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67 Results Found

  • Article
  • Open Access
7 Citations
3,256 Views
11 Pages

Contrast Analysis of Polarization in Three-Beam Interference Lithography

  • Fuping Peng,
  • Jing Du,
  • Jialin Du,
  • Simo Wang and
  • Wei Yan

23 May 2021

This paper analyzes the effect of polarization and the incident angle on the contrasts of interference patterns in three-beam interference lithography. A non-coplanar laser interference system was set up to simulate the relationship between contrast,...

  • Communication
  • Open Access
7 Citations
2,903 Views
9 Pages

Design and Fabrication of Highly Selective Polarizers Using Metallic–Dielectric Gratings

  • Jingyuan Zhu,
  • Yi Ning,
  • Liang Liu,
  • Siyu Dong,
  • Yifang Chen,
  • Zhanshan Wang and
  • Xinbin Cheng

Polarization imaging has been proven as an important technique for obtaining multi-dimensional information in complex environments. As the prevalent polarizers, metal gratings are widely used especially for focal-plane detection due to their flexibil...

  • Feature Paper
  • Article
  • Open Access
2 Citations
4,969 Views
15 Pages

Holographic Silicon Metasurfaces for Total Angular Momentum Demultiplexing Applications in Telecom

  • Gianluca Ruffato,
  • Michele Massari,
  • Pietro Capaldo and
  • Filippo Romanato

11 June 2019

The simultaneous processing of orbital angular momentum (OAM) and polarization has recently acquired particular importance and interest in a wide range of fields ranging from telecommunications to high-dimensional quantum cryptography. Due to their i...

  • Article
  • Open Access
7 Citations
6,197 Views
15 Pages

Pancharatnam–Berry Optical Elements for Spin and Orbital Angular Momentum Division Demultiplexing

  • Gianluca Ruffato,
  • Pietro Capaldo,
  • Michele Massari,
  • Alessia Mezzadrelli and
  • Filippo Romanato

3 November 2018

A Pancharatnam–Berry optical element is designed, fabricated, and optically characterized for the demultiplexing of beams with different polarization and orbital angular momentum states at the telecom wavelength of 1310 nm. The geometric phase...

  • Review
  • Open Access
2 Citations
1,944 Views
32 Pages

13 September 2025

Interference lithography (IL) offers high throughput, excellent uniformity, and maskless patterning capabilities. Compared to other methods, IL enables large-area, cost-effective fabrication of periodic structures with subwavelength resolution, which...

  • Article
  • Open Access
6 Citations
2,427 Views
11 Pages

4 October 2022

In this article, we present a systematic investigation on a multistep nanosphere lithography technique to uncover its potential in fabricating a wide range of two- and three-dimensional nanostructures. A tilted (polar angle) electron beam shower on a...

  • Article
  • Open Access
2 Citations
4,490 Views
12 Pages

300 mm Large Area Wire Grid Polarizers with 50 nm Half-Pitch by ArF Immersion Lithography

  • Jungchul Song,
  • Jae Sub Oh,
  • Min Jun Bak,
  • Il-Suk Kang,
  • Sung Jung Lee and
  • Ga-Won Lee

29 January 2022

The large area wire grid polarizers (LA-WGPs) with 50 nm half-pitch were fabricated using ArF immersion lithography overcoming the limit of the shot field size. To realize the 50 nm line and space patterns on a 300 mm wafer, a zero-distance stitching...

  • Article
  • Open Access
2,743 Views
8 Pages

18 June 2023

An optical coupler is a key input/output (I/O) device in a photonic integrated circuit (PIC), which plays the role of light-source import and modulated light output. In this research, a vertical optical coupler consisting of a concave mirror and a ha...

  • Article
  • Open Access
4 Citations
2,812 Views
14 Pages

Here, we will show photo-induced supramolecular chirality in thin films of achiral amorphous polymers with azo groups in their side-chain. A matter of particular interest is the effect of various film thicknesses on azimuthal rotation and ellipticity...

  • Article
  • Open Access
4 Citations
2,710 Views
11 Pages

Polarization of Magnetoplasmons in Grating Metamaterials Based on CdTe/CdMgTe Quantum Wells

  • Dmitriy Yavorskiy,
  • Maria Szoła,
  • Krzysztof Karpierz,
  • Rafał Rudniewski,
  • Rafał Bożek,
  • Grzegorz Karczewski,
  • Tomasz Wojtowicz,
  • Jerzy Wróbel and
  • Jerzy Łusakowski

11 April 2020

Grating metamaterials were fabricated with electron beam lithography on CdTe/CdMgTe modulation doped structures with two non-interacting quantum wells. Two types of samples were studied: with etched gratings and with gratings formed by deposition of...

  • Article
  • Open Access
10 Citations
4,005 Views
7 Pages

Polymer Lasing in a Periodic-Random Compound Cavity

  • Tianrui Zhai,
  • Xiaofeng Wu,
  • Songtao Li,
  • Shuyan Liang,
  • Lianze Niu,
  • Meng Wang,
  • Shengfei Feng,
  • Hongmei Liu and
  • Xinping Zhang

26 October 2018

Simultaneous distributed feedback (DFB) lasing and linear polarized random lasing are observed in a compound cavity, which consists of a grating cavity and a random cavity. The grating cavity is fabricated by interference lithography. A light-emittin...

  • Review
  • Open Access
14 Citations
6,273 Views
16 Pages

25 August 2021

In the past two decades, polarization gratings (PGs) have attracted intensive attention due to the high-efficient diffraction and polarization selectivity properties. On one hand, the one-dimensional (1D) PGs have been investigated widely and adapted...

  • Article
  • Open Access
14 Citations
3,195 Views
7 Pages

Incidence Angle Effects on the Fabrication of Microstructures Using Six-Beam Laser Interference Lithography

  • Tianxu Jia,
  • Xiangxian Wang,
  • Yaqian Ren,
  • Yingwen Su,
  • Liping Zhang,
  • Hua Yang,
  • Yunping Qi and
  • Weiming Liu

7 January 2021

This paper presents a theoretical demonstration of diverse microstructure fabrication by changing the angle of incidence of a six-beam laser interference lithography system. Different combinations are formed with transverse electric (TE) and transver...

  • Article
  • Open Access
25 Citations
5,350 Views
14 Pages

Generation of Multiple Vector Optical Bottle Beams

  • Svetlana N. Khonina,
  • Alexey P. Porfirev,
  • Sergey G. Volotovskiy,
  • Andrey V. Ustinov,
  • Sergey A. Fomchenkov,
  • Vladimir S. Pavelyev,
  • Siegmund Schröter and
  • Michael Duparré

We propose binary diffractive optical elements, combining several axicons of different types (axis-symmetrical and spiral), for the generation of a 3D intensity distribution in the form of multiple vector optical ‘bottle’ beams, which can be tailored...

  • Article
  • Open Access
1 Citations
3,183 Views
8 Pages

Pump Polarization and Size Effects on the Performance of Polymer Lasers

  • Chao Chen,
  • Liang Han,
  • Junhua Tong,
  • Xiao Zhang,
  • Shuai Zhang and
  • Tianrui Zhai

7 December 2019

The parameters of a pump have a marked influence on the performance of distributed feedback polymer lasers. Our polymer laser consisted of a grating and a polymer film. We fabricated the grating using interference lithography. The polymer film was sp...

  • Article
  • Open Access
1 Citations
3,402 Views
13 Pages

On the Luminescence Properties and Surface Passivation Mechanism of III- and N-Polar Nanopillar Ultraviolet Multiple-Quantum-Well Light Emitting Diodes

  • Moheb Sheikhi,
  • Yijun Dai,
  • Mei Cui,
  • Liang Li,
  • Jianzhe Liu,
  • Wenan Lan,
  • Rongrong Jiang,
  • Wei Guo,
  • Kuan W.A. Chee and
  • Jichun Ye

The non-centrosymmetricity of III-nitride wurtzite crystals enables metal or nitrogen polarity with dramatically different surface energies and optical properties. In this work, III-polar and N-polar nanostructured ultraviolet multiple quantum wells...

  • Article
  • Open Access
14 Citations
3,706 Views
10 Pages

11 October 2018

Recently developed graded photonic super-crystals show an enhanced light absorption and light extraction efficiency if they are integrated with a solar cell and an organic light emitting device, respectively. In this paper, we present the holographic...

  • Communication
  • Open Access
6 Citations
4,139 Views
9 Pages

15 February 2023

The phase and polarization of electromagnetic waves can be conveniently manipulated by the dynamic phase and geometric phase elements. Here, we propose a compact optical integration of dynamic phase and geometric phase to generate arbitrary vector vo...

  • Feature Paper
  • Article
  • Open Access
12 Citations
8,117 Views
12 Pages

Flexible Holographic Fabrication of 3D Photonic Crystal Templates with Polarization Control through a 3D Printed Reflective Optical Element

  • David Lowell,
  • David George,
  • Jeffrey Lutkenhaus,
  • Chris Tian,
  • Murthada Adewole,
  • Usha Philipose,
  • Hualiang Zhang and
  • Yuankun Lin

21 July 2016

In this paper, we have systematically studied the holographic fabrication of three-dimensional (3D) structures using a single 3D printed reflective optical element (ROE), taking advantage of the ease of design and 3D printing of the ROE. The reflecti...

  • Article
  • Open Access
637 Views
15 Pages

31 July 2025

Optical materials are widely used in large optical systems such as lithography machines and astronomical telescopes. However, optical materials inevitably produce subsurface damage (SSD) during lapping and polishing processes, degrading the laser dam...

  • Feature Paper
  • Article
  • Open Access
26 Citations
3,845 Views
9 Pages

Circular Dichroism in Low-Cost Plasmonics: 2D Arrays of Nanoholes in Silver

  • Emilija Petronijevic,
  • Alessandro Belardini,
  • Grigore Leahu,
  • Tiziana Cesca,
  • Carlo Scian,
  • Giovanni Mattei and
  • Concita Sibilia

15 February 2020

Arrays of nanoholes in metal are important plasmonic devices, proposed for applications spanning from biosensing to communications. In this work, we show that in such arrays the symmetry can be broken by means of the elliptical shape of the nanoholes...

  • Article
  • Open Access
4 Citations
3,089 Views
11 Pages

Pixelated Filter Array for On-Chip Polarized Spectral Detection

  • Yuechen Liu,
  • Chao Feng,
  • Siyu Dong,
  • Jingyuan Zhu,
  • Zhanshan Wang and
  • Xinbin Cheng

23 September 2023

On-chip multi-dimensional detection systems integrating pixelated polarization and spectral filter arrays are the latest trend in optical detection instruments, showing broad application potential for diagnostic medical imaging and remote sensing. Ho...

  • Article
  • Open Access
3 Citations
2,102 Views
11 Pages

26 October 2023

Concentric circular gratings are diffractive optical elements useful for polarization-independent applications in photonics and plasmonics. They are usually fabricated using a low-throughput and expensive electron beam lithography technique. In this...

  • Article
  • Open Access
6 Citations
4,117 Views
13 Pages

22 October 2022

A gap waveguide (GW)-based 4 × 4 dual-band, dual-circularly polarized antenna array is proposed. The antenna is composed of two stacked layers which are responsible for right-handed circularly polarized (RHCP) radiation in K-band and left-hande...

  • Article
  • Open Access
3 Citations
3,411 Views
18 Pages

Semiconductor Optical Amplifiers with Wide Gain Bandwidth and Enhanced Polarization Insensitivity Based on Tensile-Strained Quantum Wells

  • Hui Tang,
  • Meng Zhang,
  • Changjin Yang,
  • Lei Liang,
  • Li Qin,
  • Yuxin Lei,
  • Peng Jia,
  • Yongyi Chen,
  • Yubing Wang and
  • Lijun Wang
  • + 4 authors

21 May 2024

The paper presents a wide-bandwidth, low-polarization semiconductor optical amplifier (SOA) based on strained quantum wells. By enhancing the material gain of quantum wells for TM modes, we have extended the gain bandwidth of the SOA while reducing i...

  • Article
  • Open Access
5 Citations
2,994 Views
12 Pages

Multi-Spiral Laser Patterning of Azopolymer Thin Films for Generation of Orbital Angular Momentum Light

  • Alexey P. Porfirev,
  • Nikolay A. Ivliev,
  • Sergey A. Fomchenkov and
  • Svetlana N. Khonina

3 February 2023

Recently, the realization of the spiral mass transfer of matter has attracted the attention of many researchers. Nano- and microstructures fabricated with such mass transfer can be used for the generation of light with non-zero orbital angular moment...

  • Article
  • Open Access
2 Citations
2,859 Views
12 Pages

In this work, the interaction between an array of QDs and Graphene nanoribbon is modeled using dipole–dipole interaction. Then, based on the presented model, we study the linear optical properties of the considered system and find that by chang...

  • Article
  • Open Access
11 Citations
5,389 Views
14 Pages

Magnetron Sputtering as a Fabrication Method for a Biodegradable Fe32Mn Alloy

  • Till Jurgeleit,
  • Eckhard Quandt and
  • Christiane Zamponi

18 October 2017

Biodegradable metals are a topic of great interest and Fe-based materials are prominent examples. The research task is to find a suitable compromise between mechanical, corrosion, and magnetic properties. For this purpose, investigations regarding al...

  • Article
  • Open Access
4 Citations
4,481 Views
12 Pages

We report on evanescently coupled rectangular microresonators with dimensions up to 20 × 10 μm2 in silicon-on-insulator in an add-drop filter configuration. The influence of the geometrical parameters of the device was experimentally characterized an...

  • Article
  • Open Access
5 Citations
2,767 Views
14 Pages

Rapid Prototyping of a Nanoparticle Concentrator Using a Hydrogel Molding Method

  • Hirotada Hirama,
  • Ryutaro Otahara,
  • Katsuo Mogi,
  • Masanori Hayase,
  • Toru Torii and
  • Harutaka Mekaru

29 March 2021

Nanoparticle (NP) concentration is crucial for liquid biopsies and analysis, and various NP concentrators (NPCs) have been developed. Methods using ion concentration polarization (ICP), an electrochemical phenomenon based on NPCs consisting of microc...

  • Article
  • Open Access
10 Citations
3,466 Views
8 Pages

29 January 2021

We proposed a synaptic transistor gated using a Ta2O5 barrier-layered organic chitosan electric double layer (EDL) applicable to a micro-neural architecture system. In most of the previous studies, a single layer of chitosan electrolyte was unable to...

  • Article
  • Open Access
11 Citations
4,123 Views
12 Pages

Due to attractive material properties, thin film lithium niobate (TFLN) has emerged as a promising platform for advanced photonic functions such as high-speed electro-optical modulation, nonlinear frequency conversion, and frequency comb generation....

  • Article
  • Open Access
837 Views
19 Pages

19 September 2025

In optical one-dimensional grating-on-layer planar structures, an optical resonance occurs when the incident light wave becomes phase-matched to a leaky waveguide mode excited in the layer underneath the grating by an appropriate tuning of the gratin...

  • Article
  • Open Access
2 Citations
2,821 Views
11 Pages

Controllable Patterning of Metallic Photonic Crystals for Waveguide–Plasmon Interaction

  • Yuanhai Lin,
  • Deqing Che,
  • Wenjie Hao,
  • Yifei Dong,
  • Heng Guo,
  • Junsheng Wang and
  • Xinping Zhang

5 February 2023

Waveguide–plasmon polaritons sustained in metallic photonic crystal slabs show fascinating properties, such as narrow bandwidth and ultrafast dynamics crucial for biosensing, light emitting, and ultrafast switching. However, the patterning of m...

  • Article
  • Open Access
3 Citations
3,575 Views
11 Pages

The Low-Loss Spot Size Converter for Alignment with Cleaved Single Mode Fiber

  • Jinyang Zhao,
  • Zhutian Wang,
  • Nan Ye,
  • Fufei Pang and
  • Yingxiong Song

13 July 2023

Integrating the graded index (GRIN) waveguide with the 2-D inversely-tapered waveguide, a new design of spot size converter (SSC) has been proposed to couple the light beam between the cleaved single-mode fiber (SMF) and the silicon (Si) wire wavegui...

  • Article
  • Open Access
4 Citations
3,234 Views
10 Pages

Optimization of Non-Alloyed Backside Ohmic Contacts to N-Face GaN for Fully Vertical GaN-on-Silicon-Based Power Devices

  • Youssef Hamdaoui,
  • Sofie S. T. Vandenbroucke,
  • Sondre Michler,
  • Katir Ziouche,
  • Matthias M. Minjauw,
  • Christophe Detavernier and
  • Farid Medjdoub

15 September 2024

In the framework of fully vertical GaN-on-Silicon device technology development, we report on the optimization of non-alloyed ohmic contacts on the N-polar n+-doped GaN face backside layer. This evaluation is made possible by using patterned TLMs (Tr...

  • Article
  • Open Access
2 Citations
2,562 Views
8 Pages

22 November 2021

Recently, there has been increased interest in developing advanced bright sources for lithography. Sn ions are particularly promising due to their bright emission spectrum in the required wavelength range. Cowan’s code has been used to model the emis...

  • Article
  • Open Access
10 Citations
9,949 Views
11 Pages

One-Step Combined-Nanolithography-and-Photolithography for a 2D Photonic Crystal TM Polarizer

  • Kyung-Hak Choi,
  • Jinwoo Huh,
  • Yonghao Cui,
  • Krutarth Trivedi,
  • Walter Hu,
  • Byeong-Kwon Ju and
  • Jeong-Bong Lee

29 April 2014

Photonic crystals have been widely investigated since they have great potential to manipulate the flow of light in an ultra-compact-scale and enable numerous innovative applications. 2D slab photonic crystals for the telecommunication C band at aroun...

  • Article
  • Open Access
39 Citations
6,100 Views
17 Pages

Piezoelectric Response in Hybrid Micropillar Arrays of Poly(Vinylidene Fluoride) and Reduced Graphene Oxide

  • Igor O. Pariy,
  • Anna A. Ivanova,
  • Vladimir V. Shvartsman,
  • Doru C. Lupascu,
  • Gleb B. Sukhorukov,
  • Tim Ludwig,
  • Ausrine Bartasyte,
  • Sanjay Mathur,
  • Maria A. Surmeneva and
  • Roman A. Surmenev

20 June 2019

This study was dedicated to the investigation of poly(vinylidene fluoride) (PVDF) micropillar arrays obtained by soft lithography followed by phase inversion at a low temperature. Reduced graphene oxide (rGO) was incorporated into the PVDF as a nucle...

  • Article
  • Open Access
1 Citations
1,945 Views
11 Pages

31 July 2022

A kind of ultra-thin transmissive color filter based on a metal-semiconductor-metal (MSM) structure is proposed. The displayed color can cover the entire visible range and switches after H2 treatment. An indium gallium zinc oxide (IGZO) semiconductor...

  • Article
  • Open Access
3 Citations
1,721 Views
17 Pages

Performance of Grating Couplers Used in the Optical Switch Configuration

  • Emilie Laffont,
  • Arnaud Valour,
  • Nicolas Crespo-Monteiro,
  • Pierre Berini and
  • Yves Jourlin

7 November 2023

Surface plasmon resonance is an effect widely used for biosensing. Biosensors based on this effect operate in different configurations, including the use of diffraction gratings as couplers. Gratings are highly tunable and are easy to integrate into...

  • Article
  • Open Access
10 Citations
3,697 Views
8 Pages

The range of fundamental phenomena and applications achievable by metamaterials (MMs) can be significantly extended by dynamic control over the optical response. A mid-infrared tunable absorber which consists of lithography-free planar multilayered d...

  • Article
  • Open Access
2,777 Views
8 Pages

Polarized SERS Controlled by Anisotropic Growth on Ordered Curvature Substrate

  • Yaxin Wang,
  • Aonan Zhu,
  • Xiaolong Zhang and
  • Yongjun Zhang

17 April 2021

Colloidal lithography is an efficient and low-cost method to prepare an ordered nanostructure array with new shapes and properties. In this study, square-shaped and cone-shaped Au nanostructures were obtained by 70° angle deposition onto polystyrene...

  • Article
  • Open Access
20 Citations
8,919 Views
16 Pages

16 November 2016

A new method to integrate poly-dl-lactide (PLA) patterned electrospun fibers with a polydimethylsiloxane (PDMS) microfluidic chip was successfully developed via lithography. Hepatocyte behavior under static and dynamic conditions was investigated. Im...

  • Communication
  • Open Access
2 Citations
2,378 Views
8 Pages

5 September 2023

Longitudinal optical field modulation is very important for applications such as optical imaging, spectroscopy, and optical manipulation. It can achieve high-resolution imaging or manipulation of the target object, but it is also limited by its depth...

  • Article
  • Open Access
33 Citations
3,821 Views
13 Pages

Nanowire Aptamer-Sensitized Biosensor Chips with Gas Plasma-Treated Surface for the Detection of Hepatitis C Virus Core Antigen

  • Kristina A. Malsagova,
  • Tatyana O. Pleshakova,
  • Rafael A. Galiullin,
  • Ivan D. Shumov,
  • Andrey F. Kozlov,
  • Tatyana S. Romanova,
  • Vladimir P. Popov,
  • Alexander V. Glukhov,
  • Vladimir A. Konev and
  • Yuri D. Ivanov
  • + 1 author

1 August 2020

Herein, we have demonstrated highly sensitive real-time biospecific detection of a protein marker of hepatitis C—the core antigen of hepatitis C virus (HCVcoreAg)—using a nanowire (NW) biosensor. The primary element of the NW-biosensor is...

  • Article
  • Open Access
6 Citations
4,473 Views
9 Pages

Nanoantenna Structure with Mid-Infrared Plasmonic Niobium-Doped Titanium Oxide

  • Hai Dang Ngo,
  • Kai Chen,
  • Ørjan S. Handegård,
  • Anh Tung Doan,
  • Thien Duc Ngo,
  • Thang Duy Dao,
  • Naoki Ikeda,
  • Akihiko Ohi,
  • Toshihide Nabatame and
  • Tadaaki Nagao

24 December 2019

Among conductive oxide materials, niobium doped titanium dioxide has recently emerged as a stimulating and promising contestant for numerous applications. With carrier concentration tunability, high thermal stability, mechanical and environmental rob...

  • Article
  • Open Access
2,493 Views
11 Pages

17 June 2022

A uniform unidirectional nanostructure composed of aluminum tin oxide and ultraviolet (UV)-curable polymer is introduced herein. The nanostructure was produced by UV-nanoimprint lithography (UV-NIL), and the fabricated hybrid film was used as a unifo...

  • Article
  • Open Access
4 Citations
3,725 Views
11 Pages

16 June 2021

An alignment-free sensing module for the positioning system based on tunneling magnetoresistive (TMR) sensors with an absolute-incremental-integrated scale is demonstrated. The sensors of the proposed system for both lines consist of identical layer...

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