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Proceedings 2017, 1(4), 374;

On-Chip Platform for Slack-Free Carbon Nanotube Resonators

Micro and Nanosystems, Department of Mechanical and Process Engineering, ETH Zurich, Switzerland
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
Author to whom correspondence should be addressed.
Published: 8 August 2017
(This article belongs to the Proceedings of Eurosensors 2017)
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This work describes an on-chip integrated micro-actuator device for slack-free carbon nanotube (CNT) resonators, improving frequency tunability and Q factor and to study non-linear mode interaction. The device fabricated on SOI wafer with low thermal budget (<600 K) encompasses a restricted symmetrical out-of-plane vibration and a stiff in-plane electro-thermal actuator with a displacement of ~112 nm at 2.7 mW. This corresponds to 5.6% of strain for a 2 μm long suspended carbon nanotube. The in-plane mechanical resonance designed to be far from CNT resonances in MHz regime is measured at 209 kHz. The design is optimized for low power consumption, electrical and thermal isolation and is customized for dry transfer of CNTs.
Keywords: carbon nanotube; resonator; micro-actuator; strain-sensor carbon nanotube; resonator; micro-actuator; strain-sensor
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Kumar, L.; Jenni, L.V.; Roman, C.I.; Hierold, C. On-Chip Platform for Slack-Free Carbon Nanotube Resonators. Proceedings 2017, 1, 374.

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