. Shape memory alloys provide high force output and accurate positional recovery via controlled thermal phase changes. Meanwhile, electroactive polymers stand out for their rapid (often millisecond-scale) dynamic response, low hysteresis, and fine, muscle-like deformation under electrical stimuli. Current challenges are also analyzed, such as limited actuation efficiency, material durability issues, and system integration difficulties. Despite these constraints, SBUVs show broad application prospects in marine resource exploration, ecological monitoring, and underwater engineering operations. Future research should prioritize the development of novel materials, coordinated optimization of actuation and control systems, and breakthroughs in core technologies to accelerate the practical implementation and industrialization of SBUVs.

16 February 2026

Schematic diagrams of BCF and MPF propulsion modes. (a) Schematic diagrams of BCF mode [14]. (b) Schematic diagrams of MPF mode [15].

In this research, an innovative scheme to generate heterogeneous acoustofluidic distributions in various pseudo-Sierpiński-carpet-shaped chambers with different filling fractions and cross-sectional configurations has been proposed and calculated for topographical manipulation of large-scale micro-particles. All of the structural components positioned in the pseudo-fractal chambers are symmetrically distributed in space, and all ultrasonic radiation surfaces hold the unified settings of input frequency point, oscillation amplitude, and initial phase distribution along their respective normal directions. A large number of fascinating acoustofluidic patterns can be generated in the originally-static pseudo-Sierpiński-carpet-shaped chambers at different recursion levels without complicated vibration parameter modulation. The simulation results of acoustofluidic distributions and particle motion trajectories under different radiation surface arrangements further demonstrate the manipulation performance of these specially designed devices, and indicate that controllable spatial partitioning and intensity modulation of the acoustofluidic field can be achieved by adjusting the hierarchical order, cross-sectional configuration and combination mode of the radiation surfaces. Unlike the existing device construction method of miniaturized microfluidic systems, the artificial introduction of fractal elements like Sierpiński carpet/triangle, Koch snowflake, Mandelbrot set, Pythagoras tree, etc., can provide extraordinary perspectives and expand the application range of the acoustofluidic effect, which also makes ultrasonic micro/nano-scale manipulation technology more abundant and diversified. This exploratory research indicates the potential possibility of applying fractal structures as alternative component parts to purposefully customize acoustofluidic distributions for the further research of patterned manipulation of bio-organisms and navigation of micro-robot swarms in brand new ways that cannot be achieved through traditional methods.

16 February 2026

(Color online). Acoustofluidic field and particle trajectory generated in the 3-stage pseudo-Sierpiński-carpet-shaped chamber with circular cross-section under the excitation of 1st RS. (a) Computational model and boundary condition of sound field. (b) Computational model and boundary condition of acoustic streaming field. (c) Meshed model. (d) Pattern of sound pressure field. (e) Pattern of acoustic streaming field. (f) Pattern of micro particle trajectory at a given time (10 s).

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Micromachines - ISSN 2072-666X