Bistable or multi-stable structures have found broad applications in the fields of adaptive structures, flow control, and energy harvesting devices due to their unique nonlinear characteristics and strong local stability behavior. In this paper, a th...
We present the design, simulation, and characterization of a magnetic shape-memory alloy (MSMA) film actuator that transitions from bistable switching to resonant self-actuation when subjected to a stationary heat source. The actuator design comprise...
The wings of flapping-wing micro aerial vehicles (MAVs) face the risk of breakage. To solve this issue, we propose the use of a biomimetic foldable wing. In this study, a resonant-driven piezoelectric flapping-wing actuator with a passive folding/unf...
Microelectromechanical systems (MEMS) resonators require fast, accurate, and cost-effective testing for mass production. Among the different test methods, frequency domain analysis is one of the easiest and fastest. This paper presents the measuremen...
In recent years, with the rapid development of soft robots, dielectric elastomer actuators (DEAs) as a novel type of soft actuators have been widely studied. However, DEAs often suffer from low instantaneous output force/power, especially in high pay...
The autonomous underwater vehicle (AUV) is mainly used in the development and exploration of the ocean. As an important module of the AUV, the actuator plays an important role in the normal execution of the AUV. Therefore, the fault diagnosis of the...
In this article, the pull-in instability and dynamic characteristics of electrostatically actuated suspended microchannel resonators are studied. A theoretical model is presented to describe the pull-in effect of suspended microchannel resonators by...
This article presents the design, fabrication, and experimental validation of a centimeter-scale autonomous robot that achieves bidirectional locomotion and trajectory control through 3D-printed resonators actuated by piezoelectricity and integrated...
Metamaterials are periodic structures which offer physical properties not found in nature. Particularly, acoustic metamaterials can manipulate sound and elastic waves both spatially and spectrally in unpreceded ways. Acoustic metamaterials can genera...
Inspired by the fact that flying insects improve their power conversion efficiency through resonance, many soft robots driven by dielectric elastomer actuators (DEAs) have achieved optimal performance via first-order modal resonance. Besides first-or...
The paper investigates hydraulic wave propagation phenomena through hydraulic circuits of power transmission systems by means of numerical approaches. The actuation circuit of a Dual-Clutch Transmission (DCT) power transmission system supplied by a G...
This study aims to present a new two-degree-of-freedom (DOF) linear resonant actuator (LRA) and its motion control method without a position sensor. The design method of 2-DOF LRA which resonates with only detent force without a mechanical spring is...
The vibration isolation system is now indispensable to high-precision instruments and equipment, which can provide a low vibration environment to ensure performance. However, the disturbance with variable frequency poses a challenge to the vibration...
High force, large displacement and low voltage consumption are a primary concern for microgyroscopes. The chevron-shaped thermal actuators are unique in terms of high force generation combined with the large displacements at a low operating voltage i...
This study developed a three-axis vibrational haptic wearable device (RCWS) utilizing Linear Resonant Actuators (LRAs) to simulate grinding vibrations. The implementation of RCWS is described in detail. By recording the normal force during manual gri...
Medical professionals increasingly rely on endoscopes to carry out many minimally invasive procedures on patients to safely examine, diagnose, and treat a large variety of conditions. However, their insertion tube diameter dictates which passages of...
Bidirectional frequency tuning in microresonators is demonstrated through the simultaneous use of both mechanical (stretching) and magnetomotive approaches. Stretching is employed to increase the resonance frequency, while the magnetomotive method pr...
Electrostatic actuation is widely employed in microelectromechanical systems (MEMS) due to its distinct advantages. However, it requires high voltage, typically provided by a power supply and a high voltage amplifier, which is limited in gain, especi...
In the drive to miniaturise and integrate reference oscillator components, microelectromechanical systems (MEMS) resonators are excellent candidates to replace quartz crystals. Silicon is the most utilised resonator structural material due to its ass...
Optical scanners are used frequently in medical imaging units to examine and diagnose cancers, assist with surgeries, and detect lesions and malignancies. The continuous growth in optics along with the use of optical fibers enables fabrication of ima...
Stimulated Brillouin scattering (SBS) in microresonators offers a unique way to develop narrow-linewidth chip-scale lasers. Yet their coherence performance is hindered by the cascaded SBS process, which clamps the output power and broadens the fundam...
The paper presents a novel fully integrated MEMS-based non-resonating operated 2D mechanical scanning system using a 1D push-pull actuator. Details of the design, fabrication and tests performed are presented. The current design utilizes an integrate...
This work describes an on-chip integrated micro-actuator device for slack-free carbon nanotube (CNT) resonators, improving frequency tunability and Q factor and to study non-linear mode interaction. The device fabricated on SOI wafer with low thermal...
This paper presents the design and analysis of a multi degree of freedom (DOF) electro-thermally actuated non-resonant MEMS gyroscope with a 3-DOF drive mode and 1-DOF sense mode system. The 3-DOF drive mode system consists of three masses coupled to...
The nonlinear coupled vibration of an electrically actuated arch microbeam has attracted wide attention. In this paper, we studied the nonlinear dynamics of an electrically actuated arch microbeam with flexible supports. The two-to-one internal reson...
A novel approach for dynamic microwave modulation is proposed in the form of reconfigurable resonant circuits. This result is obtained through the monolithic integration of double split ring resonators (DSRRs) with microelectromechanical actuators (M...
An alternative packaging method, termed built-in packaging, is proposed for single terminal devices, and demonstrated with an actuator application. Built-in packaging removes the requirements of wire bonding, chip carrier, PCB, probe station, interco...
Modern industrial, household and other equipment include sophisticated power mechanisms and complicated control solutions and require tighter human–machine–human interaction, forming the structures known as cyber–physical–human systems. Their signifi...
An important aspect that must be considered when designing micro-electro-mechanical systems (MEMS) for all domains, including robotics, is the thermoelastic damping which occurs when the MEMS material is subjected to cyclic stress. This paper is focu...
A novel MEMS continuous deformable mirror (DM) is presented. The mirror can be integrated into optical systems to compensate for monochromatic and chromatic aberrations. It is comprised of a 1.6 mm circular plate supported by eight evenly spaced flex...
The main objective of the present work is to find an approximate analytical solution for the nonlinear differential equation of the vibro-impact oscillator under the influence of the electromagnetic actuation near the primary resonance. The trigger o...
This paper presents the results of experimental investigations of 108 geometrical configurations of a loudspeaker-driven synthetic jet (SJ) actuator. The considered cases of the SJ actuator were characterized by a high coupling ratio. The experiment...
Electromechanical coupling defines the ratio of electrical and mechanical energy exchanged during a flexure cycle of a piezoelectric actuator. This paper presents an analysis of the dynamic electromechanical coupling factor (dynamic EMCF) for cantile...
In this paper, the newly developed 3D-constructed AlScN piezoelectric MEMS mirror is presented. This paper describes the structure and driving mechanism of the proposed mirror device, covering its driving characteristics in both quasi-static and reso...
Noninvasive tuning of the mechanical resonance frequencies of suspended parallel nanomembranes in various monolithic arrays is achieved by piezoelectric control of their tensile stress. Parametric amplification of their thermal fluctuations is shown...
In order to effectively increase the resonance frequency and the quality factor of atomic force microscope (AFM) probes, a novel oscillating probe based on a dog-bone shaped MEMS resonator was conceived, designed, fabricated and evaluated. The novel...
In consideration of the presented optical-thermally excited resonant mass detection scheme, molecular dynamics calculations are performed to investigate the thermal actuation and resonant mass sensing mechanism. The simulation results indicate that a...
Primary tumors of patients can release circulating tumor cells (CTCs) to flow inside of their blood. The CTCs have different mechanical properties in comparison with red and white blood cells, and their detection may be employed to study the efficien...
Impact characterization of a linear resonant actuator (LRA) is studied experimentally by a newly-developed drop tester, which can control various experimental uncertainties, such as rotational moment, air resistance, secondary impact, and so on. The...
We introduce an analysis platform for the viscoelastic properties of biological fluids such as the synovia found in articular joints. Small sample volumes are available for diagnostic purpose. Our approach uses a thickness shear mode quartz crystal i...
Micro-electro-mechanical system (MEMS) mirrors are widely used for optical modulation, attenuation, steering, switching and tracking. In most cases, MEMS mirrors are packaged in air, resulting in overshoot and ringing upon actuation. In this paper, a...
We present novel microelectromechanical chemical sensors for the detection of volatile organic compounds based on electrostatically actuated, nanometer-thin, freestanding membranes of organically cross-linked gold nanoparticles. The sensors employ qu...
The micro-electro-mechanical systems (MEMS) resonant scanners are in great demand for numerous light scanning applications. Recently, the development of LiDAR in micro-robotics and mobile devices has led to the requirement of ultra-small systems with...
Repairing cracks in the concrete of a building is very important to ensure the safety of a nuclear power plant. However, repair work in areas with very strong radiation is very difficult. Many robots have been proposed to solve this problem. However,...
Microelectromechanical System (MEMS)-based scanning mirrors are important optical devices that have been employed in many fields as a low-cost and miniaturized solution. In recent years, the rapid development of Light Detection and Ranging (LiDAR) ha...
The present work is devoted to the study of nonlinear vibrations of an electromagnetically actuated cantilever beam subject to harmonic external excitation. The soft actuator that controls the vibratory motion of such components of a robotic structur...
In order to solve the hysteresis nonlinearity and resonance problems of piezoelectric stages, this paper takes a three-degree-of-freedom tip-tilt-piston piezoelectric stage as the object, compensates for the hysteresis nonlinearity through inverse hy...
The development of new compliant resonant microsystems and the trend towards further miniaturization have recently raised the issue of the accuracy and reliability of computational tools for the estimation of fluid damping. Focusing on electrostatica...
We experimentally investigate the primary superharmonic of order two and subharmonic of order one-half resonances of an electrostatic MEMS actuator under direct excitation. We identify the parameters of a one degree of freedom (1-DOF) generalized Duf...
This paper reports a method that enables real-time displacement monitoring and control of micromachined resonant-type actuators using wireless radiofrequency (RF). The method is applied to an out-of-plane, spiral-coil microactuator based on shape-mem...
of 9