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Open AccessReview

Fabrication and Structural Design of Micro Pressure Sensors for Tire Pressure Measurement Systems (TPMS)

State Key Laboratory for Mechanical Manufacturing System, Institute of Precision Engineering, Xi'an Jiaotong University, Xi'an 710049, P.R. China
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Sensors 2009, 9(3), 1382-1393; https://doi.org/10.3390/s90301382
Received: 21 January 2009 / Revised: 17 February 2009 / Accepted: 22 February 2009 / Published: 27 February 2009
In this paper we describe the design and testing of a micro piezoresistive pressure sensor for a Tire Pressure Measurement System (TPMS) which has the advantages of a minimized structure, high sensitivity, linearity and accuracy. Through analysis of the stress distribution of the diaphragm using the ANSYS software, a model of the structure was established. The fabrication on a single silicon substrate utilizes the technologies of anisotropic chemical etching and packaging through glass anodic bonding. The performance of this type of piezoresistive sensor, including size, sensitivity, and long-term stability, were investigated. The results indicate that the accuracy is 0.5% FS, therefore this design meets the requirements for a TPMS, and not only has a smaller size and simplicity of preparation, but also has high sensitivity and accuracy. View Full-Text
Keywords: Piezoresistive; TPMS; Pressure sensor; FEM Piezoresistive; TPMS; Pressure sensor; FEM
MDPI and ACS Style

Tian, B.; Zhao, Y.; Jiang, Z.; Zhang, L.; Liao, N.; Liu, Y.; Meng, C. Fabrication and Structural Design of Micro Pressure Sensors for Tire Pressure Measurement Systems (TPMS). Sensors 2009, 9, 1382-1393.

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