- Article
An Analytical Model of Joule Heating in Piezoresistive Microcantilevers
- Mohd Zahid Ansari and
- Chongdu Cho
The present study investigates Joule heating in piezoresistive microcantilever sensors. Joule heating and thermal deflections are a major source of noise in such sensors. This work uses analytical and numerical techniques to characterise the Joule he...