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Open AccessArticle

Application-Specific Oxide-Based and Metal–Dielectric Thin-Film Materials Prepared by Radio Frequency Magnetron Sputtering

Electron Science Research Institute, School of Science, Edith Cowan University, 270 Joondalup Drive, Joondalup 6027, Western Australia, Australia
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Materials 2019, 12(20), 3448; https://doi.org/10.3390/ma12203448
Received: 27 September 2019 / Revised: 15 October 2019 / Accepted: 18 October 2019 / Published: 21 October 2019
(This article belongs to the Special Issue Sputtering Technologies for Growth of Advanced Thin Film)
We report on the development of several different thin-film functional material systems prepared by radio frequency (RF) magnetron sputtering at Edith Cowan University nanofabrication labs. While focusing on the RF sputtering process optimizations for new or the previously underexplored material compositions and multilayer structures, we disclose several unforeseen material properties and behaviours. Among these are an unconventional magnetic hysteresis loop with an intermediate saturation state observed in garnet trilayers, and an ultrasensitive magnetic switching behaviour in garnet-oxide composites (GOC). We also report on the unusually high thermal exposure stability observed in some nanoengineered metal–dielectric multilayers. We communicate research results related to the design, prototyping, and practical fabrication of high-performance magneto-optic (MO) materials, oxide-based sensor components, and heat regulation coatings for advanced construction and solar windows. View Full-Text
Keywords: thin films; coatings; magneto-optics; sensors; glass; heat regulation thin films; coatings; magneto-optics; sensors; glass; heat regulation
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Nur-E-Alam, M.; Lonsdale, W.; Vasiliev, M.; Alameh, K. Application-Specific Oxide-Based and Metal–Dielectric Thin-Film Materials Prepared by Radio Frequency Magnetron Sputtering. Materials 2019, 12, 3448.

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