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Micromachines 2018, 9(11), 577; https://doi.org/10.3390/mi9110577

Design and Analysis of a High-Gain and Robust Multi-DOF Electro-thermally Actuated MEMS Gyroscope

1
Department of Electrical Engineering, National University of Sciences and Technology, Islamabad 44000, Pakistan
2
Department of Mechatronics Engineering, National University of Sciences and Technology, Islamabad 44000, Pakistan
*
Author to whom correspondence should be addressed.
Received: 30 September 2018 / Revised: 24 October 2018 / Accepted: 1 November 2018 / Published: 5 November 2018
(This article belongs to the Section A:Physics)
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Abstract

This paper presents the design and analysis of a multi degree of freedom (DOF) electro-thermally actuated non-resonant MEMS gyroscope with a 3-DOF drive mode and 1-DOF sense mode system. The 3-DOF drive mode system consists of three masses coupled together using suspension beams. The 1-DOF system consists of a single mass whose motion is decoupled from the drive mode using a decoupling frame. The gyroscope is designed to be operated in the flat region between the first two resonant peaks in drive mode, thus minimizing the effect of environmental and fabrication process variations on device performance. The high gain in the flat operational region is achieved by tuning the suspension beams stiffness. A detailed analytical model, considering the dynamics of both the electro-thermal actuator and multi-mass system, is developed. A parametric optimization is carried out, considering the microfabrication process constraints of the Metal Multi-User MEMS Processes (MetalMUMPs), to achieve high gain. The stiffness of suspension beams is optimized such that the sense mode resonant frequency lies in the flat region between the first two resonant peaks in the drive mode. The results acquired through the developed analytical model are verified with the help of 3D finite element method (FEM)-based simulations. The first three resonant frequencies in the drive mode are designed to be 2.51 kHz, 3.68 kHz, and 5.77 kHz, respectively. The sense mode resonant frequency is designed to be 3.13 kHz. At an actuation voltage of 0.2 V, the dynamically amplified drive mode gain in the sense mass is obtained to be 18.6 µm. With this gain, a capacitive change of 28.11   f F and 862.13   f F is achieved corresponding to the sense mode amplitude of 0.15   μ m and 4.5   μ m at atmospheric air pressure and in a vacuum, respectively. View Full-Text
Keywords: MEMS gyroscope; electro-thermal actuator; non-resonant; multi-DOF; high gain; capacitive sensing; robustness MEMS gyroscope; electro-thermal actuator; non-resonant; multi-DOF; high gain; capacitive sensing; robustness
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Saqib, M.; Mubasher Saleem, M.; Mazhar, N.; Awan, S.U.; Shahbaz Khan, U. Design and Analysis of a High-Gain and Robust Multi-DOF Electro-thermally Actuated MEMS Gyroscope. Micromachines 2018, 9, 577.

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