- Article
Gate-Stack Engineering to Improve the Performance of 28 nm Low-Power High-K/Metal-Gate Device
- Jeewon Park,
- Wansu Jang and
- Changhwan Shin
In this study, a gate-stack engineering technique is proposed as a means of improving the performance of a 28 nm low-power (LP) high-k/metal-gate (HK/MG) device. In detail, it was experimentally verified that HfSiO thin films can replace HfSiON conge...