- Article
Contrast Analysis of Polarization in Three-Beam Interference Lithography
- Fuping Peng,
- Jing Du,
- Jialin Du,
- Simo Wang and
- Wei Yan
This paper analyzes the effect of polarization and the incident angle on the contrasts of interference patterns in three-beam interference lithography. A non-coplanar laser interference system was set up to simulate the relationship between contrast,...