- Feature Paper
- Article
Ultra-Low-Voltage Capacitive Micromachined Ultrasonic Transducers with Increased Output Pressure Due to Piston-Structured Plates
- Fabian Merbeler,
- Sonja Wismath,
- Marco Haubold,
- Christian Bretthauer and
- Mario Kupnik
Capacitive micromachined ultrasonic transducers (CMUTs) represent an accepted technology for ultrasonic transducers, while high bias voltage requirements and limited output pressure still need to be addressed. In this paper, we present a design for u...