Next Article in Journal
A Micromachined Metal Oxide Composite Dual Gas Sensor System for Principal Component Analysis-Based Multi-Monitoring of Noxious Gas Mixtures
Previous Article in Journal
Modeling and Analysis of the Two-Dimensional Axisymmetric Acoustofluidic Fields in the Probe-Type and Substrate-Type Ultrasonic Micro/Nano Manipulation Systems
Previous Article in Special Issue
Dark-Field Scattering and Local SERS Mapping from Plasmonic Aluminum Bowtie Antenna Array
Open AccessArticle

Nanoantenna Structure with Mid-Infrared Plasmonic Niobium-Doped Titanium Oxide

1
International Center for Materials Nanoarchitectonics, National Institute for Materials Science, Tsukuba 305-0044, Japan
2
Department of Condensed Matter Physics, Graduate school of Science, Hokkaido University, Kita-10 Nishi-8 Kita-ku, Sapporo 060-0810, Japan
3
Institute of Photonics Technology, Jinan University, Guangzhou 510632, China
4
Nanotechnology Innovation Station, National Institute for Materials Science, Tsukuba 305-0044, Japan
*
Author to whom correspondence should be addressed.
Micromachines 2020, 11(1), 23; https://doi.org/10.3390/mi11010023
Received: 17 November 2019 / Revised: 20 December 2019 / Accepted: 23 December 2019 / Published: 24 December 2019
(This article belongs to the Special Issue Infrared Nanophotonics: Materials, Devices, and Applications)
Among conductive oxide materials, niobium doped titanium dioxide has recently emerged as a stimulating and promising contestant for numerous applications. With carrier concentration tunability, high thermal stability, mechanical and environmental robustness, this is a material-of-choice for infrared plasmonics, which can substitute indium tin oxide (ITO). In this report, to illustrate great advantages of this material, we describe successful fabrication and characterization of niobium doped titanium oxide nanoantenna arrays aiming at surface-enhanced infrared absorption spectroscopy. The niobium doped titanium oxide film was deposited with co-sputtering method. Then the nanopatterned arrays were prepared by electron beam lithography combined with plasma etching and oxygen plasma ashing processes. The relative transmittance of the nanostrip and nanodisk antenna arrays was evaluated with Fourier transform infrared spectroscopy. Polarization dependence of surface plasmon resonances on incident light was examined confirming good agreements with calculations. Simulated spectra also present red-shift as length, width or diameter of the nanostructures increase, as predicted by classical antenna theory. View Full-Text
Keywords: nanoantenna; niobium-doped titanium oxide; mid-infrared plasmonics nanoantenna; niobium-doped titanium oxide; mid-infrared plasmonics
Show Figures

Figure 1

MDPI and ACS Style

Ngo, H.D.; Chen, K.; Handegård, Ø.S.; Doan, A.T.; Ngo, T.D.; Dao, T.D.; Ikeda, N.; Ohi, A.; Nabatame, T.; Nagao, T. Nanoantenna Structure with Mid-Infrared Plasmonic Niobium-Doped Titanium Oxide. Micromachines 2020, 11, 23.

Show more citation formats Show less citations formats
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Access Map by Country/Region

1
Back to TopTop