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Open AccessArticle

SiOC-Coated Silicon Nitride Platform for Efficient Phase Actuators

Department of Telecommunication Engineering, Mehran University of Engineering & Technology Jamshoro 76062, Sindh, Pakistan
Information Technology Centre, Sindh Agriculture University Tandojam 70060, Sindh, Pakistan
Author to whom correspondence should be addressed.
Coatings 2020, 10(4), 309;
Received: 25 February 2020 / Revised: 18 March 2020 / Accepted: 23 March 2020 / Published: 25 March 2020
In this paper, integration of silicon oxycarbide (SiOC) and silicon nitride (Si3N4) platforms was demonstrated to realize ultra-efficient thermal tuning of photonic integrated circuits. Si3N4 being a fascinating photonic material with moderate refractive index (n ≈ 2) and ultra-low loss, lacks thermo-optic coefficient that makes thermal phase actuators long and dissipate high powers. Integration of SiOC coating with a comparable refractive index (n = 2.2) boosts the effective thermo-optic efficiency of Si3N4 photonic circuits by almost an order of magnitude with no additional loss. An SiOC layer was deposited by the reactive RF magnetron sputtering technique from the SiC target at room temperature. The structural, chemical and optical characterizations of the sputter deposited SiOC layer were performed with SEM, AFM, EDS and spectroscopic ellipsometry. The results of SiOC-coated Si3N4 and pristine Si3N4 photonic devices were discussed and compared. SiOC was demonstrated as an enabling platform for low-loss and power-efficient thermal phase actuators in conventional photonic technologies with application in reconfigurable photonic systems.
Keywords: silicon nitride; silicon oxycarbide; thin films; optical materials; photonic integrated circuits silicon nitride; silicon oxycarbide; thin films; optical materials; photonic integrated circuits
MDPI and ACS Style

Memon, F.A.; Qureshi, I.A.; Memon, A.L.; Syed, Z.S.; Pirzada, N.; Saba, E. SiOC-Coated Silicon Nitride Platform for Efficient Phase Actuators. Coatings 2020, 10, 309.

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