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Proceedings 2017, 1(4), 550;

Evanescent-Wave Gas Sensing Using an Integrated Thermal Light Source

CTR Carinthian Tech Research AG, Villach, Austria
Infineon Technologies Austria AG, Villach, Austria
Institute for Microelectronics and Microsensors, Johannes Kepler University, Linz, Austria
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
Author to whom correspondence should be addressed.
Published: 17 August 2017
(This article belongs to the Proceedings of Eurosensors 2017)
PDF [689 KB, uploaded 17 August 2017]


The last years showed an increased request for miniaturised, CMOS-compatible gas detectors. In contrast to sensors utilizing metal-oxide chemical interfaces, optical strategies are potentially faster and more robust. Recently we demonstrated CO2 detection by evanescent-wave absorption in the mid-infrared using a combination of an external laser source and silicon waveguides based on CMOS technology. We now go one step further and demonstrate the feasibility of detection of CO2 down to a concentration of 3% with a low-cost integrated thermal source. These results are promising for further technological developments towards on-chip mid-infrared photonic gas sensors, and new designs are currently devised to increase the yet relatively low sensitivity.
Keywords: photonics; waveguides; gas sensing; mid-infrared light; evanescent-wave absorption photonics; waveguides; gas sensing; mid-infrared light; evanescent-wave absorption
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Consani, C.; Ranacher, C.; Tortschanoff, A.; Grille, T.; Irsigler, P.; Jakoby, B. Evanescent-Wave Gas Sensing Using an Integrated Thermal Light Source. Proceedings 2017, 1, 550.

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