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Micromachines 2017, 8(10), 289; https://doi.org/10.3390/mi8100289

Modelling and Experimental Verification of Step Response Overshoot Removal in Electrothermally-Actuated MEMS Mirrors

1
School of Information and Electronics, Beijing Institute of Technology, Beijing 100081, China
2
Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL 32611, USA
3
WiO Technology Co., Ltd., Wuxi 214035, China
*
Authors to whom correspondence should be addressed.
Received: 1 September 2017 / Revised: 16 September 2017 / Accepted: 20 September 2017 / Published: 25 September 2017
(This article belongs to the Special Issue MEMS Mirrors)
Full-Text   |   PDF [4672 KB, uploaded 25 September 2017]   |  

Abstract

Micro-electro-mechanical system (MEMS) mirrors are widely used for optical modulation, attenuation, steering, switching and tracking. In most cases, MEMS mirrors are packaged in air, resulting in overshoot and ringing upon actuation. In this paper, an electrothermal bimorph MEMS mirror that does not generate overshoot in step response, even operating in air, is reported. This is achieved by properly designing the thermal response time and the mechanical resonance without using any open-loop or closed-loop control. Electrothermal and thermomechanical lumped-element models are established. According to the analysis, when setting the product of the thermal response time and the fundamental resonance frequency to be greater than Q/2π, the mechanical overshoot and oscillation caused by a step signal can be eliminated effectively. This method is verified experimentally with fabricated electrothermal bimorph MEMS mirrors. View Full-Text
Keywords: micro-electro-mechanical system (MEMS) mirror; bimorph; electro-thermal actuator; resonance frequency; thermal modelling; overshoot; ringing micro-electro-mechanical system (MEMS) mirror; bimorph; electro-thermal actuator; resonance frequency; thermal modelling; overshoot; ringing
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Li, M.; Chen, Q.; Liu, Y.; Ding, Y.; Xie, H. Modelling and Experimental Verification of Step Response Overshoot Removal in Electrothermally-Actuated MEMS Mirrors. Micromachines 2017, 8, 289.

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