- Article
MEMS-Based Electrochemical Seismometer Relying on a CAC Integrated Three-Electrode Structure
- Xu She,
- Junbo Wang,
- Deyong Chen,
- Jian Chen,
- Chao Xu,
- Wenjie Qi,
- Bowen Liu and
- Tian Liang
This study developed a MEMS-based electrochemical seismometer relying on a cathode–anode–cathode (CAC) integrated three-electrode structure where two cathodes were positioned on two surfaces of a silicon wafer, while one anode was positio...