- Article
Development of a Parallel Dual-Stage Compliant Nanopositioning System
- Xu Yang,
- Lichao Ji,
- Ying Shang,
- Wule Zhu and
- Shizhen Li
This paper presents a novel parallel dual-stage compliant nanopositioning system (PDCNS), aimed at nanoscale positioning for microscale manipulation. In the developed PDCNS, the coarse stage actuated by the voice coil motor and the fine stage driven...