- Article
Deep Etched Gallium Nitride Waveguide for Raman Spectroscopic Applications
- Yu-Li Hsieh,
- Wen-Shao Chen,
- Liann-Be Chang,
- Lee Chow,
- Samuel Borges,
- Alfons Schulte,
- Shiang-Fu Huang,
- Ming-Jer Jeng and
- Chih-Jen Yu
Gallium nitride (GaN) materials with a high chemical stability and biocompatibility are well suited for bio-sensing applications and evanescent wave spectroscopy. However, GaN poses challenges for processing, especially for deep etching using convent...

