Next Article in Journal
Comprehensive Die Shear Test of Silicon Packages Bonded by Thermocompression of Al Layers with Thin Sn Capping or Insertions
Previous Article in Journal
Millimeter-Wave Substrate Integrated Waveguide Using Micromachined Tungsten-Coated Through Glass Silicon Via Structures
Article Menu
Issue 4 (April) cover image

Export Article

Open AccessArticle

A Study on Measurement Variations in Resonant Characteristics of Electrostatically Actuated MEMS Resonators

1
Interdisciplinary Program in Creative Engineering, Korea University of Technology and Education, Cheonan 31253, Republic of Korea
2
School of Mechatronics Engineering, Korea University of Technology and Education, Cheonan 31253, Republic of Korea
*
Author to whom correspondence should be addressed.
Micromachines 2018, 9(4), 173; https://doi.org/10.3390/mi9040173
Received: 12 February 2018 / Revised: 28 March 2018 / Accepted: 6 April 2018 / Published: 9 April 2018
(This article belongs to the Section A:Physics)
  |  
PDF [16492 KB, uploaded 3 May 2018]
  |  

Abstract

Microelectromechanical systems (MEMS) resonators require fast, accurate, and cost-effective testing for mass production. Among the different test methods, frequency domain analysis is one of the easiest and fastest. This paper presents the measurement uncertainties in electrostatically actuated MEMS resonators, using frequency domain analysis. The influence of the applied driving force was studied to evaluate the measurement variations in resonant characteristics, such as the natural frequency and the quality factor of the resonator. To quantify the measurement results, measurement system analysis (MSA) was performed using the analysis of variance (ANOVA) method. The results demonstrate that the resonant frequency ( f r ) is mostly affected by systematic error. However, the quality (Q) factor strongly depends on the applied driving force. To reduce the measurement variations in Q factor, experiments were carried out to study the influence of DC and/or AC driving voltages on the resonator. The results reveal that measurement uncertainties in the quality factor were high for a small electrostatic force. View Full-Text
Keywords: electrostatic actuation; MEMS resonator; measurement variation; frequency domain; resonant characteristics electrostatic actuation; MEMS resonator; measurement variation; frequency domain; resonant characteristics
Figures

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
SciFeed

Share & Cite This Article

MDPI and ACS Style

Iqbal, F.; Lee, B. A Study on Measurement Variations in Resonant Characteristics of Electrostatically Actuated MEMS Resonators. Micromachines 2018, 9, 173.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Micromachines EISSN 2072-666X Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top