SiOC-Coated Silicon Nitride Platform for Efficient Phase Actuators
Abstract
:1. Introduction
2. SiOC Layer Deposition and Characterizations
3. SiOC-Coated Si3N4 Device Simulation and Experimental Results
4. Conclusions
Author Contributions
Funding
Acknowledgments
Conflicts of Interest
References
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Device Type | FSR (nm) | Group Index (ng) | dλ/dT (pm/°C) | Keff (°C−1) |
---|---|---|---|---|
SiOC-coated Si3N4 ring-resonator | 1.61 | 2.2834 | 65 | 9.5 × 10−5 |
Pristine Si3N4 ring-resonator | 1.9078 | 1.9666 | 10 | 1.26 × 10−5 |
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Memon, F.A.; Qureshi, I.A.; Memon, A.L.; Syed, Z.S.; Pirzada, N.; Saba, E. SiOC-Coated Silicon Nitride Platform for Efficient Phase Actuators. Coatings 2020, 10, 309. https://doi.org/10.3390/coatings10040309
Memon FA, Qureshi IA, Memon AL, Syed ZS, Pirzada N, Saba E. SiOC-Coated Silicon Nitride Platform for Efficient Phase Actuators. Coatings. 2020; 10(4):309. https://doi.org/10.3390/coatings10040309
Chicago/Turabian StyleMemon, Faisal Ahmed, Imran Ali Qureshi, Abdul Latif Memon, Zafi Sherhan Syed, Nasrullah Pirzada, and Erum Saba. 2020. "SiOC-Coated Silicon Nitride Platform for Efficient Phase Actuators" Coatings 10, no. 4: 309. https://doi.org/10.3390/coatings10040309