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Fabrication and Characteristic of a Double Piezoelectric Layer Acceleration Sensor Based on Li-Doped ZnO Thin Film

Key Laboratory of Electronics Engineering College of Heilongjiang Province, Heilongjiang University, Harbin 150006, Heilongjiang Province, China
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Micromachines 2019, 10(5), 331; https://doi.org/10.3390/mi10050331
Received: 9 April 2019 / Revised: 14 May 2019 / Accepted: 16 May 2019 / Published: 17 May 2019
(This article belongs to the Section A:Physics)
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Abstract

In this paper, a double piezoelectric layer acceleration sensor based on Li-doped ZnO (LZO) thin film is presented. It is constituted by Pt/LZO/Pt/LZO/Pt/Ti functional layers and a Si cantilever beam with a proof mass. The LZO thin films were prepared by radio frequency (RF) magnetron sputtering. The composition, chemical structure, surface morphology, and thickness of the LZO thin film were analyzed. In order to study the effect of double piezoelectric layers on the sensitivity of the acceleration sensor, we designed two structural models (single and double piezoelectric layers) and fabricated them by using micro-electro-mechanical system (MEMS) technology. The test results show that the resonance frequency of the acceleration sensor was 1363 Hz. The sensitivity of the double piezoelectric layer was 33.1 mV/g, which is higher than the 26.1 mV/g of single piezoelectric layer sensitivity, both at a resonance frequency of 1363 Hz. View Full-Text
Keywords: cantilever beam; MEMS technology; Li-doped ZnO thin film; double piezoelectric layer; acceleration sensor cantilever beam; MEMS technology; Li-doped ZnO thin film; double piezoelectric layer; acceleration sensor
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Ai, C.; Zhao, X.; Li, S.; Li, Y.; Bai, Y.; Wen, D. Fabrication and Characteristic of a Double Piezoelectric Layer Acceleration Sensor Based on Li-Doped ZnO Thin Film. Micromachines 2019, 10, 331.

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