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Photonics 2017, 4(2), 34;

Evanescently Coupled Rectangular Microresonators in Silicon-on-Insulator with High Q-Values: Experimental Characterization

Faculty of Science and Engineering, Waseda University, Shinjuku, Tokyo 169-8555, Japan
Research & Development Center, Oki Electric Industry Co., Ltd., Warabi, Saitama 335-8510, Japan
Author to whom correspondence should be addressed.
Received: 13 March 2017 / Revised: 22 April 2017 / Accepted: 24 April 2017 / Published: 27 April 2017
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We report on evanescently coupled rectangular microresonators with dimensions up to 20 × 10 μm2 in silicon-on-insulator in an add-drop filter configuration. The influence of the geometrical parameters of the device was experimentally characterized and a high Q value of 13,000 was demonstrated as well as the multimode optical resonance characteristics in the drop port. We also show a 95% energy transfer between ports when the device is operated in TM-polarization and determine the full symmetry of the device by using an eight-port configuration, allowing the drop waveguide to be placed on any of its sides, providing a way to filter and route optical signals. We used the FDTD method to analyze the device and e-beam lithography and dry etching techniques for fabrication. View Full-Text
Keywords: rectangular microresonators; silicon-on-insulator; photonic devices rectangular microresonators; silicon-on-insulator; photonic devices

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Mendez-Astudillo, M.; Okayama, H.; Nakajima, H. Evanescently Coupled Rectangular Microresonators in Silicon-on-Insulator with High Q-Values: Experimental Characterization. Photonics 2017, 4, 34.

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