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282 Results Found

  • Article
  • Open Access
2 Citations
5,147 Views
7 Pages

27 July 2021

In this study, a gate-stack engineering technique is proposed as a means of improving the performance of a 28 nm low-power (LP) high-k/metal-gate (HK/MG) device. In detail, it was experimentally verified that HfSiO thin films can replace HfSiON conge...

  • Review
  • Open Access
33 Citations
9,508 Views
31 Pages

Modeling of Gate Stack Patterning for Advanced Technology Nodes: A Review

  • Xaver Klemenschits,
  • Siegfried Selberherr and
  • Lado Filipovic

29 November 2018

Semiconductor device dimensions have been decreasing steadily over the past several decades, generating the need to overcome fundamental limitations of both the materials they are made of and the fabrication techniques used to build them. Modern meta...

  • Article
  • Open Access
14 Citations
3,081 Views
12 Pages

Study on the Simulation of Biosensors Based on Stacked Source Trench Gate TFET

  • Chen Chong,
  • Hongxia Liu,
  • Shougang Du,
  • Shulong Wang and
  • Hao Zhang

28 January 2023

In order to detect biomolecules, a biosensor based on a dielectric-modulated stacked source trench gate tunnel field effect transistor (DM-SSTGTFET) is proposed. The stacked source structure can simultaneously make the on-state current higher and the...

  • Article
  • Open Access
11 Citations
4,973 Views
9 Pages

Investigation on Ambipolar Current Suppression Using a Stacked Gate in an L-shaped Tunnel Field-Effect Transistor

  • Junsu Yu,
  • Sihyun Kim,
  • Donghyun Ryu,
  • Kitae Lee,
  • Changha Kim,
  • Jong-Ho Lee,
  • Sangwan Kim and
  • Byung-Gook Park

3 November 2019

L-shaped tunnel field-effect transistor (TFET) provides higher on-current than a conventional TFET through band-to-band tunneling in the vertical direction of the channel. However, L-shaped TFET is disadvantageous for low-power applications because o...

  • Article
  • Open Access
3 Citations
2,277 Views
8 Pages

A Reconfigurable Polarimetric Photodetector Based on the MoS2/PdSe2 Heterostructure with a Charge-Trap Gate Stack

  • Xin Huang,
  • Qinghu Bai,
  • Yang Guo,
  • Qijie Liang,
  • Tengzhang Liu,
  • Wugang Liao,
  • Aizi Jin,
  • Baogang Quan,
  • Haifang Yang and
  • Changzhi Gu
  • + 1 author

1 December 2024

Besides the intensity and wavelength, the ability to analyze the optical polarization of detected light can provide a new degree of freedom for numerous applications, such as object recognition, biomedical applications, environmental monitoring, and...

  • Article
  • Open Access
5 Citations
3,689 Views
15 Pages

Performance of Active-Quenching SPAD Array Based on the Tri-State Gates of FPGA and Packaged with Bare Chip Stacking

  • Liangliang Liu,
  • Wenxing Lv,
  • Jian Liu,
  • Xingan Zhang,
  • Kun Liang,
  • Ru Yang and
  • Dejun Han

27 April 2023

The performance of an active-quenching single-photon avalanche diode (SPAD) array that is based on the tri-state gates of a field programmable gate array (FPGA) is presented. The array is implemented by stacking a bare 4 × 4 N-on-P SPAD array o...

  • Article
  • Open Access
2 Citations
2,460 Views
26 Pages

Reducing Off-State and Leakage Currents by Dielectric Permittivity-Graded Stacked Gate Oxides on Trigate FinFETs: A TCAD Study

  • Alper Ülkü,
  • Esin Uçar,
  • Ramis Berkay Serin,
  • Rifat Kaçar,
  • Murat Artuç,
  • Ebru Menşur and
  • Ahmet Yavuz Oral

Since its invention in the 1960s, one of the most significant evolutions of metal-oxide semiconductor field effect transistors (MOSFETs) would be the 3D version that makes the semiconducting channel vertically wrapped by conformal gate electrodes, al...

  • Article
  • Open Access
7 Citations
8,372 Views
12 Pages

20 March 2014

The channel fluorine implantation (CFI) process was integrated with the Si3N4 contact etch stop layer (SiN CESL) uniaxial-strained n-channel metal-oxide-semiconductor field-effect transistor (nMOSFET) with the hafnium oxide/silicon oxynitride (HfO2/S...

  • Article
  • Open Access
Technologies2026, 14(2), 92;https://doi.org/10.3390/technologies14020092 
(registering DOI)

1 February 2026

Obstructive sleep apnea (OSA) is a common sleep disorder that impacts patient health and imposes a burden on families and healthcare systems. The diagnosis of OSA is usually performed through overnight polysomnography (PSG) in a hospital setting. In...

  • Article
  • Open Access
16 Citations
3,908 Views
18 Pages

A Novel Dielectric Modulated Gate-Stack Double-Gate Metal-Oxide-Semiconductor Field-Effect Transistor-Based Sensor for Detecting Biomolecules

  • Dibyendu Chowdhury,
  • Bishnu Prasad De,
  • Bhargav Appasani,
  • Navaneet Kumar Singh,
  • Rajib Kar,
  • Durbadal Mandal,
  • Nicu Bizon and
  • Phatiphat Thounthong

8 March 2023

In this article, the performance of n-type junctionless (JL) double-gate (DG) MOSFET-based biosensors with and without gate stack (GS) has been studied. Here, the dielectric modulation (DM) method is applied to detect biomolecules in the cavity. The...

  • Communication
  • Open Access
5 Citations
3,803 Views
13 Pages

Ka-Band Three-Stack CMOS Power Amplifier with Split Layout of External Gate Capacitor for 5G Applications

  • Junhyuk Yang,
  • Jaeyong Lee,
  • Seongjin Jang,
  • Hayeon Jeong and
  • Changkun Park

In this study, we designed a Ka-band two-stage differential power amplifier (PA) using a 65 nm RFCMOS process. To enhance the output power of the PA, a three-stack structure was utilized in the power stage, while the driver stage of the PA was design...

  • Article
  • Open Access
8 Citations
4,347 Views
9 Pages

28 November 2019

We show that transfer hysteresis for a pentacene thin film transistor (TFT) with a low-temperature solution-processed zirconia (ZrOx) gate insulator can be remarkably reduced by modifying the ZrOx surface with a thin layer of crosslinked poly(4-vinyl...

  • Review
  • Open Access
30 Citations
7,010 Views
19 Pages

Challenges and Perspectives for Vertical GaN-on-Si Trench MOS Reliability: From Leakage Current Analysis to Gate Stack Optimization

  • Kalparupa Mukherjee,
  • Carlo De Santi,
  • Matteo Borga,
  • Karen Geens,
  • Shuzhen You,
  • Benoit Bakeroot,
  • Stefaan Decoutere,
  • Patrick Diehle,
  • Susanne Hübner and
  • Matteo Meneghini
  • + 4 authors

29 April 2021

The vertical Gallium Nitride-on-Silicon (GaN-on-Si) trench metal-oxide-semiconductor field effect transistor (MOSFET) is a promising architecture for the development of efficient GaN-based power transistors on foreign substrates for power conversion...

  • Article
  • Open Access
11 Citations
3,656 Views
14 Pages

Implementation of Gate-All-Around Gate-Engineered Charge Plasma Nanowire FET-Based Common Source Amplifier

  • Sarabdeep Singh,
  • Leo Raj Solay,
  • Sunny Anand,
  • Naveen Kumar,
  • Ravi Ranjan and
  • Amandeep Singh

30 June 2023

This paper examines the performance of a Gate-Engineered Gate-All-Around Charge Plasma Nanowire Field Effect Transistor (GAA-DMG-GS-CP NW-FET) and the implementation of a common source (CS) amplifier circuit. The proposed GAA-DMG-GS-CP NW-FET incorpo...

  • Article
  • Open Access
35 Citations
4,476 Views
14 Pages

Improvement of Electrical Performance in Heterostructure Junctionless TFET Based on Dual Material Gate

  • Haiwu Xie,
  • Hongxia Liu,
  • Shulong Wang,
  • Shupeng Chen,
  • Tao Han and
  • Wei Li

23 December 2019

In this paper, a dual metallic material gate heterostructure junctionless tunnel field-effect transistor (DMMG-HJLTFET) is proposed and investigated. We use the Si/SiGe heterostructure at the source/channel interface to improve the band to band tunne...

  • Article
  • Open Access
2 Citations
1,479 Views
22 Pages

Scaling, Leakage Current Suppression, and Simulation of Carbon Nanotube Field-Effect Transistors

  • Weixu Gong,
  • Zhengyang Cai,
  • Shengcheng Geng,
  • Zhi Gan,
  • Junqiao Li,
  • Tian Qiang,
  • Yanfeng Jiang and
  • Mengye Cai

28 July 2025

Carbon nanotube field-effect transistors (CNTFETs) are becoming a strong competitor for the next generation of high-performance, energy-efficient integrated circuits due to their near-ballistic carrier transport characteristics and excellent suppress...

  • Article
  • Open Access
2,215 Views
18 Pages

Development and Performance Analysis of High-K Spacer-Induced Strained Si/SiGe Channel-Based Gate All Around FET for Thermal Effects

  • Potaraju Yugender,
  • Sneha Singh,
  • Kuleen Kumar,
  • Rudra Sankar Dhar,
  • Alexey Y. Seteikin,
  • Amit Banerjee and
  • Ilia G. Samusev

29 November 2025

A Gate Stack GAA FET using SiGe with a 2 nm gate underlap encapsulating a high-k spacer has been created, explored, and evaluated for improved performance in radio frequency applications. The chip shows significant improvements in electrical and radi...

  • Article
  • Open Access
42 Citations
9,339 Views
13 Pages

Characterization of High-k Nanolayers by Grazing Incidence X-ray Spectrometry

  • Matthias Müller,
  • Philipp Hönicke,
  • Blanka Detlefs and
  • Claudia Fleischmann

17 April 2014

The accurate characterization of nanolayered systems is an essential topic for today’s developments in many fields of material research. Thin high-k layers and gate stacks are technologically required for the design of current and future electronic d...

  • Article
  • Open Access
13 Citations
3,405 Views
18 Pages

25 August 2021

This paper develops a data-driven remaining useful life prediction model for solenoid pumps. The model extracts high-level features using stacked autoencoders from decomposed pressure signals (using complementary ensemble empirical mode decomposition...

  • Article
  • Open Access
9 Citations
5,717 Views
15 Pages

Investigation on Ge0.8Si0.2-Selective Atomic Layer Wet-Etching of Ge for Vertical Gate-All-Around Nanodevice

  • Lu Xie,
  • Huilong Zhu,
  • Yongkui Zhang,
  • Xuezheng Ai,
  • Junjie Li,
  • Guilei Wang,
  • Anyan Du,
  • Zhenzhen Kong,
  • Qi Wang and
  • Henry H. Radamson
  • + 4 authors

For the formation of nano-scale Ge channels in vertical Gate-all-around field-effect transistors (vGAAFETs), the selective isotropic etching of Ge selective to Ge0.8Si0.2 was considered. In this work, a dual-selective atomic layer etching (ALE), incl...

  • Article
  • Open Access
8 Citations
4,961 Views
12 Pages

Strained Si0.2Ge0.8/Ge multilayer Stacks Epitaxially Grown on a Low-/High-Temperature Ge Buffer Layer and Selective Wet-Etching of Germanium

  • Lu Xie,
  • Huilong Zhu,
  • Yongkui Zhang,
  • Xuezheng Ai,
  • Guilei Wang,
  • Junjie Li,
  • Anyan Du,
  • Zhenzhen Kong,
  • Xiaogen Yin and
  • Henry H. Radamson
  • + 5 authors

29 August 2020

With the development of new designs and materials for nano-scale transistors, vertical Gate-All-Around Field Effect Transistors (vGAAFETs) with germanium as channel materials have emerged as excellent choices. The driving forces for this choice are t...

  • Feature Paper
  • Article
  • Open Access
11 Citations
4,409 Views
17 Pages

An Efficient Modular Gateway Recombinase-Based Gene Stacking System for Generating Multi-Trait Transgenic Plants

  • Guannan Qin,
  • Suting Wu,
  • Liying Zhang,
  • Yanyao Li,
  • Chunmei Liu,
  • Jianghui Yu,
  • Lihua Deng,
  • Guoying Xiao and
  • Zhiguo Zhang

11 February 2022

Transgenic technology can transfer favorable traits regardless of reproductive isolation and is an important method in plant synthetic biology and genetic improvement. Complex metabolic pathway modification and pyramiding breeding strategies often re...

  • Article
  • Open Access
616 Views
22 Pages

Entity Span Suffix Classification for Nested Chinese Named Entity Recognition

  • Jianfeng Deng,
  • Ruitong Zhao,
  • Wei Ye and
  • Suhong Zheng

23 September 2025

Named entity recognition (NER) is one of the fundamental tasks in building knowledge graphs. For some domain-specific corpora, the text descriptions exhibit limited standardization, and some entity structures have entity nesting. The existing entity...

  • Review
  • Open Access
168 Citations
16,415 Views
39 Pages

19 March 2014

The performance of strained silicon (Si) as the channel material for today’s metal-oxide-semiconductor field-effect transistors may be reaching a plateau. New channel materials with high carrier mobility are being investigated as alternatives and hav...

  • Article
  • Open Access
1,486 Views
8 Pages

21 April 2024

We investigated gated multilayer graphene with stacking order changes along the armchair direction. We consider that some layers cracked to release shear strain at the stacking domain wall. The energy cones of graphene overlap along the corresponding...

  • Article
  • Open Access
349 Views
28 Pages

21 November 2025

Accurate photovoltaic (PV) power forecasting degrades when models are deployed across sites or seasons, primarily due to distribution shift (amplitude bias and scale mismatch) and anomalous contamination—with pronounced amplitude–phase er...

  • Article
  • Open Access
236 Views
12 Pages

21 January 2026

The inner spacer module, which profoundly affects the final performance of a device, is a critical component in GAA NSFET (Gate-all-around Nanosheet Field Effect Transistor) manufacturing and necessitates systematic optimization and fundamental innov...

  • Article
  • Open Access
3 Citations
1,350 Views
16 Pages

16 August 2024

To improve the reliability and maintainability of the nuclear safety-class digital control system (DCS), this paper conducts a study on the fault prediction of critical components in the output circuit of the nuclear safety-class signal conditioning...

  • Article
  • Open Access
13 Citations
3,865 Views
20 Pages

Integrated Sensor-Optics Communication System Using Bidirectional Fiber and FSO Channels and Hybrid Deep Learning Techniques

  • Amare Mulatie Dehnaw,
  • Yibeltal Chanie Manie,
  • Li-Yuan Du,
  • Cheng-Kai Yao,
  • Jun-Wei Jiang,
  • Bing-Xian Liu and
  • Peng-Chun Peng

13 October 2023

This paper introduces a new bidirectional integration approach that combines fiber sensor/free space optics (FSO) communication using an intensity and wavelength division multiplexer (IWDM) techniques-based long-distance fiber Bragg grating (FBG) sen...

  • Article
  • Open Access
40 Citations
18,021 Views
13 Pages

31 October 2022

Virtual currencies have been declared as one of the financial assets that are widely recognized as exchange currencies. The cryptocurrency trades caught the attention of investors as cryptocurrencies can be considered as highly profitable investments...

  • Article
  • Open Access
11 Citations
6,179 Views
11 Pages

19 December 2018

This work focuses on the effect of remote phonon arising from the substrate and high-κ gate dielectric on electron mobility in two-dimensional (2D) InSe field-effect transistors (FETs). The electrostatic characteristic under quantum confinement...

  • Article
  • Open Access
4 Citations
4,573 Views
6 Pages

Source/Drain Trimming Process to Improve Gate-All-Around Nanosheet Transistors Switching Performance and Enable More Stacks of Nanosheets

  • Kun Chen,
  • Jingwen Yang,
  • Tao Liu,
  • Dawei Wang,
  • Min Xu,
  • Chunlei Wu,
  • Chen Wang,
  • Saisheng Xu,
  • David Wei Zhang and
  • Wenchao Liu

8 July 2022

A new S/D trimming process was proposed to significantly reduce the parasitic RC of gate-all-around (GAA) nanosheet transistors (NS-FETs) while retaining the channel stress from epitaxy S/D stressors at most. With optimized S/D trimming, the 7-stage...

  • Article
  • Open Access
15 Citations
3,374 Views
16 Pages

5 October 2022

A metal-oxide-semiconductor high-electron-mobility transistor (MOS-HEMT) is proposed based on using a Al2O3/ZrO2 stacked layer on conventional AlGaN/GaN HEMT to suppress the gate leakage current, decrease flicker noise, increase high-frequency perfor...

  • Article
  • Open Access
32 Citations
14,678 Views
15 Pages

19 May 2022

This work performs a detailed comparison of the channel width folding effectiveness of the FinFET, vertically stacked nanosheet transistor (VNSFET), and vertically stacked nanowire transistor (VNWFET) under the constraints of the same vertical (fin)...

  • Article
  • Open Access
14 Citations
6,624 Views
10 Pages

4-Levels Vertically Stacked SiGe Channel Nanowires Gate-All-Around Transistor with Novel Channel Releasing and Source and Drain Silicide Process

  • Xiaohong Cheng,
  • Yongliang Li,
  • Fei Zhao,
  • Anlan Chen,
  • Haoyan Liu,
  • Chun Li,
  • Qingzhu Zhang,
  • Huaxiang Yin,
  • Jun Luo and
  • Wenwu Wang

In this paper, the fabrication and electrical performance optimization of a four-levels vertically stacked Si0.7Ge0.3 channel nanowires gate-all-around transistor are explored in detail. First, a high crystalline quality and uniform stacked Si0.7Ge0....

  • Article
  • Open Access
65 Citations
13,097 Views
15 Pages

Optimization of Structure and Electrical Characteristics for Four-Layer Vertically-Stacked Horizontal Gate-All-Around Si Nanosheets Devices

  • Qingzhu Zhang,
  • Jie Gu,
  • Renren Xu,
  • Lei Cao,
  • Junjie Li,
  • Zhenhua Wu,
  • Guilei Wang,
  • Jiaxin Yao,
  • Zhaohao Zhang and
  • Jun Luo
  • + 9 authors

In this paper, the optimizations of vertically-stacked horizontal gate-all-around (GAA) Si nanosheet (NS) transistors on bulk Si substrate are systemically investigated. The release process of NS channels was firstly optimized to achieve uniform devi...

  • Article
  • Open Access
2 Citations
2,570 Views
8 Pages

1 December 2020

The instability of transistor characteristics caused by charge trapping under positive bias temperature (PBT) stress in In0.7Ga0.3As metal oxide semiconductor field-effect transistors (MOSFETs) with single-layer Al2O3 and bi-layer Al2O3/HfO2 gate sta...

  • Article
  • Open Access
6 Citations
4,976 Views
13 Pages

A Novel Scheme for Full Bottom Dielectric Isolation in Stacked Si Nanosheet Gate-All-Around Transistors

  • Jingwen Yang,
  • Ziqiang Huang,
  • Dawei Wang,
  • Tao Liu,
  • Xin Sun,
  • Lewen Qian,
  • Zhecheng Pan,
  • Saisheng Xu,
  • Chen Wang and
  • David Wei Zhang
  • + 2 authors

24 May 2023

In this paper, a novel scheme for source/drain-first (S/D-first) full bottom dielectric isolation (BDI), i.e., Full BDI_Last, with integration of a sacrificial Si0.5Ge0.5 layer was proposed and demonstrated in a stacked Si nanosheet gate-all-around (...

  • Article
  • Open Access
14 Citations
2,718 Views
23 Pages

22 August 2022

To address the problem of sensor faults and measurement noise being misinterpreted as structural damage in structural health monitoring (SHM), this paper proposes a new framework for distinguishing sensor faults and structural damage based on stacked...

  • Article
  • Open Access
9 Citations
4,377 Views
14 Pages

High-Breakdown and Low-Leakage 4H-SiC MOS Capacitor Based on HfO2/SiO2 Stacked Gate Dielectric in Trench Structures

  • Qimin Huang,
  • Yunduo Guo,
  • Anfeng Wang,
  • Lin Gu,
  • Zhenyu Wang,
  • Chengxi Ding,
  • Yi Shen,
  • Hongping Ma and
  • Qingchun Zhang

22 February 2025

The progression of SiC MOSFET technology from planar to trench structures requires optimized gate oxide layers within the trench to enhance device performance. In this study, we investigated the interface characteristics of HfO2 and SiO2/HfO2 gate di...

  • Article
  • Open Access
1 Citations
2,693 Views
15 Pages

9 December 2023

Offline handwritten text recognition (HTR) is a long-standing research project for a wide range of applications, including assisting visually impaired users, humans and robot interactions, and the automatic entry of business documents. However, due t...

  • Article
  • Open Access
7 Citations
2,231 Views
12 Pages

Silicon qubits based on specific SOI FinFETs and nanowire (NW) transistors have demonstrated promising quantum properties and the potential application of advanced Si CMOS devices for future quantum computing. In this paper, for the first time, the q...

  • Article
  • Open Access
2 Citations
1,721 Views
24 Pages

24 August 2025

We systematically investigate the combined impact of process variation effects (PVEs), metal gate work function fluctuation (WKF), and random dopant fluctuation (RDF) on the key electrical characteristics of sub-1-nm technology node gate-all-around s...

  • Article
  • Open Access
12 Citations
3,243 Views
9 Pages

Investigate on the Mechanism of HfO2/Si0.7Ge0.3 Interface Passivation Based on Low-Temperature Ozone Oxidation and Si-Cap Methods

  • Qide Yao,
  • Xueli Ma,
  • Hanxiang Wang,
  • Yanrong Wang,
  • Guilei Wang,
  • Jing Zhang,
  • Wenkai Liu,
  • Xiaolei Wang,
  • Jiang Yan and
  • Wenwu Wang
  • + 1 author

The interface passivation of the HfO2/Si0.7Ge0.3 stack is systematically investigated based on low-temperature ozone oxidation and Si-cap methods. Compared with the Al2O3/Si0.7Ge0.3 stack, the dispersive feature and interface state density (Dit) of t...

  • Article
  • Open Access
7 Citations
3,502 Views
17 Pages

A Fully Integrated, Power-Efficient, 0.07–2.08 mA, High-Voltage Neural Stimulator in a Standard CMOS Process

  • David Palomeque-Mangut,
  • Ángel Rodríguez-Vázquez and
  • Manuel Delgado-Restituto

26 August 2022

This paper presents a fully integrated high-voltage (HV) neural stimulator with on-chip HV generation. It consists of a neural stimulator front-end that delivers stimulation currents up to 2.08 mA with 5 bits resolution and a switched-capacitor DC-DC...

  • Article
  • Open Access
8 Citations
7,560 Views
13 Pages

A Comprehensive Study of NF3-Based Selective Etching Processes: Application to the Fabrication of Vertically Stacked Horizontal Gate-All-around Si Nanosheet Transistors

  • Xin Sun,
  • Jiayang Li,
  • Lewen Qian,
  • Dawei Wang,
  • Ziqiang Huang,
  • Xinlong Guo,
  • Tao Liu,
  • Saisheng Xu,
  • Liming Wang and
  • David Wei Zhang
  • + 1 author

In this paper, we demonstrate a comprehensive study of NF3-based selective etching processes for inner spacer formation and for channel release, enabling stacked horizontal gate-all-around Si nanosheet transistor architectures. A cyclic etching proce...

  • Feature Paper
  • Article
  • Open Access
14 Citations
6,677 Views
16 Pages

Ta2O5/SiO2 Multicomponent Dielectrics for Amorphous Oxide TFTs

  • Jorge Martins,
  • Asal Kiazadeh,
  • Joana V. Pinto,
  • Ana Rovisco,
  • Tiago Gonçalves,
  • Jonas Deuermeier,
  • Eduardo Alves,
  • Rodrigo Martins,
  • Elvira Fortunato and
  • Pedro Barquinha

Co-sputtering of SiO2 and high-κ Ta2O5 was used to make multicomponent gate dielectric stacks for In-Ga-Zn-O thin-film transistors (IGZO TFTs) under an overall low thermal budget (T = 150 °C). Characterization of the multicomponent layers a...

  • Article
  • Open Access
7 Citations
3,229 Views
15 Pages

Interface Optimization and Transport Modulation of Sm2O3/InP Metal Oxide Semiconductor Capacitors with Atomic Layer Deposition-Derived Laminated Interlayer

  • Jinyu Lu,
  • Gang He,
  • Jin Yan,
  • Zhenxiang Dai,
  • Ganhong Zheng,
  • Shanshan Jiang,
  • Lesheng Qiao,
  • Qian Gao and
  • Zebo Fang

19 December 2021

In this paper, the effect of atomic layer deposition-derived laminated interlayer on the interface chemistry and transport characteristics of sputtering-deposited Sm2O3/InP gate stacks have been investigated systematically. Based on X-ray photoelectr...

  • Article
  • Open Access
10 Citations
3,527 Views
15 Pages

19 December 2022

We demonstrated the performance of an Al2O3/SiO2 stack layer AlGaN/GaN metal–oxide semiconductor (MOS) high-electron-mobility transistor (HEMT) combined with a dual surface treatment that used tetramethylammonium hydroxide (TMAH) and hydrochloric aci...

  • Review
  • Open Access
51 Citations
22,704 Views
24 Pages

11 June 2019

The continuous down-scaling of complementary metal oxide semiconductor (CMOS) field effect transistors (FETs) had been suffering two fateful technical issues, one relative to the thinning of gate dielectric and the other to the aggressive shortening...

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