- Article
The Hybrid Fabrication Process of Metal/Silicon Composite Structure for MEMS S&A Device
- Tengjiang Hu,
- Kuang Fang,
- Zhiming Zhang,
- Xiaohua Jiang and
- Yulong Zhao
The micro-electromechanical system (MEMS) safety-and-arming (S&A) device has the features of integration and miniaturization, which is one of the important directions of weapon development. Confined by the fabrication process, the silicon-based d...