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  • Article
  • Open Access
14 Citations
5,664 Views
7 Pages

A 45 nm CMOS Avalanche Photodiode with 8.4-GHz Bandwidth

  • Wenhao Zhi,
  • Qingxiao Quan,
  • Pingping Yu and
  • Yanfeng Jiang

7 January 2020

Photodiode is one of the key components in optoelectronic technology, which is used to convert optical signal into electrical ones in modern communication systems. In this paper, an avalanche photodiode (APD) is designed and fulfilled, which is compa...

  • Proceeding Paper
  • Open Access
3 Citations
3,875 Views
10 Pages

Process and device simulation of a surface acoustics wave (SAW) temperature sensor based AlN material as piezoelectric film, grown on Si wafer and patterned with Al electrodes, is described. CMOS 1 µm process is the process used to simulate a S...

  • Review
  • Open Access
107 Citations
13,458 Views
26 Pages

CMOS-Compatible Silicon Nanowire Field-Effect Transistor Biosensor: Technology Development toward Commercialization

  • Duy Phu Tran,
  • Thuy Thi Thanh Pham,
  • Bernhard Wolfrum,
  • Andreas Offenhäusser and
  • Benjamin Thierry

11 May 2018

Owing to their two-dimensional confinements, silicon nanowires display remarkable optical, magnetic, and electronic properties. Of special interest has been the development of advanced biosensing approaches based on the field effect associated with s...

  • Review
  • Open Access
64 Citations
13,059 Views
19 Pages

Low-Cost Microbolometer Type Infrared Detectors

  • Le Yu,
  • Yaozu Guo,
  • Haoyu Zhu,
  • Mingcheng Luo,
  • Ping Han and
  • Xiaoli Ji

24 August 2020

The complementary metal oxide semiconductor (CMOS) microbolometer technology provides a low-cost approach for the long-wave infrared (LWIR) imaging applications. The fabrication of the CMOS-compatible microbolometer infrared focal plane arrays (IRFPA...

  • Article
  • Open Access
889 Views
14 Pages

Integration of Er3+ Emitters in Silicon-on-Insulator Nanodisk Metasurface

  • Joshua Bader,
  • Hamed Arianfard,
  • Vincenzo Ciavolino,
  • Mohammed Ashahar Ahamad,
  • Faraz A. Inam,
  • Shin-ichiro Sato and
  • Stefania Castelletto

1 October 2025

Erbium (Er3+) emitters are relevant for optical applications due to their narrow emission line directly in the telecom C-band due to the 4I13/24I15/2 transition at 1.54 μm. Additionally, they are promising candidates for future quantum tec...

  • Article
  • Open Access
16 Citations
6,888 Views
15 Pages

Application of CMOS Technology to Silicon Photomultiplier Sensors

  • Nicola D’Ascenzo,
  • Xi Zhang and
  • Qingguo Xie

25 September 2017

We use the 180 nm GLOBALFOUNDRIES (GF) BCDLite CMOS process for the production of a silicon photomultiplier prototype. We study the main characteristics of the developed sensor in comparison with commercial SiPMs obtained in custom technologies and o...

  • Article
  • Open Access
46 Citations
14,131 Views
12 Pages

Integrated Inductors for RF Transmitters in CMOS/MEMS Smart Microsensor Systems

  • Jong-Wan Kim,
  • Hidekuni Takao,
  • Kazuaki Sawada and
  • Makoto Ishida

31 July 2007

This paper presents the integration of an inductor by complementary metal-oxide-semiconductor (CMOS) compatible processes for integrated smart microsensorsystems that have been developed to monitor the motion and vital signs of humans invarious envir...

  • Review
  • Open Access
119 Citations
15,081 Views
24 Pages

29 October 2018

The recent development of the Internet of Things (IoT) in healthcare and indoor air quality monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based on microhotplates fabricated with micro-electro-mechanical system (M...

  • Letter
  • Open Access
7 Citations
5,125 Views
14 Pages

Resonant MEMS Pressure Sensor in 180 nm CMOS Technology Obtained by BEOL Isotropic Etching

  • Diana Mata-Hernandez,
  • Daniel Fernández,
  • Saoni Banerji and
  • Jordi Madrenas

23 October 2020

This work presents the design and characterization of a resonant CMOS-MEMS pressure sensor manufactured in a standard 180 nm CMOS industry-compatible technology. The device consists of aluminum square plates attached together by means of tungsten via...

  • Proceeding Paper
  • Open Access
2 Citations
2,354 Views
4 Pages

CMOS Technology Integrated Terahertz Rectifier

  • Rosario Rao,
  • Giovanni De Amicis,
  • Andrea Del Monte and
  • Fabrizio Palma

We present new developments of CMOS compatible direct conversion terahertz detector operating at room temperature. The rectenna consists of an integrated antenna, realized on the surface of the integrated circuit and connected to a nanometric metalli...

  • Proceeding Paper
  • Open Access
2 Citations
2,904 Views
5 Pages

Evanescent-Wave Gas Sensing Using an Integrated Thermal Light Source

  • Cristina Consani,
  • Christian Ranacher,
  • Andreas Tortschanoff,
  • Thomas Grille,
  • Peter Irsigler and
  • Bernhard Jakoby

The last years showed an increased request for miniaturised, CMOS-compatible gas detectors. In contrast to sensors utilizing metal-oxide chemical interfaces, optical strategies are potentially faster and more robust. Recently we demonstrated CO2 dete...

  • Article
  • Open Access
3 Citations
2,966 Views
13 Pages

Investigation of the Temperature Dependence of Volt-Ampere Characteristics of a Thin-Film Si3N4 Memristor

  • Dmitry Mizginov,
  • Oleg Telminov,
  • Sergey Yanovich,
  • Dmitry Zhevnenko,
  • Fedor Meshchaninov and
  • Evgeny Gornev

15 February 2023

The compatibility of memristor materials with advanced complementary metal-oxide-semiconductor (CMOS) technology is a key factor for microelectronics element base manufacturing. Therefore, we continued studying previously fabricated CMOS-compatible N...

  • Perspective
  • Open Access
12 Citations
5,103 Views
16 Pages

Embedded Silicon Nanoparticles as Enabler of a Novel CMOS-Compatible Fully Integrated Silicon Photonics Platform

  • Alfredo A. González-Fernández,
  • Mariano Aceves-Mijares,
  • Oscar Pérez-Díaz,
  • Joaquin Hernández-Betanzos and
  • Carlos Domínguez

31 May 2021

The historical bottleneck for truly high scale integrated photonics is the light emitter. The lack of monolithically integrable light sources increases costs and reduces scalability. Quantum phenomena found in embedded Si particles in the nanometer s...

  • Article
  • Open Access
3 Citations
3,991 Views
12 Pages

A New Design of a CMOS Vertical Hall Sensor with a Low Offset

  • Fei Lyu,
  • Shuo Huang,
  • Chaoran Wu,
  • Xingcheng Liang,
  • Pengzhan Zhang,
  • Yuxuan Wang,
  • Hongbing Pan and
  • Yu Wang

31 July 2022

Vertical Hall sensors (VHSs), compatible with complementary metal oxide semiconductor (CMOS) technology, are used to detect magnetic fields in the plane of the sensor. In previous studies, their performance was limited by a large offset. This paper r...

  • Review
  • Open Access
196 Views
22 Pages

Silicon-Compatible Semiconductor Gas Sensors

  • Yanting Tang,
  • Xinyi Chen,
  • Huanhuan Zhang,
  • Lanpeng Guo,
  • Hua-Yao Li and
  • Huan Liu

The growing demand for intelligent environmental monitoring is driving the advancement of high-performance, low-cost, and highly integrated gas sensors. Silicon-compatible semiconductor gas sensors provide a promising platform to achieve this goal by...

  • Review
  • Open Access
30 Citations
8,029 Views
60 Pages

18 October 2022

During the last few decades, the microelectronics industry has actively been investigating the potential for the functional integration of semiconductor-based devices beyond digital logic and memory, which includes RF and analog circuits, biochips, a...

  • Article
  • Open Access
14 Citations
5,429 Views
7 Pages

23 June 2018

Considering the isotropic release process of nanoelectromechanical systems (NEMSs), defining the active region of NEM memory switches is one of the most challenging process technologies for the implementation of monolithic-three-dimensional (M3D) CMO...

  • Review
  • Open Access
29 Citations
25,803 Views
20 Pages

25 September 2024

The surge in demand for 3D MOSFETs, such as FinFETs, driven by recent technological advances, is explored in this review. FinFETs, positioned as promising alternatives to bulk CMOS, exhibit favorable electrostatic characteristics and offer power/perf...

  • Article
  • Open Access
5 Citations
2,903 Views
12 Pages

Electrical double-layer (EDL) synaptic transistors based on organic materials exhibit low thermal and chemical stability and are thus incompatible with complementary metal oxide semiconductor (CMOS) processes involving high-temperature operations. Th...

  • Article
  • Open Access
27 Citations
4,994 Views
19 Pages

Integrated Polarization-Splitting Grating Coupler for Chip-Scale Atomic Magnetometer

  • Jinsheng Hu,
  • Jixi Lu,
  • Zihua Liang,
  • Lu Liu,
  • Weiyi Wang,
  • Peng Zhou and
  • Mao Ye

15 July 2022

Atomic magnetometers (AMs) are widely acknowledged as one of the most sensitive kind of instruments for bio-magnetic field measurement. Recently, there has been growing interest in developing chip-scale AMs through nanophotonics and current CMOS-comp...

  • Article
  • Open Access
28 Citations
9,528 Views
12 Pages

A CMOS-Compatible Poly-Si Nanowire Device with Hybrid Sensor/Memory Characteristics for System-on-Chip Applications

  • Min-Cheng Chen,
  • Hao-Yu Chen,
  • Chia-Yi Lin,
  • Chao-Hsin Chien,
  • Tsung-Fan Hsieh,
  • Jim-Tong Horng,
  • Jian-Tai Qiu,
  • Chien-Chao Huang,
  • Chia-Hua Ho and
  • Fu-Liang Yang

26 March 2012

This paper reports a versatile nano-sensor technology using “top-down” poly-silicon nanowire field-effect transistors (FETs) in the conventional Complementary Metal-Oxide Semiconductor (CMOS)-compatible semiconductor process. The nanowire manufacturi...

  • Article
  • Open Access
680 Views
9 Pages

Numerical Proof-of-Concept of Monolithic AC-LGAD Detectors for 4D Particle Tracking

  • Marco Mandurrino,
  • Manuel Da Rocha Rolo,
  • Angelo Rivetti,
  • Giovanni Margutti,
  • Giuseppe Di Nicolantonio and
  • Lucio Pancheri

4 July 2025

We present the numerical proof of a new sensor concept, based on the Resistive AC-Coupled Silicon Detectors (RSDs) paradigm and standard CMOS process, which benefits from having a 100% fill factor and embedded front-end electronics. The compatibility...

  • Article
  • Open Access
5 Citations
5,646 Views
13 Pages

Dynamic pH Sensor with Embedded Calibration Scheme by Advanced CMOS FinFET Technology

  • Chien-Ping Wang,
  • Ying-Chun Shen,
  • Peng-Chun Liou,
  • Yu-Lun Chueh,
  • Yue-Der Chih,
  • Jonathan Chang,
  • Chrong-Jung Lin and
  • Ya-Chin King

2 April 2019

In this work, we present a novel pH sensor using efficient laterally coupled structure enabled by Complementary Metal-Oxide Semiconductor (CMOS) Fin Field-Effect Transistor (FinFET) processes. This new sensor features adjustable sensitivity, wide sen...

  • Article
  • Open Access
14 Citations
4,989 Views
16 Pages

Near Infrared Efficiency Enhancement of Silicon Photodiodes by Integration of Metal Nanostructures Supporting Surface Plasmon Polaritrons

  • Elia Scattolo,
  • Alessandro Cian,
  • Luisa Petti,
  • Paolo Lugli,
  • Damiano Giubertoni and
  • Giovanni Paternoster

11 January 2023

Recent years have witnessed a growing interest in detectors capable of detecting single photons in the near-infrared (NIR), mainly due to the emergence of new applications such as light detection and ranging (LiDAR) for, e.g., autonomous driving. A s...

  • Article
  • Open Access
138 Citations
16,051 Views
29 Pages

Guided-Wave Optical Biosensors

  • Vittorio M. N. Passaro,
  • Francesco Dell’Olio,
  • Biagio Casamassima and
  • Francesco De Leonardis

25 April 2007

Guided-wave optical biosensors are reviewed in this paper. Advantages related to optical technologies are presented and integrated architectures are investigated in detail. Main classes of bio receptors and the most attractive optical transduction me...

  • Article
  • Open Access
1 Citations
956 Views
14 Pages

Monolithically Integrated GaAs Nanoislands on CMOS-Compatible Si Nanotips Using GS-MBE

  • Adriana Rodrigues,
  • Anagha Kamath,
  • Hannah-Sophie Illner,
  • Navid Kafi,
  • Oliver Skibitzki,
  • Martin Schmidbauer and
  • Fariba Hatami

12 July 2025

The monolithic integration of III-V semiconductors with silicon (Si) is a critical step toward advancing optoelectronic and photonic devices. In this work, we present GaAs nanoheteroepitaxy (NHE) on Si nanotips using gas-source molecular beam epitaxy...

  • Article
  • Open Access
1 Citations
3,499 Views
18 Pages

This paper summarizes the results of investigations of bipolar transistors made in VESTIC (Vertical Slit Transistor-based Integrated Circuits) technology. This technology was proposed by W. Maly as an alternative to classical bulk CMOS technology. Ho...

  • Article
  • Open Access
8 Citations
3,272 Views
20 Pages

High Area-Efficient Parallel Encoder with Compatible Architecture for 5G LDPC Codes

  • Yufei Zhu,
  • Zuocheng Xing,
  • Zerun Li,
  • Yang Zhang and
  • Yifan Hu

16 April 2021

This paper presents a novel parallel quasi-cyclic low-density parity-check (QC-LDPC) encoding algorithm with low complexity, which is compatible with the 5th generation (5G) new radio (NR). Basing on the algorithm, we propose a high area-efficient pa...

  • Review
  • Open Access
47 Citations
13,313 Views
32 Pages

29 May 2019

This paper reviews the state of emerging transistor technologies capable of terahertz amplification, as well as the state of transistor modeling as required in terahertz electronic circuit research. Commercial terahertz radar sensors of today are bei...

  • Feature Paper
  • Article
  • Open Access
1 Citations
2,110 Views
7 Pages

23 October 2022

A compatible fabrication technology for integrating InGaAs nMOSFETs and Ge pMOSFETs is developed based on the development of the two-step gate oxide fabrication strategy. The direct wafer bonding method was utilized to obtain the InGaAs-Insulator-Ge...

  • Article
  • Open Access
17 Citations
16,095 Views
13 Pages

21 October 2009

Ion-sensitive, field-effect transistors (ISFET) have been useful biosensors in many applications. However, the signal-to-noise ratio of the ISFET is limited by its intrinsic, low-frequency noise. This paper presents an ISFET capable of utilizing late...

  • Article
  • Open Access
22 Citations
7,322 Views
8 Pages

Integrated Amorphous Silicon p-i-n Temperature Sensor for CMOS Photonics

  • Sandro Rao,
  • Giovanni Pangallo and
  • Francesco Giuseppe Della Corte

6 January 2016

Hydrogenated amorphous silicon (a-Si:H) shows interesting optoelectronic and technological properties that make it suitable for the fabrication of passive and active micro-photonic devices, compatible moreover with standard microelectronic devices on...

  • Article
  • Open Access
7 Citations
4,981 Views
10 Pages

Resistance Switching Statistics and Mechanisms of Pt Dispersed Silicon Oxide-Based Memristors

  • Xiaojuan Lian,
  • Xinyi Shen,
  • Liqun Lu,
  • Nan He,
  • Xiang Wan,
  • Subhranu Samanta and
  • Yi Tong

Silicon oxide-based memristors have been extensively studied due to their compatibility with the dominant silicon complementary metal–oxide–semiconductor (CMOS) fabrication technology. However, the variability of resistance switching (RS)...

  • Article
  • Open Access
1 Citations
5,121 Views
18 Pages

CMOS Interface Circuits for High-Voltage Automotive Signals

  • Andrea Boni,
  • Michele Caselli,
  • Alessandro Magnanini and
  • Matteo Tonelli

The acquisition of high-voltage signals from sensors and actuators in an internal-combustion engine is often required for diagnostic purposes or in the case of conversion to alternative fuels, such as hydrogen, natural gas, or biogas. The integration...

  • Review
  • Open Access
7 Citations
4,087 Views
24 Pages

19 October 2020

During the last few years, there has been renewed interest in the monolithic integration of gold-free, Ternary III–As Antimonide (III–As–Sb) compound semiconductor materials on complementary metal-oxide-semiconductor (CMOS)—co...

  • Review
  • Open Access
51 Citations
12,886 Views
20 Pages

The Evolution of Manufacturing Technology for GaN Electronic Devices

  • An-Chen Liu,
  • Po-Tsung Tu,
  • Catherine Langpoklakpam,
  • Yu-Wen Huang,
  • Ya-Ting Chang,
  • An-Jye Tzou,
  • Lung-Hsing Hsu,
  • Chun-Hsiung Lin,
  • Hao-Chung Kuo and
  • Edward Yi Chang

23 June 2021

GaN has been widely used to develop devices for high-power and high-frequency applications owing to its higher breakdown voltage and high electron saturation velocity. The GaN HEMT radio frequency (RF) power amplifier is the first commercialized prod...

  • Article
  • Open Access
9 Citations
4,991 Views
15 Pages

29 June 2020

Microelectronics is emerging, sometimes with changing fortunes, as a key enabling technology in diagnostics. This paper reviews some recent results and technical challenges which still need to be addressed in terms of the design of CMOS analog applic...

  • Article
  • Open Access
17 Citations
2,584 Views
16 Pages

In this paper, a buck DC-DC converter with the proposed twin frequency control scheme (TFCS) and accurate load current sensing (ALCS) was designed and implemented with 0.18 µm CMOS technology for a supply voltage ranging from 2.0 to 3.0 V, whic...

  • Review
  • Open Access
331 Citations
45,236 Views
27 Pages

Optical Properties and Plasmonic Performance of Titanium Nitride

  • Panos Patsalas,
  • Nikolaos Kalfagiannis and
  • Spyros Kassavetis

29 May 2015

Titanium nitride (TiN) is one of the most well-established engineering materials nowadays. TiN can overcome most of the drawbacks of palsmonic metals due to its high electron conductivity and mobility, high melting point and due to the compatibility...

  • Review
  • Open Access
669 Views
23 Pages

The current-mode logic (CML) driver has evolved alongside integrated circuit (IC) technology. Its typical structure contains a tail current source, differential amplifying transistors, and load resistors. It is widely used in modern optical transceiv...

  • Review
  • Open Access
7 Citations
2,807 Views
14 Pages

17 February 2022

Layered two-dimensional (2D) and quasi-zero-dimensional (0D) materials effectively absorb radiation in the wide ultraviolet, visible, infrared, and terahertz ranges. Photomemristive structures made of such low-dimensional materials are of great inter...

  • Review
  • Open Access
20 Citations
8,693 Views
17 Pages

Research Progress and Development Prospects of Enhanced GaN HEMTs

  • Lili Han,
  • Xiansheng Tang,
  • Zhaowei Wang,
  • Weihua Gong,
  • Ruizhan Zhai,
  • Zhongqing Jia and
  • Wei Zhang

4 June 2023

With the development of energy efficiency technologies such as 5G communication and electric vehicles, Si-based GaN microelectronics has entered a stage of rapid industrialization. As a new generation of microwave and millimeter wave devices, High El...

  • Article
  • Open Access
16 Citations
7,104 Views
12 Pages

High-Performance P- and N-Type SiGe/Si Strained Super-Lattice FinFET and CMOS Inverter: Comparison of Si and SiGe FinFET

  • Yi-Ju Yao,
  • Ching-Ru Yang,
  • Ting-Yu Tseng,
  • Heng-Jia Chang,
  • Tsai-Jung Lin,
  • Guang-Li Luo,
  • Fu-Ju Hou,
  • Yung-Chun Wu and
  • Kuei-Shu Chang-Liao

8 April 2023

This research presents the optimization and proposal of P- and N-type 3-stacked Si0.8Ge0.2/Si strained super-lattice FinFETs (SL FinFET) using Low-Pressure Chemical Vapor Deposition (LPCVD) epitaxy. Three device structures, Si FinFET, Si0.8Ge0.2 FinF...

  • Article
  • Open Access
591 Views
18 Pages

Fabrication and Characterization of Back-Gate and Front-Gate Ge-on-Insulator Transistors for Low-Power Applications

  • Yuhui Ren,
  • Jiale Su,
  • Jiahan Ke,
  • Hongxiao Lin,
  • Ben Li,
  • Zhenzhen Kong,
  • Yiwen Zhang,
  • Junhao Du,
  • Renrong Liang and
  • Henry H. Radamson
  • + 7 authors

26 November 2025

Germanium (Ge) has long been regarded as a promising channel material, owing to its superior carrier mobility and highly tunable electronic band structure. The new generation of low-power electronics is approaching the formation of fully depleted (FD...

  • Article
  • Open Access
7 Citations
3,187 Views
13 Pages

Memristor-Based D-Flip-Flop Design and Application in Built-In Self-Test

  • Guangzhen Dai,
  • Wenxin Xie,
  • Xingyan Du,
  • Mingjun Han,
  • Tianming Ni and
  • Daohua Wu

There are several significant advantages of memristors, such as their nano scale, fast switching speed, power efficiency and compatibility with CMOS technology, as one of the alternatives in the next generation of semiconductor storage devices. D-fli...

  • Feature Paper
  • Article
  • Open Access
4 Citations
3,951 Views
16 Pages

A 180 nm CMOS Integrated Optoelectronic Sensing System for Biomedical Applications

  • Guido Di Patrizio Stanchieri,
  • Andrea De Marcellis,
  • Marco Faccio,
  • Elia Palange,
  • Graziano Battisti and
  • Ulkuhan Guler

29 November 2022

This paper reports on a CMOS fully integrated optoelectronic sensing system composed of a Si photodiode and a transimpedance amplifier acting as the electronic analog front-end for the conditioning of the photocurrent generated by the photodiode. The...

  • Article
  • Open Access
7 Citations
9,425 Views
18 Pages

CMOS-MEMS Test-Key for Extracting Wafer-Level Mechanical Properties

  • Wan-Chun Chuang,
  • Yuh-Chung Hu and
  • Pei-Zen Chang

12 December 2012

This paper develops the technologies of mechanical characterization of CMOS-MEMS devices, and presents a robust algorithm for extracting mechanical properties, such as Young’s modulus, and mean stress, through the external electrical circuit behavior...

  • Article
  • Open Access
4 Citations
4,826 Views
19 Pages

1 October 2021

The availability of quantum microprocessors is mandatory, to efficiently run those quantum algorithms promising a radical leap forward in computation capability. Silicon-based nanostructured qubits appear today as a very interesting approach, because...

  • Review
  • Open Access
247 Citations
32,349 Views
24 Pages

12 October 2009

The 2007 Nobel Prize in Physics can be understood as a global recognition to the rapid development of the Giant Magnetoresistance (GMR), from both the physics and engineering points of view. Behind the utilization of GMR structures as read heads for...

  • Feature Paper
  • Article
  • Open Access
8 Citations
15,885 Views
17 Pages

An FSK and OOK Compatible RF Demodulator for Wake Up Receivers

  • Thierry Taris,
  • Hassène Kraimia,
  • Didier Belot and
  • Yann Deval

This work proposes a novel demodulation circuit to address the implementation of Wake-Up Receivers (Wu-Rx) in Wireless Sensor Nodes (WSN). This RF demodulator, namely Modulated Oscillator for envelOpe Detection (MOOD), is compatible with both FSK and...

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