In this study, a four-inch zinc oxide (ZnO) nanostructure was synthesized using radio frequency (RF) magnetron sputtering to maximize the electrochemical performance of the anode material of a lithium-ion battery. All materials were grown on cleaned...
In this study, aluminum gallium nitride (AlGaN) thin films are used as the piezoelectric layers to fabricate solidly mounted resonators (SMR) for high frequency acoustic wave devices. AlGaN film is deposited on a Bragg reflector, composed of three pa...
Coated glass products, and especially the low-emissivity coatings, have become a common building material used in modern architectural projects. More recently, these material systems became common in specialized glazing systems featuring solar energy...
Magneto-optic (MO) imaging and sensing are at present the most developed practical applications of thin-film MO garnet materials. However, in order to improve sensitivity for a range of established and forward-looking applications, the technology and...
The article describes a comparative analysis of chromium coatings deposited by magnetron sputtering with and without ion assistance induced by a radiofrequency inductively coupled plasma (RF-ICP) source. Four series of 2 µm-thick Cr coatings we...
Due to its highly unreactive nature and advanced biocompatibility, niobium (Nb) coating films are increasingly being used to improve the corrosion resistance and biocompatibility of base implant materials. However, Nb films have relatively low yield...
For the first time in the literature, the material properties of gallium-doped zinc oxide, grown from a high impulse magnetron sputtering system (HiPIMS), are reported. These material properties are compared to those of a typical radio frequency (RF)...
The ZnO waveguide layer for the Love wave humidity sensor was fabricated by radio frequency (RF) magnetron sputtering technique using ZnO as the target material. To investigate the effect of RF magnetron sputtering temperature on the ZnO waveguide la...
We report on the development of several different thin-film functional material systems prepared by radio frequency (RF) magnetron sputtering at Edith Cowan University nanofabrication labs. While focusing on the RF sputtering process optimizations fo...
This paper examines a microconstruction consisting of nickel (Ni)/chromium (Cr) alloy thin-film. The total length of the microconstruction was 28 mm, the width was 0.2 mm, and the height was designed to be 1 μm. A thin-film of Ni/Cr alloy was co-sput...
The ecofriendly tin selenide (SnSe) is expected to find multiple applications in optoelectronic, photovoltaic, and thermoelectric systems. This work is focused on the thermoelectric properties of thin films. SnSe single crystals exhibit excellent the...
Zirconium-based metallic glass films are promising materials for nanoelectronic and biomedical applications, but their mechanical behavior under different conditions is not well understood. This study investigates the effects of radio frequency (RF)...
In this paper, Nb, NbN, and Nb/NbN thin films were successfully deposited on AISI 304 stainless steel (304 SS) as the bipolar plate (BPP) for proton-exchange membrane fuel cell (PEMFC) by employing a radio-frequency (RF) magnetron sputtering system....
Silver thin films are widely utilized in plasmonic, electronic, and catalytic devices due to their excellent conductivity, optical properties, and surface activity. However, the nanostructure and performance of Ag films are highly dependent on deposi...
This study concerns the evaluation of the coefficient of friction, at different temperatures, of amorphous carbon thin films, deposited onto nanocrystalline sputtered copper coatings by clean-technology rf magnetron sputtering. The aim is to access t...
A reactive high-power impulse magnetron sputtering system (HiPIMS) working in Ar + H2S gas mixture was investigated as a source for the deposition of iron sulfide thin films. As a sputtering material, a pure Fe target was used. Plasma parameters in t...
An integrated humidity sensor system with nano-structured carbon nitride film as humidity sensing material is fabricated by a 0.8 μm analog mixed CMOS process. The integrated sensor system consists of differential humidity sensitive field effect tran...
This study investigated the effects of oxygen (O2) flow rates and annealing temperatures on optical, electrical, and structural properties of indium–gallium–zinc oxide (IGZO) film on glass substrates fabricated by using a co-sputtering sy...
An acceleration sensor based on piezoelectric thin films is proposed in this paper, which comprises the elastic element of a silicon cantilever beam and a piezoelectric structure with Li-doped ZnO piezoelectric thin films. The Li-doped ZnO piezoelect...
Nano-structured carbon nitride (CNx) films were synthesized by a reactive RFmagnetron sputtering system with a DC bias under various deposition conditions, and theirphysical and electrical properties were investigated with a view to using them for mi...
In this study, piezoelectric zinc oxide (ZnO) thin film was deposited on the Pt/Ti/SiNx/Si substrate to construct the FBAR device. The Pt/Ti multilayers were deposited on SiNx/Si as the bottom electrode and the Al thin film was deposited on the ZnO p...
A novel direct current (DC) magnetron sputtering system via radio frequency (RF) bias with hexamethyldisiloxane (HMDSO) plasma polymerization was developed for the deposition of SiOx-doped diamond-like carbon (DLC) films on a glass substrate. As the...
Ti-doped SnO2 transparent conductive oxide (TCO) thin films are deposited on glass substrates using a radio frequency (RF) magnetron sputtering system and then are annealed at temperatures in the range of 200–500 °C for 30 min. The effects...
In this paper, integration of silicon oxycarbide (SiOC) and silicon nitride (Si3N4) platforms was demonstrated to realize ultra-efficient thermal tuning of photonic integrated circuits. Si3N4 being a fascinating photonic material with moderate refrac...
Due to the exceptional corrosion resistance, chemical stability, and dense microstructure, carbon-based thin films are extensively employed in hydrogen energy systems. This study employed magnetron sputtering to fabricate amorphous carbon (a-C) films...
This research is conducted in order to investigate the structural and electrical characteristics of carbon nanowalls (CNWs) according to the sputtering time of interlayers. The thin films were deposited through RF magnetron sputtering with a 4-inch t...
Carbon nanowalls (CNWs), which are used as electrodes for secondary batteries in energy storage systems (ESSs), have the widest reaction surface area among the carbon-based nanomaterials, but their application is rare due to their low adhesion with s...
In this paper, a double piezoelectric layer acceleration sensor based on Li-doped ZnO (LZO) thin film is presented. It is constituted by Pt/LZO/Pt/LZO/Pt/Ti functional layers and a Si cantilever beam with a proof mass. The LZO thin films were prepare...
In this report, a Fe2O3:ZnO sputtering target and a nanograins-based sensor were developed for the room temperature (RT) detection of hydrogen peroxide vapor (HPV) using the solid-state reaction method and the radio frequency (RF) magnetron sputterin...
In this paper, a unique hybrid approach to design and synthesize 2D/3D Al2O3-ZnO nanostructures by simultaneous deposition is presented. Pulsed laser deposition (PLD) and RF magnetron sputtering (RFMS) methods are redeveloped into a single tandem sys...
An ultrathin Al layer was introduced into AZO/Cu/AZO films to further enhance the optoelectronic performance. The AZO/Al/Cu/AZO films were deposited on glass substrates by DC and RF magnetron sputtering; the microstructure and optoelectronic properti...
Nitride and carbide ternary coatings improve the wear and corrosion resistance of carbon steel substrates. In this work, Ti-W-N and Ti-W-C coatings were deposited on AISI 1060 steel substrates using reactive radio frequency (RF) magnetron sputtering....
A novel piezoelectric energy harvester with multi-resonant frequencies based on Li-doped ZnO (LZO) thin films is proposed in this paper, consisting of an elastic element with three (or more) different length cantilever beam arrays and a piezoelectric...
This research is focusing on the radio frequency (RF) magnetron sputtering process, a physical vapor deposition technique which is widely used in thin film production. This process requires the optimized combination of deposition parameters in order...
This paper presents the results of studying the characteristics of hydrogen sensors based on thin In2O3 films modified with tin and dysprosium with dispersed double Pt/Pd catalysts deposited on the surface. To control the content of Sn and Dy in the...
A reactive high-power impulse magnetron sputtering (r-HiPIMS) and a reactive high-power impulse magnetron sputtering combined with electron cyclotron wave resonance plasma source (r-HiPIMS + ECWR) were used for the deposition of p-type CuFexOy thin f...
This paper presents the results of a study on the characteristics of semiconductor sensors based on thin SnO2 films modified with antimony, dysprosium, and silver impurities and dispersed double Pt/Pd catalysts deposited on the surface to detect carb...
Micro-Electro-Mechanical System (MEMS) technology is employed to fabricate surface acoustic wave (SAW)-type and resistive-type ozone sensors on quartz glass (SiO2) substrates. The fabrication process commences by using a photolithography technique to...
In recent years, there have been important developments in the refractory metal nitride coatings used for versatile applications, such as MoN, TaN, NbN, etc. Engineered approaches, including the deposition method, microstructure control, structural d...
In this study, barium-doped lanthanum copper oxide (LaCuO) thin films were deposited onto quartz glass substrates using a radio frequency (RF) magnetron sputtering system. The deposited films were subsequently subjected to a selenization annealing pr...
In this study, we report the use of a radiofrequency plasma-assisted chemical vapor deposition (RF-CVD) system with a hollow cathode geometry to hydrogenate anatase TiO2 thin films. The goal was to create black TiO2 films with improved light absorpti...
For industrial processes in which refractory metals are necessary, hafnium carbonitride exhibits excellent performance due to its high thermal conductivity and resistance to oxidation. In this study, hafnium carbonitride was deposited on Inconel 718...
High Mg content (60%) ZnMgO samples with and without Ga dope were grown by an RF magnetron sputtering system. The effect of Ga dope on the ZnMgO sample and the respective ultraviolet photodetectors (UVPD) device’s performance were carefully stu...
The present study addresses the structural stability and mass outflow of Ag 10 nm/Ge 1 nm/AlN 10 nm nanomultilayers (NMLs) during thermal treatments in different atmospheres (Ar and air). The nanomultilayers were obtained by magnetron spu...
This investigation studies CoFeB/AlOx/Co magnetic tunneling junction (MTJ) in the magnetic field of a low-frequency alternating current, for various thicknesses of the barrier layer AlOx. The low-frequency alternate-current magnetic susceptibility (χ...
In this study, silicon nitride (SiNx) thin films were deposited on polyimide (PI) substrates as barrier layers by a plasma enhanced chemical vapor deposition (PECVD) system. The gallium-doped zinc oxide (GZO) thin films were deposited on PI and SiNx/...