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Estimation of Air Damping in Out-of-Plane Comb-Drive Actuators

Department of Civil and Environmental Engineering, Politecnico di Milano, Piazza L. da Vinci 32, 20133 Milano, Italy
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Author to whom correspondence should be addressed.
Currently with: Engineering Ingegneria Informatica S.p.A., 20090 Assago, Italy.
Micromachines 2019, 10(4), 263; https://doi.org/10.3390/mi10040263
Received: 6 February 2019 / Revised: 9 April 2019 / Accepted: 16 April 2019 / Published: 19 April 2019
(This article belongs to the Special Issue Gas Flows in Microsystems)
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Abstract

The development of new compliant resonant microsystems and the trend towards further miniaturization have recently raised the issue of the accuracy and reliability of computational tools for the estimation of fluid damping. Focusing on electrostatically actuated torsional micro-mirrors, a major dissipation contribution is linked to the constrained flow of air at comb fingers. In the case of large tilting angles of the mirror plate, within a period of oscillation the geometry of the air domain at comb-drives gets largely distorted, and the dissipation mechanism is thereby affected. In this communication, we provide an appraisal of simple analytical solutions to estimate the dissipation in the ideal case of air flow between infinite plates, at atmospheric pressure. The results of numerical simulations are also reported to assess the effect on damping of the finite size of actual geometries. View Full-Text
Keywords: resonant micro-electromechanical-systems (MEMS); micro-mirrors; out-of-plane comb actuation; fluid damping; analytical solution; FE analysis resonant micro-electromechanical-systems (MEMS); micro-mirrors; out-of-plane comb actuation; fluid damping; analytical solution; FE analysis
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Mirzazadeh, R.; Mariani, S. Estimation of Air Damping in Out-of-Plane Comb-Drive Actuators. Micromachines 2019, 10, 263.

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