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Cross-Linked Nanoparticle Membranes for Microelectromechanical Chemical Sensors and Pressure Sensors

1
Fraunhofer Center for Applied Nanotechnology CAN, Grindelallee 117, 20146 Hamburg, Germany
2
Institute of Physical Chemistry, University of Hamburg, Grindelallee 117, 20146 Hamburg, Germany
*
Author to whom correspondence should be addressed.
Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.
Proceedings 2018, 2(13), 821; https://doi.org/10.3390/proceedings2130821
Published: 22 January 2019
(This article belongs to the Proceedings of EUROSENSORS 2018)
We present novel microelectromechanical chemical sensors for the detection of volatile organic compounds based on electrostatically actuated, nanometer-thin, freestanding membranes of organically cross-linked gold nanoparticles. The sensors employ quasi-static deflection amplitudes or resonance frequency shifts of the membranes as highly sensitive sensing signals and are capable of detecting analytes at concentrations down to the low ppm range. We show that the devices can further be utilized for analyte discrimination. Additionally, we demonstrate that freestanding GNP membranes can be used for the fabrication of highly sensitive resistive pressure sensors.
Keywords: gold; nanoparticles; nanocomposites; membranes; pressure sensors; chemical sensors; actuators; resonators; MEMS; NEMS gold; nanoparticles; nanocomposites; membranes; pressure sensors; chemical sensors; actuators; resonators; MEMS; NEMS
MDPI and ACS Style

Schlicke, H.; Hartmann, H.; Bittinger, S.C.; Rebber, M.; Behrens, M.; Vossmeyer, T. Cross-Linked Nanoparticle Membranes for Microelectromechanical Chemical Sensors and Pressure Sensors. Proceedings 2018, 2, 821.

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